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Surface Science

Volumn 472, Issue 1-2, 2001, Pages

Interfacial investigation of in situ oxidation of 4H-SiC

(2) Virojanadara, C a Johansson, L I a

a LINKÖPING UNIVERSITY (Sweden)

Author keywords

Oxidation; Semi conductor insulator interfaces; Silicon carbide; Silicon oxides

Indexed keywords

EID: 0000696886 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(00)00967-5 Document Type: Article

Times cited : (65)

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