SCOPUS 정보 검색 플랫폼

Theoretical Chemistry Accounts

Volumn 132, Issue 12, 2013, Pages 1-14

Computational investigation of surface reactivity of functionalized silicon surfaces in deposition processes

(2) Lin, Jia Ming a Teplyakov, Andrew V a

a UNIVERSITY OF DELAWARE (United States)

Author keywords

DFT cluster models; Functionalized silicon surfaces; Modeling reaction pathways

Indexed keywords

EID: 84891433623 PISSN: 1432881X EISSN: None Source Type: Journal
DOI: 10.1007/s00214-013-1404-2 Document Type: Article

Times cited : (12)

References (80)

1
- 36549037196
- Rodríguez-Reyes JCF, Teplyakov AV (2007) Chem-Eur J 13(33):9164-9176
- (2007) Chem-Eur J , vol.13 , Issue.33 , pp. 9164-9176
- Rodríguez-Reyes, J.C.F.¹ Teplyakov, A.V.²

2
- 0034738980
- Peercy PS (2000) Nature 406(6799):1023-1026
- (2000) Nature , vol.406 , Issue.6799 , pp. 1023-1026
- Peercy, P.S.¹

3
- 0032593267
- Bergmann RB (1999) Appl Phys A Mater Sci Process 69(2):187-194
- (1999) Appl Phys a Mater Sci Process , vol.69 , Issue.2 , pp. 187-194
- Bergmann, R.B.¹

4
- 0037211184
- Bergveld P (2003) Sens Actuators B 88(1):1-20
- (2003) Sens Actuators B , vol.88 , Issue.1 , pp. 1-20
- Bergveld, P.¹

5
- 10044258525
- Katz E, Willner I (2004) Angew Chem Int Ed 43(45):6042-6108
- (2004) Angew Chem Int Ed , vol.43 , Issue.45 , pp. 6042-6108
- Katz, E.¹ Willner, I.²

6
- 37549035453
- Leftwich TR, Teplyakov AV (2008) Surf Sci Rep 63:1-71
- (2008) Surf Sci Rep , vol.63 , pp. 1-71
- Leftwich, T.R.¹ Teplyakov, A.V.²

7
- 77954893894
- Perrine KA, Teplyakov AV (2010) Chem Soc Rev 39(8):3256-3274
- (2010) Chem Soc Rev , vol.39 , Issue.8 , pp. 3256-3274
- Perrine, K.A.¹ Teplyakov, A.V.²

8
- 0030151904
- Iwata S, Ishizaka A (1996) J Appl Phys 79(9):6653-6713
- (1996) J Appl Phys , vol.79 , Issue.9 , pp. 6653-6713
- Iwata, S.¹ Ishizaka, A.²

9
- 67650992049
- Heath JR (2009) Annu Rev Mater Res 39:1-23
- (2009) Annu Rev Mater Res , vol.39 , pp. 1-23
- Heath, J.R.¹

10
- 0035119904
- Lim SW, Mo RT, Pianetta PA, Chidsey CED (2001) J Electrochem Soc 148(1):C16-C20
- (2001) J Electrochem Soc , vol.148 , Issue.1
- Lim, S.W.¹ Mo, R.T.² Pianetta, P.A.³ Chidsey, C.E.D.⁴

11
- 34548433559
- Rodríguez-Reyes JCF, Teplyakov AV (2007) Phys Rev B 76:075348
- (2007) Phys Rev B , vol.76 , pp. 075348
- Rodríguez-Reyes, J.C.F.¹ Teplyakov, A.V.²

12
- 57149096043
- Leftwich TR, Madachik MR, Teplyakov AV (2008) J Am Chem Soc 130(48):16216-16223
- (2008) J Am Chem Soc , vol.130 , Issue.48 , pp. 16216-16223
- Leftwich, T.R.¹ Madachik, M.R.² Teplyakov, A.V.³

