Silicon-micromachined scanning confocal optical microscope

Journal of Microelectromechanical Systems

Volumn 7, Issue 1, 1998, Pages 38-47

  Dickensheets, David L ^a,b,c,d,e,f   Kino, Gordon S ^a,b  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

^c UNIVERSITY OF COLORADO   (United States)

^d UNIVERSITY OF WASHINGTON   (United States)

^e STANFORD UNIVERSITY   (United States)

^f Montana State University   (United States)

Author keywords

Anisotropic etching; Grating lens; Miniature confocal microscope; Silicon micromachining; Torsional mirror

Indexed keywords

DIFFRACTION GRATINGS; FUSED SILICA; MICROMACHINING; MIRRORS; OPTICAL INSTRUMENT LENSES; OPTICAL SYSTEMS; SCANNING; SILICON;

ANISOTROPIC ETCHING; CONFOCAL OPTICAL MICROSCOPES; TORSIONAL MIRRORS;

OPTICAL MICROSCOPY;

EID: 0032023440     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.661382     Document Type: Article

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