A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirror

Journal of Microelectromechanical Systems

Volumn 12, Issue 5, 2003, Pages 692-701

  Hao, Zhili ^a   Wingfield, Brian ^b   Whitley, Michael ^b   Brooks, Justin ^b   Hammer, Jay A ^c  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b AUBURN UNIVERSITY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Bulk micromachining; Design methodology; Electrical equivalent circuit; Torsion micromirror

Indexed keywords

COMPUTER AIDED ANALYSIS; DESIGN FOR TESTABILITY; ELECTRIC FIELD MEASUREMENT; ELECTROSTATIC DEVICES; EQUIVALENT CIRCUITS; MECHANICAL VARIABLES MEASUREMENT; TORSION METERS; TWO DIMENSIONAL;

BULK MICROMACHINED MICOMIRROR; ELECTROSTATIC MICROMIRROR; TORSION MICROMIRROR;

MICROELECTROMECHANICAL DEVICES;

EID: 0242406148     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.817888     Document Type: Article

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