Tilt-angle stabilization of electrostatically actuated micromechanical mirrors beyond the pull-in point

Journal of Microelectromechanical Systems

Volumn 13, Issue 6, 2004, Pages 988-997

  Chen, Jinghong ^a   Weingartner, Wendelin ^b   Azarov, Alexi ^b   Giles, Randy C ^b  

^a AGERE SYSTEMS   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

Feedback control; Microelectromechanical system (MEMS); Micromechanical mirror; Optical MEMS; Pull in effect

Indexed keywords

ALGORITHMS; ATTENUATION EQUALIZERS; CLOSED LOOP CONTROL SYSTEMS; ELECTROSTATIC ACTUATORS; FEEDBACK CONTROL; MIRRORS; OPTICAL DEVICES; OPTICAL SWITCHES; VOLTAGE CONTROL;

MICROELECTROMECHANICAL SYSTEM (MEMS); MICROMECHANICAL MIRROR; OPTICAL MICROELECTROMECHANICAL SYSTEM; PULL-IN EFFECT;

MICROELECTROMECHANICAL DEVICES;

EID: 10944253101     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.838391     Document Type: Article

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