A study of dynamic characteristics and simulation of MEMS torsional micromirrors

Sensors and Actuators, A: Physical

Volumn 120, Issue 1, 2005, Pages 199-210

  Zhao, Jian Ping ^a   Chen, Hua Ling ^a   Huang, Jian Ming ^b   Liu, Ai Qun ^b  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Dynamic characteristics; Electrostatic torsional micromirror; MEMS; Resonant frequency

Indexed keywords

COMPUTER SIMULATION; DYNAMIC RESPONSE; ELECTRIC POTENTIAL; ELECTROSTATICS; MATHEMATICAL MODELS; MIRRORS; NATURAL FREQUENCIES; RUNGE KUTTA METHODS; TORSIONAL STRESS;

BIAS VOLTAGES; DYNAMIC CHARACTERISTICS; ELECTROSTATIC TORSIONAL MICROMIRRORS; HARMONIC VOLTAGES;

MICROELECTROMECHANICAL DEVICES;

EID: 17444399314     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.11.013     Document Type: Article

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