Structure and properties of cubic silicon carbide (100) surfaces: A review

Physica Status Solidi (B) Basic Research

Volumn 202, Issue 1, 1997, Pages 447-473

  Bermudez, V M ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031533326     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3951(199707)202:1<447::AID-PSSB447>3.0.CO;2-I     Document Type: Article

References (93)

1. H. MORKOÇ, S. STRITE, G. D. GAO, M. E. LIN, B. SVERDLOV, and M. BURNS, J. Appl. Phys. 76, 1363 (1994).
2. P. A. IVANOV and V. E. CHELNOKOV, Fiz. Tekh. Poluprov. 29, 1921 (1995) (Soviet Phys. -Semiconductors 29, 1003 (1995)).
3. C. E. WEITZEL, J. W. PALMOUR, C. H. CARTER, JR., K. MOORE, K. J. NORDQUIST, S. ALLEN, C. THERO, and M. BHATNAGAR, IEEE Trans. Electron Devices 43, 1732 (1996).
4. U. STARKE, phys. st at. sol. (b) 202, 475 (1997).
5. R. KAPLAN and V. M. BERMUDEZ, in: Properties of Silicon Carbide - EMIS Data Reviews Series No. 13, Ed. G. L. HARRIS, INSPEC, London 1995 (p. 101).
6. J. POLLMANN, P. KRÜGER, and M. SABISCH, phys. stat. sol. (b) 202, 421 (1997).
7. J. A. POWELL, L. G. MATUS, and M. A. KUCZMARSKI, J. Electrochem. Soc. 134, 1558 (1987).
8. V. M. BERMUDEZ and J. P. LONG, Appl. Phys. Lett. 66, 475 (1995).
9. R. KAPLAN, Surf. Sci. 215, 111 (1989); J. Vacuum Sci. Technol. A 6, 829 (1989).
10. R. KAPLAN, Surf. Sci. 215, 111 (1989); J. Vacuum Sci. Technol. A 6, 829 (1989).
11. R. KAPLAN and T. M. PARRILL, Surf. Sci. 165, L45 (1986).
12. K. FURUKAWA, Y. TAJIMA, H. SAITO, Y. FUJII, A. SUZUKI, and S. NAKAJIMA, Jpn. J. Appl. Phys. 32, L645 (1993).
13. K. SHIBAHARA, S. NISHINO, and H. MATSUNAMI, Appl. Phys. Lett. 50, 1888 (1987).
14. J. A. POWELL, L. G. MATUS, M. A. KUCZMARSKI, C. M. CHOREY, T. T. CHENG, and P. PIROUZ, Appl. Phys. Lett. 51, 823 (1987).
15. H. S. KONG, Y. C. WANG, J. T. GLASS, and R. F. Davis, J. Mater. Res. 3, 521 (1988).
16. R. KAPLAN, J. Appl. Phys. 56, 1636 (1984).
17. J. J. BELLINA, JR., J. FERRANTE, and M. V. ZELLER, J. Vacuum Sci. Technol. A 4, 1692 (1986).
18. J. J. BELLINA, JR. and M. V. ZELLER, Appl. Surf. Sci. 25, 380 (1986).
19. D. R. WHEELER and S. V. PEPPER, Surf. Interface Anal. 10, 153 (1987).
20. O. KUBASCHEWSKI and C. B. ALCOCK, Metallurgical Thermochemistry, 5th ed., Pergamon Press, Oxford 1979.
21. M. DAYAN, J. Vacuum Sci. Technol. A 3, 361 (1985); 4, 38 (1986).
22. M. DAYAN, J. Vacuum Sci. Technol. A 3, 361 (1985); 4, 38 (1986).
23. S. HARA, W. F. J. SLIJKERMAN, J. F. VAN DER VEEN, I. OHDOMARI, S. MISAWA, E. SAKUMA, and S. YOSHIDA, Surf. Sci. 231, L196 (1990).
