Modeling air-damping effect in a bulk micromachined 2D tilt mirror

Sensors and Actuators, A: Physical

Volumn 102, Issue 1-2, 2002, Pages 42-48

  Hao, Zhili ^a   Clark, Rod ^a   Hammer, Jay ^a   Whitley, Michael ^a   Wingfield, Brian ^a  

^a MEMS Optical Incorporated   (United States)

Author keywords

Air damping; Bulk micromachined; Thermal analog; Tilt mirror

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; DAMPING; GREEN'S FUNCTION; MIRRORS; NONLINEAR EQUATIONS; THERMAL DIFFUSION;

AIR DAMPING;

MICROMACHINING;

EID: 0036896681     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00273-X     Document Type: Article

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