PZT actuated micromirror for nano-tracking of laser beam for high-density optical data storage

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 435-440

  Yee, Youngjoo ^a   Nam, Hyo Jin ^a   Lee, See Hyung ^a   Bu, Jong Uk ^a   Jeon, Young Sam ^a   Cho, Seong Moon ^a  

^a LG   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; LEAD COMPOUNDS; METALLIC FILMS; MICROACTUATORS; MIRRORS; NUMERICAL ANALYSIS; OPTICAL DATA STORAGE; PIEZOELECTRIC DEVICES; SOL-GELS; THIN FILMS;

LASER BEAM NANOTRACKING; MICROMIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033709142     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)