24. T. M. PARRILL and Y. W. CHUNG, Surf. Sci. 243, 96 (1991).
25. G. L. HARRIS, see [5] (Chap. 1).
26. M. W. ZEMANSKY, Heat and Thermodynamics, Chap. 11, 5th ed., McGraw-Hill Publ. Co., New York 1968.
27. H. NISHINO, W. YANG, Z. DOHNÁLEK, V. A. UKRAINTSEV, W. J. CHOYKE, and J. T. YATES, JR., J. Vacuum Sci. Technol. A 15, 182 (1997).
28. W. MÖNCH, Semiconductor Surfaces and Interfaces, Springer-Verlag, Berlin 1993.
29. T. YOSHINOBU, I. IZUMIKAWA, H. MITSUI, T. FUYUKI, and H. MATSUNAMI, Appl. Phys. Lett. 59, 2844 (1991).
30. S. HARA, Y. AOYAGI, M. KAWAI, S. MISAWA, E. SAKUMA, and S. YOSHIDA, Surf. Sci. 273, 437 (1992). S. HARA, T. MEGURO, Y. AOYAGI, M. KAWAI, S. MISAWA, E. SAKUMA, and S. YOSHIDA, Thin Solid Films 225, 240 (1993).
31. S. HARA, Y. AOYAGI, M. KAWAI, S. MISAWA, E. SAKUMA, and S. YOSHIDA, Surf. Sci. 273, 437 (1992). S. HARA, T. MEGURO, Y. AOYAGI, M. KAWAI, S. MISAWA, E. SAKUMA, and S. YOSHIDA, Thin Solid Films 225, 240 (1993).
32. T. FUYUKI, T. YOSHINOBU, and H. MATSUNAMI, Thin Solid Films 225, 225 (1993).
33. S. HARA, Y. AOYAGI, M. KAWAI, S. MISAWA, E. SAKUMA, and S. YOSHIDA, Surf. Sci. 278, L141 (1992).
34. J. M. POWERS, A. WANDER, M. A. VAN HOVE, and G. A. SOMOHJAI, Surf. Sci. 260, L7 (1992).
35. P. SOUKIASSIAN, F. SEMOND, L. DOUILLARD, A. MAYNE, G. DUJARDIN, L. PIZZAGALLI, and C. JOACHIM, Phys. Rev. Lett. 78, 907 (1997).
36. L. DOUILLARD, F. SEMOND, P. SOUKIASSIAN, D. DUNHAM, F. AMY, S. RIVILLON, and Z. HURYCH, Surf. Rev. Lett., in press.
37. M. L. SHEK, Surf. Sci. 349, 317 (1996).
38. V. M. BERMUDEZ J. Appl. Phys. 66, 6084 (1989).
39. M. L. SHEK, K. E. MIYANO, Q.-Y. DONG, T. A. CALLCOTT, and D. L. EDERER, J. Vacuum Sci. Technol. A 12, 1079 (1994).
40. E. LANDEMARK, C. J. KARLSSON, Y.-C. CHAO, and R. I. G. UHRBERG, Phys. Rev. Lett. 69, 1588 (1992).
41. G. K. WERTHEIM, D. M. RIFFE, J. E. ROWE, and P. H. CITRIN, Phys. Rev. Lett. 67, 120 (1991).
42. Y. LI and P. J. LIN-CHUNG, Phys. Rev. B 36, 1130 (1987).
43. V. M. BERMUDEZ and R. KAPLAN, Phys. Rev. B 44, 11149 (1991).
44. V. E. HENRICH, Appl. Surf. Sci. 6, 87 (1980).
45. J. N. CARTER. Solid State Commun. 72, 671 (1989).
46. B. I. CRAIG and P. V. SMITH, Surf. Sci. 233, 255 (1990); in: The Structure of Surfaces III, Eds. S. Y. TONG, M. A. VAN HOVE, K. TAKAYANAGI, and X. D. XIE, Springer-Verlag, Berlin 1991 (p. 545).