13
- 77954918773
- Perrine KA, Teplyakov AV (2010) Langmuir 26(15):12648-12658
- (2010) Langmuir , vol.26 , Issue.15 , pp. 12648-12658
- Perrine, K.A.¹ Teplyakov, A.V.²

14
- 84863844382
- Perrine KA, Lin JM, Teplyakov AV (2012) J Phys Chem C 116(27):14431-14444
- (2012) J Phys Chem C , vol.116 , Issue.27 , pp. 14431-14444
- Perrine, K.A.¹ Lin, J.M.² Teplyakov, A.V.³

15
- 36348932674
- Rodríguez-Reyes JCF, Teplyakov AV (2007) J Phys Chem C 111(44):16498-16505
- (2007) J Phys Chem C , vol.111 , Issue.44 , pp. 16498-16505
- Rodríguez-Reyes, J.C.F.¹ Teplyakov, A.V.²

16
- 33846240924
- Frank MM, Wang Y, Ho MT, Brewer RT, Moumen N, Chabal YJ (2007) J Electrochem Soc 154(2):G44-G48
- (2007) J Electrochem Soc , vol.154 , Issue.2
- Frank, M.M.¹ Wang, Y.² Ho, M.T.³ Brewer, R.T.⁴ Moumen, N.⁵ Chabal, Y.J.⁶

17
- 9744250179
- Brewer RT, Ho MT, Zhang KZ, Goncharova LV, Starodub DG, Gustafsson T, Chabal YJ, Moumen N (2004) Appl Phys Lett 85(17):3830-3832
- (2004) Appl Phys Lett , vol.85 , Issue.17 , pp. 3830-3832
- Brewer, R.T.¹ Ho, M.T.² Zhang, K.Z.³ Goncharova, L.V.⁴ Starodub, D.G.⁵ Gustafsson, T.⁶ Chabal, Y.J.⁷ Moumen, N.⁸

18
- 0043014767
- Frank MM, Chabal YJ, Green ML, Delabie A, Brijs B, Wilk GD, Ho MY, da Rosa EBO, Baumvol IJR, Stedile FC (2003) Appl Phys Lett 83(4):740-742
- (2003) Appl Phys Lett , vol.83 , Issue.4 , pp. 740-742
- Frank, M.M.¹ Chabal, Y.J.² Green, M.L.³ Delabie, A.⁴ Brijs, B.⁵ Wilk, G.D.⁶ Ho, M.Y.⁷ da Rosa, E.B.O.⁸ Baumvol, I.J.R.⁹ Stedile, F.C.¹⁰

19
- 84874598056
- Lin JM, Teplyakov AV, Rodriguez-Reyes JCF (2013) J Vac Sci Technol A 31(2):021401
- (2013) J Vac Sci Technol A , vol.31 , Issue.2 , pp. 021401
- Lin, J.M.¹ Teplyakov, A.V.² Rodriguez-Reyes, J.C.F.³

20
- 79551623190
- Bent SF, Kachian JS, Rodriguez-Reyes JC, Teplyakov AV (2011) Proc Natl Acad Sci USA 108(3):956-960
- (2011) Proc Natl Acad Sci USA , vol.108 , Issue.3 , pp. 956-960
- Bent, S.F.¹ Kachian, J.S.² Rodriguez-Reyes, J.C.³ Teplyakov, A.V.⁴

21
- 80054743171
- Kim DH, Baek SB, Kim YC (2011) Appl Surf Sci 258(1): 225-229
- (2011) Appl Surf Sci , vol.258 , Issue.1 , pp. 225-229
- Kim, D.H.¹ Baek, S.B.² Kim, Y.C.³

22
- 35648995895
- Xie Q, Jiang YL, Detavernier C, Deduytsche D, Van Meirhaeghe RL, Ru GP, Li BZ, Qu XP (2007) J Appl Phys 102(8):6
- (2007) J Appl Phys , vol.102 , Issue.8 , pp. 6
- Xie, Q.¹ Jiang, Y.L.² Detavernier, C.³ Deduytsche, D.⁴ van Meirhaeghe, R.L.⁵ Ru, G.P.⁶ Li, B.Z.⁷ Qu, X.P.⁸

