Efficient modeling of a biaxial micromirror with decoupled mechanism

Sensors and Actuators, A: Physical

Volumn 120, Issue 1, 2005, Pages 7-16

  Yao, Yahong ^a   Zhang, Xiaoping ^b   Wang, Gaofeng ^a   Huang, Liji ^a  

^a Siargo Inc   (United States)

^b LEHIGH UNIVERSITY   (United States)

Author keywords

Analytical modeling; Biaxial micromirror; Decoupling design; Electrostatic actuation; MEMS

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY;

ANALYTICAL MODELING; BIAXIAL MICROMIRROR; ELECTROSTATIC ACTUATION; TORSION ACTUATORS;

MIRRORS;

EID: 17444390456     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.11.003     Document Type: Article

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