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Physical Review B - Condensed Matter and Materials Physics

Volumn 65, Issue 16, 2002, Pages 1653231-16532311

Si-rich 6H- and 4H-SiC(0001) 3 × 3 surface oxidation and initial SiO2/SiC interface formation from 25 to 650 °C

(4) Amy, F a Soukiassian, P a Hwu, Y K a Brylinski, C a

a DIF (France)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON CARBIDE; SILICON DERIVATIVE; SILICON DIOXIDE;

ARTICLE; OXIDATION; RADIATION; ROOM TEMPERATURE; SPECTROSCOPY; TEMPERATURE DEPENDENCE;

EID: 0037091408 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (82)

References (63)

1
- 0010989984
- (1904) Acad. Sci., Paris, C. R. , vol.139 , pp. 773
- Moissan, H.¹

2
- 0021464564
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 1271
- Bozso, F.¹ Muehlhoff, L.² Trenary, M.³ Choyke, W.J.⁴ Yates J.T., Jr.⁵

3
- 0000544172
- and references therein
- (1997) J. Phys. IV , vol.7 , pp. 191
- Bouix, J.¹ Berthet, M.P.² Bosselet, F.³ Favre, R.⁴ Peronnet, M.⁵ Viala, J.C.⁶ Vincent, C.⁷ Vincent, H.⁸

4
- 0004062139
- (Akademic Verlag, Berlin), and references therein
- (1998) Silicon Carbode, A Review of Fundamental Questions and Applications to Current Device Technology , vol.1-2
- Choyke, W.J.¹ Matsunami, H.M.² Pensl, G.³

5
- 0003597031
- EMIS Datareview Series (INSPEC, London), and references therein
- (1995) Properties of Silicon Carbide , vol.13
- Harris, G.¹

6
- 33744690639
- (1997) Mater. Res. Bull. , vol.22

7
- 33744588949
- (March), and references therein
- (1999) IEEE Trans. Electron Devices , vol.46

8
- 0033080013
- (1999) Solid-State Electron. , vol.43 , pp. 343
- Aroutiounian, V.M.¹ Bouniatian, V.V.² Soukiassian, P.³

9
- 0001912469
- (1977) Chem. Technol. , vol.7 , pp. 40
- Bokros, J.C.¹ Akins, R.J.² Shim, H.S.³ Hanbold, A.D.⁴ Agarwal, N.K.⁵

10
- 38549109871
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 744
- Smith, K.L.¹ Black, K.M.²

11
- 0031533326
- references therein
- (1997) Phys. Status Solidi B , vol.202 , pp. 447
- Bermudez, V.M.¹

12
- 0343690479
- references therein
- (1997) J. Phys. IV , vol.7 , pp. 10
- Soukiassian, P.¹ Semond, E.²

13
- 0000192005
- references therein
- (1999) Mater. Sci. Eng., B , vol.61 , pp. 506
- Soukiassian, P.¹

14
- 0001327204
- (1996) Phys. Rev. Lett. , vol.77 , pp. 2013
- Semond, F.¹ Soukiassian, P.² Mayne, A.³ Dujardin, G.⁴ Douillard, L.⁵ Jaussaud, C.⁶

15
- 3743135131
- (1997) Phys. Rev. Lett. , vol.78 , pp. 907
- Soukiassian, P.¹ Semond, F.² Douillard, L.³ Mayne, A.⁴ Dujardin, G.⁵ Pizzagalli, L.⁶ Joachim, C.⁷

16
- 0000471991
- (1997) Phys. Rev. Lett. , vol.79 , pp. 2498
- Soukiassian, P.¹ Semond, F.² Mayne, A.³ Dujardin, G.⁴

17
- 4243997516
- (1998) Phys. Rev. Lett. , vol.81 , pp. 5868
- Derycke, V.¹ Soukiassian, P.² Mayne, A.³ Dujardin, G.⁴ Gautier, J.⁵

18
- 0034140698
- (2000) Surf. Sci. Lett. , vol.446
- Derycke, V.¹ Soukiassian, P.² Mayne, A.³ Dujardin, G.⁴

19
- 4243250526
- (1999) Phys. Rev. Lett. , vol.83 , pp. 1640
- Yeom, H.W.¹ Shimomura, M.² Kitamura, J.³ Hara, S.⁴ Tono, K.⁵ Matsuda, I.⁶ Mun, B.S.⁷ Huff, W.A.R.⁸ Kono, S.⁹ Ohta, T.¹⁰ Yoshida, S.¹¹ Okuski, H.¹² Kajimura, K.¹³ Fadley, C.S.¹⁴