23
- 84868555578
- Miller T, Lin JM, Pirolli L, Coquilleau L, Luharuka R, Teplyakov AV (2012) Thin Solid Films 522:193-198
- (2012) Thin Solid Films , vol.522 , pp. 193-198
- Miller, T.¹ Lin, J.M.² Pirolli, L.³ Coquilleau, L.⁴ Luharuka, R.⁵ Teplyakov, A.V.⁶

24
- 79961245358
- Perrine KA, Rodriguez-Reyes JCF, Teplyakov AV (2011) J Phys Chem C 115(31):15432-15439
- (2011) J Phys Chem C , vol.115 , Issue.31 , pp. 15432-15439
- Perrine, K.A.¹ Rodriguez-Reyes, J.C.F.² Teplyakov, A.V.³

25
- 72449161536
- Rodriguez-Reyes JCF, Ni CY, Bui HP, Beebe TP, Teplyakov AV (2009) Chem Mater 21(21):5163-5169
- (2009) Chem Mater , vol.21 , Issue.21 , pp. 5163-5169
- Rodriguez-Reyes, J.C.F.¹ Ni, C.Y.² Bui, H.P.³ Beebe, T.P.⁴ Teplyakov, A.V.⁵

27
- 0000189651
- Becke AD (1993) J Chem Phys 98(7):5648-5652
- (1993) J Chem Phys , vol.98 , Issue.7 , pp. 5648-5652
- Becke, A.D.¹

28
- 0345491105
- Lee CT, Yang WT, Parr RG (1988) Phys Rev B 37(2):785-789
- (1988) Phys Rev B , vol.37 , Issue.2 , pp. 785-789
- Lee, C.T.¹ Yang, W.T.² Parr, R.G.³

29
- 33745770836
- Hay PJ, Wadt WR (1985) J Chem Phys 82(1):270-283
- (1985) J Chem Phys , vol.82 , Issue.1 , pp. 270-283
- Hay, P.J.¹ Wadt, W.R.²

30
- 0006073669
- Wadt WR, Hay PJ (1985) J Chem Phys 82(1):284-298
- (1985) J Chem Phys , vol.82 , Issue.1 , pp. 284-298
- Wadt, W.R.¹ Hay, P.J.²

31
- 27344448074
- Hay PJ, Wadt WR (1985) J Chem Phys 82(1):299-310
- (1985) J Chem Phys , vol.82 , Issue.1 , pp. 299-310
- Hay, P.J.¹ Wadt, W.R.²

32
- 0005867244
- Wachters AJ (1970) J Chem Phys 52(3):1033-1036
- (1970) J Chem Phys , vol.52 , Issue.3 , pp. 1033-1036
- Wachters, A.J.¹

33
- 10144223417
- Hay PJ (1977) J Chem Phys 66(10):4377-4384
- (1977) J Chem Phys , vol.66 , Issue.10 , pp. 4377-4384
- Hay, P.J.¹

34
- 26844534384
- Krishnan R, Binkley JS, Seeger R, Pople JA (1980) J Chem Phys 72(1):650-654
- (1980) J Chem Phys , vol.72 , Issue.1 , pp. 650-654
- Krishnan, R.¹ Binkley, J.S.² Seeger, R.³ Pople, J.A.⁴

35
- 0141509423
- McLean AD, Chandler GS (1980) J Chem Phys 72(10): 5639-5648
- (1980) J Chem Phys , vol.72 , Issue.10 , pp. 5639-5648
- McLean, A.D.¹ Chandler, G.S.²

36
- 21544443397
- Raghavachari K, Trucks GW (1989) J Chem Phys 91(2): 1062-1065
- (1989) J Chem Phys , vol.91 , Issue.2 , pp. 1062-1065
- Raghavachari, K.¹ Trucks, G.W.²