47. B. I. CRAIG and P. V. SMITH, Surf. Sci. 233, 255 (1990); in: The Structure of Surfaces III, Eds. S. Y. TONG, M. A. VAN HOVE, K. TAKAYANAGI, and X. D. XIE, Springer-Verlag, Berlin 1991 (p. 545).
48. S. P. MEHANDRU and A. B. ANDERSON, Phys. Rev. B 42, 9040 (1990).
49. L. WENCHANG, Y. WEIDONG, and Z. KAIMING, J. Phys.: Condensed Matter 3, 9079 (1991).
50. P. BADZIAG, Phys. Rev. B 44, 11143 (1991); Surf. Sci. 269/270, 1152 (1992); Diamond Relat. Mater. 1, 285 (1992).
51. P. BADZIAG, Phys. Rev. B 44, 11143 (1991); Surf. Sci. 269/270, 1152 (1992); Diamond Relat. Mater. 1, 285 (1992).
52. P. BADZIAG, Phys. Rev. B 44, 11143 (1991); Surf. Sci. 269/270, 1152 (1992); Diamond Relat. Mater. 1, 285 (1992).
53. H. VAN, X. HU, and H. JÓNSSON, Surf. Sci. 316, 181 (1994).
54. X. HU, H. YAN, M. KOHYAMA, and F. S. OHUCHI, J. Phys.: Condensed Matter 7, 1069 (1995).
55. T. HALICIOGLU, Phys. Rev. B 51, 7217 (1995).
56. M. KITABATAKE and J. E. GREENE, Appl. Phys. Lett. 69, 2048 (1996); Jpn. J. Appl. Phys. 35, 5261 (1996).
57. M. KITABATAKE and J. E. GREENE, Appl. Phys. Lett. 69, 2048 (1996); Jpn. J. Appl. Phys. 35, 5261 (1996).
58. T. HALICIOGLU, Thin Solid Films 286, 184 (1996).
59. R. GUTIERREZ and TH. FRAUENHEIM, Mater. Res. Soc. Symp. Proc. 423, 427 (1996).
60. H. YAN, A. P. SMITH, and H. JÓNSSON, Surf. Sci. 330, 265 (1995).
61. M. SABISCH, P. KRÜGER, A. MAZUR, M. ROHLFING, and J. POLLMANN, Phys. Rev. B 53, 13121 (1996).
62. J. POLLMANN, P. KRÜGER, M. ROHLFING, M. SABISCH, and D. VOGEL, Appl. Surf. Sci. 104/105, 1 (1996).
63. P. KÄCKELL, J. FURTHMÜLLER, and F. BECHSTEDT, Surf. Sci. 352/354, 55 (1996); Appl. Surf. Sci. 104/105, 45 (1996).
64. P. KÄCKELL, J. FURTHMÜLLER, and F. BECHSTEDT, Surf. Sci. 352/354, 55 (1996); Appl. Surf. Sci. 104/105, 45 (1996).
65. A. CATELLANI, G. GALLI, and F. GYGI, Phys. Rev. Lett. 77, 5090 (1996).
66. B. I. CRAIG and P. V. SMITH, Physica 170B, 518 (1991).
67. P. SOUKIASSIAN, F. SEMOND, A. MAYNE, and G. DUJARDIN, submitted for publication.
68. J. KITAMURA, S. HARA, H. OKUSHI, S. YOSHIDA, S. MISAWA, and K. KAJIMURA, in: Proc. 15th Symp. Materials Science and Engineering, Hosci Univ., 1997, in press (contact S. HARA at: shara@etl.go.jp).
69. S. HARA, S. MISAWA, S. YOSHIDA, and Y. AOYAGI, Phys. Rev. B 50, 4548 (1994); Iust. Phys. Conf. Ser. No. 137, 177 (1994).
70. S. HARA, S. MISAWA, S. YOSHIDA, and Y. AOYAGI, Phys. Rev. B 50, 4548 (1994); Iust. Phys. Conf. Ser. No. 137, 177 (1994).