20
- 0031336847
- (1997) Phys. Rev. Lett. , vol.79 , pp. 4818
- Reuter, K.¹ Bernhardt, J.² Wedler, H.³ Schardt, J.⁴ Starke, U.⁵ Heinz, K.⁶

21
- 3843060886
- (1998) Phys. Rev. Lett. , vol.80 , pp. 758
- Starke, U.¹ Schardt, J.² Bernhardt, J.³ Franke, M.⁴ Reuter, K.⁵ Wedler, H.⁶ Heinz, K.⁷ Furthmuller, J.⁸ Kackell, P.⁹ Bechstedt, F.¹⁰

22
- 0034276064
- (2000) Surf. Sci. Lett. , vol.464
- Amy, F.¹ Soukiassian, P.² Hwu, Y.K.³ Brylinski, C.⁴

23
- 0034667044
- (2000) Phys. Rev. B , vol.62 , pp. 10335
- Schardt, J.¹ Bernhardt, J.² Starke, U.³ Heinz, K.⁴

24
- 0001479369
- (1999) Phys. Rev. B , vol.59 , pp. 12224
- Coati, A.¹ Sauvage-Simkin, M.² Garreau, Y.³ Pinchaux, R.⁴ Argunova, T.⁵ Aïad, K.⁶

25
- 0000432009
- (1996) Phys. Rev. B , vol.53 , pp. 13793
- Johansson, L.I.¹ Owman, F.² Martensson, P.³

26
- 0001407335
- (1998) Phys. Rev. B , vol.58 , pp. 16396
- Forbeaux, I.¹ Themlin, J.M.² Debever, J.M.³

27
- 0001700452
- (1999) Appl. Phys. Lett. , vol.75 , pp. 650
- Naitoh, M.¹ Takami, J.² Nishigaki, S.³ Toyama, T.⁴

28
- 0030085257
- (1996) Surf. Sci. , vol.346 , pp. 49
- Kulakov, M.A.¹ Henn, G.² Bullemer, B.³

29
- 0029207936
- (1995) Appl. Surf. Sci. , vol.84 , pp. 45
- Bermudez, V.M.¹

30
- 4244147907
- (1995) Phys. Rev. B , vol.51 , pp. 14300
- Riehl-Chudoba, M.¹ Soukiassian, P.² Jaussaud, C.³ Dupont, S.⁴

31
- 0000130245
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2144
- Semond, F.¹ Douillard, L.² Soukiassian, P.³ Dunham, D.⁴ Amy, F.⁵ Rivillon, S.⁶

32
- 0030232192
- (1996) Appl. Surf. Sci. , vol.104 , pp. 79
- Semond, F.¹ Soukiassian, P.² Mangat, P.S.³ Hurych, Z.⁴ Di Cioccio, L.⁵ Jaussaud, C.⁶

33
- 0000243650
- (1999) Appl. Phys. Lett. , vol.75 , pp. 3360
- Amy, F.¹ Soukiassian, P.² Hwu, Y.K.³ Brylinski, C.⁴

34
- 0000216526
- (1999) Phys. Rev. B , vol.60 , pp. 5673
- Simon, L.¹ Kubler, L.² Ermolieff, A.³ Billon, T.⁴

35
- 0000696886
- (2001) Surf. Sci. Lett. , vol.472
- Virojanadara, C.¹ Johansson, L.I.²

36
- 0003675248
- Wiley-Interscience, New York
- (1998) Modern Semiconductor Devices Physics
- Sze, S.M.¹

37
- 0003859870
- Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
- Kluwer Academic, Dortrecht
- (1998) NATO Science Series High Technology , vol.3
- Garfunkel, E.¹ Gusev, E.² Vul, A.³

38
- 0001136342
- references therein
- (1996) J. Electron. Mater. , vol.25 , pp. 909
- Lipkin, L.A.¹ Palmour, J.W.²

39
- 0001203064
- (1998) Appl. Phys. Lett. , vol.73 , pp. 2161
- Vathulya, V.R.¹ Wang, D.N.² White, M.H.³

40
- 0000102171
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2141
- Afanas'ev, V.V.¹ Stesmans, A.² Bassler, M.³ Pensl, G.⁴ Schulz, M.J.⁵ Harris, C.I.⁶

41
- 33744622461
- (1996) Appl. Phys. Lett. , vol.69 , Issue.2252
- Afanas'ev, V.V.¹ Stesmans, A.²

42
- 0043210897
- (1999) J. Appl. Phys. , vol.85 , pp. 8292
- Afanas'ev, V.V.¹ Stesmans, A.² Bassler, M.³ Pensl, G.⁴ Schulz, M.J.⁵ Harris, C.I.⁶