37
- 84934460107
- Binning RC, Curtiss LA (1990) J Comput Chem 11(10): 1206-1216
- (1990) J Comput Chem , vol.11 , Issue.10 , pp. 1206-1216
- Binning, R.C.¹ Curtiss, L.A.²

38
- 0011414218
- McGrath MP, Radom L (1991) J Chem Phys 94(1):511-516
- (1991) J Chem Phys , vol.94 , Issue.1 , pp. 511-516
- McGrath, M.P.¹ Radom, L.²

39
- 36448999570
- Curtiss LA, McGrath MP, Blaudeau JP, Davis NE, Binning RC, Radom L (1995) J Chem Phys 103(14):6104-6113
- (1995) J Chem Phys , vol.103 , Issue.14 , pp. 6104-6113
- Curtiss, L.A.¹ McGrath, M.P.² Blaudeau, J.P.³ Davis, N.E.⁴ Binning, R.C.⁵ Radom, L.⁶

40
- 0001689196
- Blaudeau JP, McGrath MP, Curtiss LA, Radom L (1997) J Chem Phys 107(13):5016-5021
- (1997) J Chem Phys , vol.107 , Issue.13 , pp. 5016-5021
- Blaudeau, J.P.¹ McGrath, M.P.² Curtiss, L.A.³ Radom, L.⁴

41
- 84986468715
- Clark T, Chandrasekhar J, Spitznagel GW, Schleyer PV (1983) J Comput Chem 4(3):294-301
- (1983) J Comput Chem , vol.4 , Issue.3 , pp. 294-301
- Clark, T.¹ Chandrasekhar, J.² Spitznagel, G.W.³ Schleyer, P.V.⁴

42
- 33746614482
- Dunning TH (1989) J Chem Phys 90(2):1007-1023
- (1989) J Chem Phys , vol.90 , Issue.2 , pp. 1007-1023
- Dunning, T.H.¹

43
- 4143095330
- Kendall RA, Dunning TH, Harrison RJ (1992) J Chem Phys 96(9):6796-6806
- (1992) J Chem Phys , vol.96 , Issue.9 , pp. 6796-6806
- Kendall, R.A.¹ Dunning, T.H.² Harrison, R.J.³

44
- 3843146349
- Woon DE, Dunning TH (1993) J Chem Phys 98(2):1358-1371
- (1993) J Chem Phys , vol.98 , Issue.2 , pp. 1358-1371
- Woon, D.E.¹ Dunning, T.H.²

45
- 0010408411
- Peterson KA, Woon DE, Dunning TH (1994) J Chem Phys 100(10):7410-7415
- (1994) J Chem Phys , vol.100 , Issue.10 , pp. 7410-7415
- Peterson, K.A.¹ Woon, D.E.² Dunning, T.H.³

46
- 0000140080
- Davidson ER (1996) Chem Phys Lett 260(3-4):514-518
- (1996) Chem Phys Lett , vol.260 , Issue.3-4 , pp. 514-518
- Davidson, E.R.¹

47
- 0041536947
- Wilson AK, van Mourik T, Dunning TH (1996) Theochem-J Mol Struct 388:339-349
- (1996) Theochem-J Mol Struct , vol.388 , pp. 339-349
- Wilson, A.K.¹ van Mourik, T.² Dunning, T.H.³

48
- 85005693478
- Peng CY, Schlegel HB (1993) Isr J Chem 33(4):449-454
- (1993) Isr J Chem , vol.33 , Issue.4 , pp. 449-454
- Peng, C.Y.¹ Schlegel, H.B.²

49
- 2442481958
- Peng CY, Ayala PY, Schlegel HB, Frisch MJ (1996) J Comput Chem 17(1):49-56
- (1996) J Comput Chem , vol.17 , Issue.1 , pp. 49-56
- Peng, C.Y.¹ Ayala, P.Y.² Schlegel, H.B.³ Frisch, M.J.⁴

50
- 20844441429
- Xu Y, Musgrave CB (2005) Appl Phys Lett 86(19):192110
- (2005) Appl Phys Lett , vol.86 , Issue.19 , pp. 192110
- Xu, Y.¹ Musgrave, C.B.²

