Piston-motion micromirror based on electrowetting of liquid metals

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 285-294

  Zeng, Hongjun ^a   Feinerman, Alan D ^a,b   Wan, Zhiliang ^a   Patel, Pancham R ^a  

^a 1120 Science and Engineering Offices   (United States)

^b UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

Author keywords

Electrowetting; Microelectromechanical systems (MEMS); Micromirror; Piston motion

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; FABRICATION; GALLIUM; HYSTERESIS; LIQUID METALS; MERCURY (METAL); MIRRORS; WETTING;

ELECTROWETTING; LIQUID METAL DROPS; MICROMIRROR; PISTON MOTION;

MICROELECTROMECHANICAL DEVICES;

EID: 18844377153     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839335     Document Type: Article

References (32)

1. J. E. Ford, V. A. Aksyuk, D. J. Bishop, and J. A. Walker, "Wavelength add-drop switching using tilting micromirrors," J. Lightw. Technol., vol. 17, no. 5, pp. 904-911, May 1999.
2. World Wide Web site for Lucent's New All-Optical Router Uses Bell Labs Microscopic Mirrors [Online]. Available: http://www.belllabs.com/news/ 1999/
3. R. P. Grosso and M. Yellin, "The membrane mirror as an adaptive optical element," J. Opt. Soc. Amer., vol. 67, pp. 399-406, 1977.
4. W. D. Cowan, W. D. Cowan, M. K. Lee, B. M. Welsh, V. M. Bright, and M. C. Roggemann, "Surface micromachined segmented mirrors for adaptive optics," IEEE J. Sel. Topics Quantum Electron., vol. 5, no. 1, pp. 90-101, Jan./Feb. 1999.
5. J. Lin, Q. X. Zhang, and A. Q. Liu, "Advanced fiber optical switch using deep RIE (DRIE) fabrication," Sens. Actuators A, Phys., vol. 102, pp. 286-295, 2003.
6. L. Y. Lin, E. L. Goldstein, and R. W. Tkach, "Free-space micromachined optical switches for optical networking," IEEE J. Sel. Topics Quantum Electron., vol. 5, no. 1, pp. 4-9, Jan./Feb. 1999.
7. W.-H. Juan and S. W. Pang, "High-aspect-ratio Si vertical micromirror arrays for optical switching," J. Microelectromech. Syst., vol. 7, no. 2, pp. 207-213, June 1998.
8. S. Kurth, R. Hahn, C. Kaufmann, K. Kehr, J. Mehner, U. Wollmann, W. Dotzel, and T. Gessner, "Silicon mirrors and micromirror arrays for spatial laser beam modulation," Sens. Actuators A, Phys., vol. 66, pp. 76-82, 1998.
9. P. F. Van Kessel, L. J. Hornbeck, R. E. Meier, and M. R. Douglass, "A MEMS-based projection display," in Proc. IEEE, vol. 86, Aug. 1998, pp. 1687-1704.
10. K. Yamada and T. Kuriyama, "A novel asymmetric silicon micro-mirror for optical beam scanning display micro electro mechanical systems," in MEMS 98 Proc., The Eleventh Annual International Workshop, 1998, pp. 110-115.
11. S.-W. Chung, J.-W. Shin, Y.-K. Kim, and B.-S. Han, "Design and fabrication of micro mirror supported by electroplated nickel posts," The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, pp. 312-315, June 25-29, 1995.
12. M.-H. Kiang, M.-H. Kiang, O. Solgaard, K. Y. Lau, and R. S. Muller, "Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning," J. Microelectromech. Syst., vol. 7, no. 1, pp. 27-37, Mar. 1998.
13. J. Bühler, J. Funk, J. G. Korvink, F.-P. Steiner, P. M. Sarro, and H. Baltes, "Electrostatic aluminum micromirrors using double-pass metallization," J. Microelectromech. Syst., vol. 6, no. 2, pp. 126-135, Jun. 1997.
