Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 10, Issue 3, 2004, Pages 472-477

  Pu, Chuan ^a,b   Park, Sangtae ^a,c   Chu, Patrick B ^a,d   Lee, Shi Sheng ^a,e   Tsai, Ming ^f   Peale, David ^a,g   Bonadeo, Nico H ^a,h   Brener, Igal ^a,i  

^a Tellium Inc   (United States)

^b LEHIGH UNIVERSITY   (United States)

^c Applied MEMS Inc   (United States)

^d SEAGATE RESEARCH   (United States)

^e SiWave Inc   (United States)

^f Tessera Inc   (United States)

^g KLA TENCOR CORPORATION   (United States)

^h UNIVERSIDAD DE BUENOS AIRES   (Argentina)

ⁱ Amersham Biosciences   (United States)

Author keywords

Electrostatic actuation; Microelectromechanical systems (MEMS); Optical cross connect (OXC); Optical switching; Sidewall electrodes

Indexed keywords

DIGITAL TO ANALOG CONVERSION; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATIC ACTUATORS; MIRRORS; NATURAL FREQUENCIES; OPTICAL SWITCHES; RESONANCE; SWITCHING SYSTEMS;

ELECTROSTATIC FRINGING FIELDS; OPTICAL CROSS-CONNECTS (OXC); OPTICAL SWITCHING; SIDEWALL ELECTRODES;

MICROELECTROMECHANICAL DEVICES;

EID: 4344651236     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.828480     Document Type: Article

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