Analytical modelling and simulations of a MEMS micro mirror - MATLAB implementation

The Experience of Designing and Application of CAD Systems in Microelectronics - Proceedings of the 7th International Conference, CADSM 2003

Volumn , Issue , 2003, Pages 360-365

  Cichalewski, Wojciech ^a   Napieralski, Andrzej ^a   Camon, Henri ^b   Estibals, Bruno ^b  

^a LODZ UNIVERSITY OF TECHNOLOGY   (Poland)

^b LAAS CNRS   (France)

Author keywords

Analytical model; Matlab; MEMS; Micro mirror

Indexed keywords

ANALYTICAL MODELS; COMPUTER AIDED DESIGN; MEMS; MICROELECTRONICS; MIRRORS; SILICON WAFERS; SINGLE CRYSTALS;

ANALYTICAL MODELLING AND SIMULATIONS; CALCULATION PROGRAMS; DYNAMICAL BEHAVIOURS; EXPERIMENTAL CHARACTERISTICS; MICRO MIRROR; PARAMETRIC MODELING; SINGLE CRYSTAL SILICON; TECHNOLOGICAL PROCESS;

MATLAB;

EID: 33749429511     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CADSM.2003.1255091     Document Type: Conference Paper

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