Modelling and control of an electrostatically actuated torsional micromirror

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 2044-2052

  Zhu, Guchuan ^a   Packirisamy, Muthukumaran ^b   Hosseini, Mehran ^a   Peter, Yves Alain ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b Dept of Electrical and Computer Engineering   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; ELECTRODES; ELECTROSTATICS; MICROMACHINING; TORSIONAL STRESS;

AIR GAP; FRINGING FIELD; REFERENCE TRAJECTORIES; TORSIONAL MICROMIRRORS;

MIRRORS;

EID: 33748804976     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/017     Document Type: Article

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