14. Y. Yee, H.-J. Nam, S.-H. Lee, J. U. Bu, and J.-W. Lee, "PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage," Sens. Actuators A, Phys., vol. 89, pp. 166-173, 2001.
15. J. Bühler, J. Funk, O. Paul, F.-P. Steiner, and H. Baltes, "Thermally actuated CMOS micromirrors," Sens. Actuators A, Phys., vol. 46-47, pp. 572-575, 1995.
16. A. W. Adamson and A. P. Gast, Physical Chemistry of Surfaces, 6th ed., New York, 1997, pp. 192-202.
17. C. Quilliet and B. Berge, "Electrowetting: A recent outbreak," Curr. Opin. Colloid Interface Sci., vol. 6, pp. 34-39, 2001.
18. M. Vallet, B. Berge, and L. Vovelle, "Electrowetting of water and aqueous solutions on poly (eethylene terephthalate) insulating films," Polymer, vol. 37, no. 12, pp. 2465-2470, 1996.
19. J. Lee and C.-J. Kim, "Surface tension driven microactuation based on continuous electrowetting (CEW)," J. Microelectromech. Syst., vol. 9, no. 2, pp. 171-180, Jun. 2000.
20. K.-S. Yun, "A micropump driven by continuous electrowetting actuation for low voltage and low power operations," in Proc. IEEE Micro Electro Mechanical Systems (MEMS'01), Interlaken, Switzerland, Jan. 2001, pp. 487-490.
21. M. G. Pollack, R. B. Fair, and A. D. Shenderov, "Electrowetting-based actuation of liquid droplets for microfluidics applications," Appl. Phys. Lett., vol. 77, no. 11, 2000.
22. A. W. Adamson and A. P. Gast, Phys. Chem. Surfaces, 6th ed. New York, 1997, pp. 353-355.
23. V. Peykov, A. Quinn, and J. Ralston, "Electrowetting: A model for contact-angle saturation," Colloid Polymer Sci., vol. 278, pp. 789-793, 2000.
24. W. J. J. Welters and L. G. J. Fokkink, "Fast electrically switchable capillary effects," Langmuir, vol. 14, pp. 1535-1538, 1998.
25. H. J. J. Verheijen and M. W. J. Prins, "Reversible electrowetting and trapping of charge: Model and experiments," Langmuir, vol. 15, pp. 6616-6620, 1999.
26. R. E Johnson Jr. and R. H. Dettre, "Contact angle hysteresis I, study of an idealized rough surface," Adv. Chemistry Series, vol. 43, pp. 112-135, 1964.
27. A. Torkkeli, J. Saarilahti, A. Haara, H. Harma, T. Soukka, and P. Tolonen, "Electrostatic transportation of water droplets on superhydrophobic surfaces," in Proc. IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2001, Interlaken, Switzerland, 2001, pp. 475-478.
28. C. W. Extrand and Y. Kumagai, "An experimental study of contact angle hysteresis," J. Colloid Interface Sci., vol. 191, pp. 378-383, 1997.
29. K. Adachi and R. Takaki, "Vibration of a flattened drop I. Observation," J. Phys. Soc. Japan, vol. 53, no. 12, pp. 4184-4191, Dec. 1984.
30. R. W. Smithwick III and J. A. M. Boulet, "Vibration of microscopic mercury droplets on glass," J Colloid Interface Sci., vol. 130, no. 2, pp. 588-597, Jul. 1989.
31. U. Srinivasan, "Fluidic self-assembly of micromirrors onto microactuators using capillary forces," IEEE J. Sel. Topics Quantum Electron., vol. 8, no. 1, pp. 4-11, 2002.
32. B. McCarthy, V. M. Bright, and J. A. Neff, "A multi-component solder self-assembled micromirror," Sens. Actuators A, Phys., vol. 103, pp. 187-193, 2003.