2-dimensional micro scanner integrated with PZT thin film actuator

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 339-342

  Kawabata, Tatsuo ^a   Ikeda, Masaaki ^a   Goto, Hiroshi ^a   Matsumoto, Mikio ^a   Yada, Tsuneji ^a  

^a OMRON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DAMPING; MICROMACHINING; NATURAL FREQUENCIES; OPTICAL SENSORS; SCANNING; THIN FILM DEVICES;

LEAD ZIRCONATE TITANATE (PZT) THIN FILM ACTUATORS; SILICON MICROMACHINED OPTICAL SCANNERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030691573     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)