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Journal of Microelectromechanical Systems

Volumn 10, Issue 2, 2001, Pages 205-214

Linearization of electrostatically actuated surface micromachined 2-D optical scanner

(4) Toshiyoshi, Hiroshi a,b Piyawattanametha, Wibool b Chan, Cheng Ta b Wu, Ming C a,b

a IEEE (United States)

b UNIVERSITY OF CALIFORNIA (United States)

Author keywords

Electrostatic analysis; Electrostatic force; Microactuators; Optical 2 D scanner; Torsion mirror

Indexed keywords

ELECTROSTATIC ANALYSIS; OPTICAL SCANNER; TORSION MIRROR;

COMPUTER SIMULATION; CONTROL SYSTEM SYNTHESIS; FEEDBACK CONTROL; FIBER OPTICS; MICROMACHINING; MIRRORS; MULTISPECTRAL SCANNERS; OPTICAL SWITCHES; POLYSILICON; SCANNING; SCANNING ELECTRON MICROSCOPY;

MICROACTUATORS;

EID: 0035368876 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/84.925744 Document Type: Article

Times cited : (125)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.