43
- 6744249859
- (1996) Appl. Phys. Lett. , vol.68 , pp. 803
- Shenoy, J.N.¹ Cooper J.A., Jr.² Melloch, M.R.³

44
- 0000088192
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2231
- Xie, W.¹ Shenoy, J.N.² Sheppard, S.T.³ Melloch, M.R.⁴ Cooper J.A., Jr.⁵

45
- 21844494663
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 767
- Hornetz, B.¹ Michel, H.-J.² Halbritter, J.³

46
- 0000535314
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 1597
- Önneby, C.¹ Pantano, C.G.²

47
- 0038642526
- (1999) IEEE Electron Device Lett. , vol.20 , pp. 241
- Schorner, R.¹ Friedrichs, P.² Peters, D.³ Stephani, D.⁴

48
- 0001441489
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2028
- Li, H.F.¹ Dimitrijev, S.² Harrison, H.B.³ Sweatman, D.⁴

49
- 0000397834
- (2000) Appl. Phys. Lett. , vol.76 , pp. 1713
- Chung, G.Y.¹ Tin, C.C.² Williams, J.R.³ McDonald, K.⁴ Di Ventra, M.S.⁵ Pantelides, T.⁶ Feldman, L.C.⁷ Weller, R.A.⁸

50
- 0009204161
- edited by E. Garfunkel, E. Gusev, and A. Vul', of NATO Sciences Series High Technology, (Kluwer Academic, Dortrecht)
- (1998) Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices , vol.3 , pp. 257
- Soukiassian, P.¹

51
- 0009204481
- edited by E. Garfunkel, E. Gusev, and A. Vul', of NATO Science Series High Technology (Kluwer Academic, Dortrecht)
- (1998) Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices , vol.3 , pp. 447
- Lucovsky, G.¹ Niimi, H.²

52
- 0035820753
- (2001) Phys. Rev. Lett. , vol.86 , pp. 4342
- Amy, F.¹ Enriquez, H.² Soukiassian, P.³ Storino, P.F.⁴ Chabal, Y.J.⁵ Mayne, A.J.⁶ Dujardin, G.⁷ Hwu, Y.K.⁸ Brylinski, C.⁹

53
- 0035806113
- (2001) Appl. Phys. Lett. , vol.78 , pp. 3601
- Radtke, C.¹ Baumvol, I.J.R.² Morais, J.³ Stedile, F.C.⁴

54
- 3343006353
- and references therein
- (1988) Phys. Rev. B , vol.38 , pp. 6084
- Himpsel, F.J.¹ McFeely, F.R.² Taleb-Ibrahimi, A.³ Yarmoff, J.A.⁴ Hollinger, G.⁵

55
- 0029344378
- and references therein
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1626
- Lu, Z.H.¹ Graham, M.J.² Tay, S.P.³ Jiang, D.T.⁴ Tan, K.H.⁵

56
- 0031359967
- (1997) Appl. Phys. A: Mater. Sci. Process , vol.65 , pp. 587
- Starke, U.¹ Schardt, J.² Franke, M.³

57
- 0032372455
- (1998) Surf. Rev. Lett. , vol.5 , pp. 181
- Schardt, J.¹ Bernhardt, J.² Starke, U.³ Heinz, K.⁴

58
- 0001610270
- (1999) Phys. Rev. Lett. , vol.82 , pp. 2107
- Starke, U.¹ Schardt, J.² Bernhardt, J.³ Franke, M.⁴ Heinz, K.⁵

59
- 0004226799
- Pergamon, Oxford
- (1993) Materials Thermochemistry, 6th ed.
- Kubaschewski, O.¹ Alcock, C.D.² Spencer, P.J.³

60
- 0039189879
- (2001) Appl. Phys. Lett. , vol.79 , pp. 767
- Amy, F.¹ Enriquez, H.² Soukiassian, P.³ Brylinski, C.⁴ Mayne, A.⁵ Dujardin, G.⁶

61
- 33744638520
- unpublished
- Hofrichter, A.¹ Drevillon, B.² Amy, F.³ Soukiassian, P.⁴

62
- 0000539707
- (1986) Phys. Rev. B , vol.34 , pp. 2706
- Tabe, M.¹ Chiang, T.T.² Lindau, I.³ Spicer, W.E.⁴

63
- 0001743010
- (2000) Phys. Rev. Lett. , vol.84 , pp. 943
- Buczko, R.¹ Pennycook, S.J.² Pantalides, S.³

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