Vertical combdrive based 2-D gimbaled micromirrors with large static rotation by backside island isolation

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 10, Issue 3, 2004, Pages 498-504

  Kwon, Sunghoon ^a   Milanović, Veljko ^b   Lee, Luke P ^a  

^a University of California at Berkeley   (United States)

^b Adriatic Research Institute   (United States)

Author keywords

Backside island isolation; Deep reactive ion etching (DRIE); Micromirror; Raster scanning; Silicon on insulator (SOI); Two axis scanner; Two dimensional (2 D) scanner; Vertical combdrive

Indexed keywords

ACTUATORS; ASPECT RATIO; CROSSTALK; MICROELECTROMECHANICAL DEVICES; OPTICAL ROTATION; REACTIVE ION ETCHING; RESONANCE; SCANNING; SIGNAL PROCESSING; SILICON ON INSULATOR TECHNOLOGY;

BACKSIDE ISLAND ISOLATION; DEEP REACTIVE ION ETCHING (DRIE); MICROMIRRORS; RASTER SCANNING; TWO-AXIS SCANNERS; TWO-DIMENSIONAL SCANNERS; VERTICAL COMB DRIVES;

MIRRORS;

EID: 4344608020     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.828493     Document Type: Article

References (11)

1. S. Blackstone and T. Brosnihan, "SOI MEMS technologies for optical switching," in Proc. IEEE/LEOS Int. Conf. Optical MEMS, 2001, pp. 35-36.
2. J. L. Yeh, H. Jiang, and N. C. Tien, "Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator," Journal of Microelectromechanical Systems, vol. 8, pp. 456-465, 1999.
3. R. A. Conant, J. T. Nee, K. Y. Lau, and R. S. Muller, "A flat high-frequency scanning micromirror," in Prof. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 2000, pp. 6-9.
4. U. Krishnamoorthy, L. Daesung, and O. Solgaard, "Self-aligned vertical electrostatic combdrives for micromirror actuation," J. Microelectromech. Syst., vol. 12, pp. 458-464, Aug. 2003.
5. S. Kwon, V. Milanovic, and L. P. Lee, "Large-displacement vertical microlens scanner with low driving voltage," IEEE Photon. Technol. Lett., vol. 14, pp. 1572-1574, Nov. 2002.
6. V. Milanovic, S. Kwon, and L. P. Lee, "Monolithic vertical combdrive actuators for adaptive optics," in Proc. 2002 IEEE/LEOS Int. Conf. Optical MEMS, pp. 57-58.
7. G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photon. Technol. Lett., vol. 13, pp. 606-608, June 2001.
8. H. Toshiyoshi, W. Piyawattanametha, C.-T. Chan, and M. C. Wu, "Linearization of electostatically actuated micromachined 2D optical scanner," J. Microelectromech. Syst., vol. 10, pp. 205-214, June 2001.
9. H. Schenk, P. Durr, D. Kunze, H. Lakner, and H. Kuck, "A resonantly excited 2D-micro-scanning-mirror with large deflection," Sens. Actuators A, Phys., vol. 89, pp. 104-111, 2001.
10. C. Tsai, P. A. Stupar, R. L. Borwick III, M. Pai, and J. DeNatale, "An isolated tunable capacitor with a linear capacitance voltage behavior," in Transducers '03, 12th Int. Conf. Solid-State Sensors, Actuators and Microsystems, Thousand Oaks, CA, June 8-12, 2003, pp. 833-836.
11. V. Milanovic, "Multilevel-beam SOI MEMS for optical applications," in Proc. 9th IEEE Int. Conf. Electronics, Circuits and Systems (ICECS'02), 2002. pp. 281-215.