A characteristic study of micromirror with sidewall electrodes

International Journal of Optomechatronics

Volumn 1, Issue 3, 2007, Pages 231-258

  Bai, Yanhui ^a   Wei Yeow, John Tze ^a   Wilson, Brian Campbell ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85009589356     PISSN: 15599612     EISSN: 15599620     Source Type: Journal    
DOI: 10.1080/15599610701548852     Document Type: Article

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