Modelling and control of an electrostatically actuated torsional micromirror

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 2044-2052

  Zhu, Guchuan ^a   Packirisamy, Muthukumaran ^b   Hosseini, Mehran ^a   Peter, Yves Alain ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b Civil and Environmental Engineering   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; ELECTRODES; ELECTROSTATICS; MICROMACHINING; TORSIONAL STRESS;

AIR GAP; FRINGING FIELD; REFERENCE TRAJECTORIES; TORSIONAL MICROMIRRORS;

MIRRORS;

EID: 33748804976     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/017     Document Type: Article

References (22)

1. Thielicke E and Obermeier E 2000 Microactuators and their technologies Mechatronics 10 431-55
2. Hornbeck L J 1989 Deformable-mirror spatial light modulators in SPIE Crit. Rev. Ser. 1150 86-102
3. Nemirovsky Y 1998 Pull-in study of an electrostatic torsion microactuator IEEE J. Microelectromech. Syst. 7 373-9
4. Degani O, Socher E, Lipson A, Leitner T, Setter D J, Kaldor S and Nemirovsky Y 1998 Pull-in study of an electrostatic torsion microactuator J. Microelectromech. Syst. 7 373-9
5. Xiao Z, Wu X, Peng W and Farmer K R 2001 An angle-based design approach for rectangular electrostatic torsion actuators J. Microelectromech. Syst. 10 561-8
6. Nemirovsky Y and Bochobza-Degani O 2001 A methodology and model for the pull-in parameters of electrostatic actuators J. Microelectromech. Syst. 10 601-15
7. Hah D, Toshiyoshi H and Wu M C 2002 Design of electrostatic actuators for MOEMS Proc. Symp. on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2002) (Cannes-Mandelieu, France) pp 200-07
8. Bochobza-Degani O and Nemirovsky Y 2002 Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model Sensors Actuators A 97-98 569-78
9. Xiao Z, Peng W and Farmer K R 2003 Analytical behavior of rectangular electrostatic torsion actuators with nonlinear spring bending J. Microelectromech. Syst. 12 929-36
10. Yoon Y S, Kim J H, Choi H and Koh B C 2003 A low voltage actuated micromirror with an extra vertical electrode for 90° rotation J. Micromech. Microeng. 13 922-6
11. Bhaskar A K, Packirisamy M and Bhat R B 2004 Modeling switching response of torsional micromirrors for optical microsystems J. Mech. Mach. Theory 39 1399-410
12. Fliess M, Lévine J, Martin P and Rouchon P 1995 Flatness and defect of non-linear systems: introductory theory and examples Int. J. Control 61 1327-61
13. Fliess M, Lévine J, Martin P and Rouchon P 1999 A Lie-Bäcklund approach to equivalence and flatness of nonlinear systems IEEE Trans. Autom. Control 44 922-37
14. Toshiyoshi H and Fujita H 1996 Electrostatic micro torsion mirrors for an optical switch matrix J. Microelectromech. Syst. 5 231-7
15. Sloggett G J, Barton N G and Spencer S J 1986 Fringing fields in disc capacitors J. Phys. A: Math. Gen. 19 27250-2736
16. Kirchhoff G 1877 Zur theorie des kondensators Mon. Akad. Wiss. Berl. 101-20
17. Steeneken P G, Rijks T G S M, van Beek J T M, Ulenaers M J E, de Coster J and Puers R 2005 Dynamics and squeeze film gas damping of a capacitive RF MEMS switch J. Micromech. Microeng. 15 176-84
18. Gere J M and Timoshenko S P 1997 Mechanics of Materials 4th edn (Boston: PWS)
19. Petersen K E 1982 Silicon as a mechanical material Proc. IEEE 70 420-57
20. Senturia S D 2001 Microsystem Design (Norwell, MA: Kluwer)
21. Lévine J 2004 Analyse et Commande des Systèmes Non Linéaires http://cas.ensmp.fr/%7Elevine/Enseignement/CoursENPC.pdf
22. Friedland B 1986 Control System Design: An Introduction to State-Space Methods (New York: McGraw-Hill)