Macro-modelling of a double-gimballed electrostatic torsional micromirror

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 532-547

  Zhou, Guangya ^a   Tay, Francis E H ^a   Chau, Fook Siong ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COMPUTER HARDWARE DESCRIPTION LANGUAGES; COMPUTER SIMULATION; DECENTRALIZED CONTROL; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROOPTICS; THREE TERM CONTROL SYSTEMS;

ANALOG HARDWARE DESCRIPTION LANGUAGE; DOUBLE-GIMBALLED ELECTROSTATIC TORSIONAL MICROMIRROR; REDUCED ORDER MACRO-MODEL; SEQUENTIAL-LOOP-CLOSING METHOD;

MIRRORS;

EID: 0141495486     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/303     Document Type: Article

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