Squeeze film damping effect on the dynamic response of a MEMS torsion mirror

Journal of Micromechanics and Microengineering

Volumn 8, Issue 3, 1998, Pages 200-208

  Pan, Feixia ^a   Kubby, Joel ^a   Peeters, Eric ^a   Tran, Alex T ^a   Mukherjee, Subrata ^b  

^a XEROX CORPORATION   (United States)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; DYNAMIC RESPONSE; EQUATIONS OF MOTION; FILMS; FOURIER TRANSFORMS; MIRRORS; NUMERICAL ANALYSIS; ROTATION; TORQUE; TORSIONAL STRESS;

DAMPING TORQUES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032163224     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/3/005     Document Type: Article

References (14)

1. Michael W A 1961 Approximate solution of time-dependent gas film lubrication problems IBM Research Report RJ-205
2. Bellman A 1972 Dynamic Programming and Partial Differential Equations (New York: Academic)
3. Langlois W E 1962 Isothermal squeeze films Q. Appl. Math. 20 131-50
4. Pan F, Kubby J, Peeters E, Vitomirov O, Taylor D and Mukherjee S 1997 Design, modeling and verification of MEMS silicon torsion mirror SPIE Conf. (Austin, TX, 1997)
5. Starr J B 1990 Squeeze-film damping in solid-state accelerometers Tech. Digest IEEE Solid State Sensor and Actuator Workshop (Hilton Head Island, SC, 1990) pp 44-7
6. Andrews M, Harris I and Turner G 1993 A comparison of squeeze-film theory with measurements on a microstructure Sensors Actuators A 36 79-87
7. Andrews M, Turner G, Harris P and Harris I 1993 A resonant pressure sensor based on a squeeze film of gas Sensors Actuators A 36 219-26
8. Yang Y J and Senturia S D 1996 Numerical simulation of compressible squeeze-film damping Tech. Digest Solid State Sensor and Actuator Workshop (Hilton Head Island, SC, 1996) pp 76-9
9. Blech J J 1983 On isothermal squeeze films J. Lubrication Technol. 105 615-20
10. Darling R B, Hivick C and Xu J 1997 Compact analytical models for squeeze film damping with arbitrary venting conditions 1997 Int. Conf. on Solid-State Sensors and Actuators, Transducers '97 vol 2, pp 1113-6
11. Dötzel W, Gessner T, Hahn R, Kaufmann C, Kehr K, Kurth S and Mehner J 1997 Silicon mirrors and micromirror arrays for spatial laser beam modulation 1997 Int. Conf. on Solid-State Sensors and Actuators, Transducers '97 vol 1, pp 81-4
12. Griffin W S, Richardson H H and Yamanami S 1996 A study of squeeze film damping ASME J. Basic Eng. 88 451-6
13. Gross 1962 Gas Film Lubrication (New York: Wiley)
14. Veijola T, Kuisma H, Lahdenperä J and Ryhänen T 1995 Equivalent-circuit model of the squeeze film in a silicon accelerometer Sensors Actuators A 48 239-48