71. C.-S. CHANG, N.-J. ZHENG, I. S. T. TSONG, Y.-C. WANG, and R. F. DAVIS, J. Amer. Ceram. Soc. 73, 3264 (1990); J. Vacuum Sci. Technol. B 9, 681 (1991).
72. C.-S. CHANG, N.-J. ZHENG, I. S. T. TSONG, Y.-C. WANG, and R. F. DAVIS, J. Amer. Ceram. Soc. 73, 3264 (1990); J. Vacuum Sci. Technol. B 9, 681 (1991).
73. S. HAHA, J. KITAMURA, H. OKUSHI, S. MISAWA, S. YOSHIDA, and Y. TOKUMARU, Surf. Sci. 357/358, 436 (1996).
74. F. SEMOND, P. SOUKIASSIAN, A. MAYNE, G. DUJARDIN, L. DOUILLARD, and C. JAUSSAUD, Phys. Rev. Lett. 77, 2013 (1996).
75. S. HARA, J. KITAMURA, H. OKUSHI, S. MISAWA, S. YOSHIDA, and Y. TOKUMARU, submitted for publication.
76. F. SEMOND, L. DOUILLARD, P. SOUKIASSIAN, D. DUNHAM, F. AMY, and S. RIVILLON, Appl. Phys. Lett. 68, 2144 (1996).
77. F. SEMOND, P. SOUKIASSIAN, P. S. MANGAT, Z. HURYCH, L. DI CIOCCIO, and C. JAUSSAUD, Appl. Surf. Sci. 104/105, 79 (1996).
78. Y. SUDA, D. LUBBEN, T. MOTOOKA, and J. E. GREENE, J. Vacuum Sci. Technol. B 7, 1171 (1989).
79. S. HASEGAWA, S. NAKAMURA, N. KAWAMOTO, H. KISHIBE, and Y. MIZOKAWA, Surf. Sci. 206, L851 (1988).
80. J. M. POWERS, A. WANDER, P. J. ROUS, M. A. VAN HOVE, and G. A. SOMORJAI, Phys. Rev. B 44, 11159 (1991).
81. J. P. LONG, V. M. BERMUDEZ, and D. E. RAMAKER, Phys. Rev. Lett. 76, 991 (1996).
82. F. SEMOND, P. SOUKIASSIAN, P. S. MANGAT, and L. DI CIOCCIO, J. Vacuum Sci. Technol. B 13, 1591 (1995).
83. J. P. LONG and V. M. BERMUDEZ, unpublished.
84. D. E. RAMAKER, Crit. Rev. Solid State Mater. Sci. 17, 211 (1991).
85. B. I. CRAIG and P. V. SMITH, Surf. Sci. 256, L609 (1991).
86. B. I. CRAIG and P. V. SMITH, Surf. Sci. 276, 174 (1992); Erratum, Surf. Sci. 285, 295 (1993).
87. B. I. CRAIG and P. V. SMITH, Surf. Sci. 276, 174 (1992); Erratum, Surf. Sci. 285, 295 (1993).
88. P. KÄCKELL, J. FURTHMÜLLER, F. BECHSTEDT, G. KRESSE, and J. HAFNER, Phys. Rev. B 54, 10304 (1996).
89. Q. A. BHATTI, G. J. MORAN, and C. C. MATTHAI, Mater. Res. Soc. Symp. Proc. 423, 439 (1996).
90. L. J. CLARKE, Surface Crystallography, Chap. 1, Wiley, Chichester 1985.
91. V. VAN ELSBERGEN, O. JANZEN, and W. MÖNCH, Mater. Sci. Engng. B, in press.
92. V. M. BERMUDEZ, Surf. Sci. 276, 59 (1992).
93. O. JANZEN, V. VAN ELSBERGEN, and W. MÖNCH, in: Proc. 23rd Internat. Conf. Physics of Semiconductors, Berlin 1996, World Scientific, Singapore 1996 (p. 915).