51
- 27344444688
- Kelly MJ, Han JH, Musgrave CB, Parsons GN (2005) Chem Mater 17(21):5305-5314
- (2005) Chem Mater , vol.17 , Issue.21 , pp. 5305-5314
- Kelly, M.J.¹ Han, J.H.² Musgrave, C.B.³ Parsons, G.N.⁴

52
- 79954618949
- Kim DH, Baek SB, Seo HI, Kim YC (2011) Appl Surf Sci 257(15):6326-6331
- (2011) Appl Surf Sci , vol.257 , Issue.15 , pp. 6326-6331
- Kim, D.H.¹ Baek, S.B.² Seo, H.I.³ Kim, Y.C.⁴

53
- 84555178169
- Tian FY, Taber DF, Teplyakov AV (2011) J Am Chem Soc 133(51):20769-20777
- (2011) J Am Chem Soc , vol.133 , Issue.51 , pp. 20769-20777
- Tian, F.Y.¹ Taber, D.F.² Teplyakov, A.V.³

54
- 70350621344
- Leftwich TR, Teplyakov AV (2009) J Electron Spectrosc Relat Phenom 175:31-40
- (2009) J Electron Spectrosc Relat Phenom , vol.175 , pp. 31-40
- Leftwich, T.R.¹ Teplyakov, A.V.²

55
- 0034509259
- Widjaja Y, Musgrave CB (2000) Surf Sci 469(1):9-20
- (2000) Surf Sci , vol.469 , Issue.1 , pp. 9-20
- Widjaja, Y.¹ Musgrave, C.B.²

56
- 1142291781
- Widjaja Y, Musgrave CB (2004) J Chem Phys 120(3):1555-1559
- (2004) J Chem Phys , vol.120 , Issue.3 , pp. 1555-1559
- Widjaja, Y.¹ Musgrave, C.B.²

57
- 34147143370
- Bowler DR, Owen JHG (2007) Phys Rev B 75(15):155310
- (2007) Phys Rev B , vol.75 , Issue.15 , pp. 155310
- Bowler, D.R.¹ Owen, J.H.G.²

58
- 33144462397
- Chung ON, Kim H, Chung S, Koo JY (2006) Phys Rev B 73(3):033303
- (2006) Phys Rev B , vol.73 , Issue.3 , pp. 033303
- Chung, O.N.¹ Kim, H.² Chung, S.³ Koo, J.Y.⁴

59
- 77957134415
- Tian FY, Ni CY, Teplyakov AV (2010) Appl Surf Sci 257(4):1314-1318
- (2010) Appl Surf Sci , vol.257 , Issue.4 , pp. 1314-1318
- Tian, F.Y.¹ Ni, C.Y.² Teplyakov, A.V.³

60
- 39449098084
- Zhang XC, Teplyakov AV (2008) Langmuir 24:810-820
- (2008) Langmuir , vol.24 , pp. 810-820
- Zhang, X.C.¹ Teplyakov, A.V.²

61
- 45849113996
- Perrine KA, Skliar DB, Willis BG, Teplyakov AV (2008) Surf Sci 602:2222-2231
- (2008) Surf Sci , vol.602 , pp. 2222-2231
- Perrine, K.A.¹ Skliar, D.B.² Willis, B.G.³ Teplyakov, A.V.⁴

62
- 1842763889
- Halls MD, Raghavachari K (2004) J Phys Chem B 108(13): 4058-4062
- (2004) J Phys Chem B , vol.108 , Issue.13 , pp. 4058-4062
- Halls, M.D.¹ Raghavachari, K.²

63
- 33746067142
- Ghosh MK, Choi CH (2006) Chem Phys Lett 426(4-6):365-369
- (2006) Chem Phys Lett , vol.426 , Issue.4-6 , pp. 365-369
- Ghosh, M.K.¹ Choi, C.H.²

64
- 84861608745
- Thissen P, Peixoto T, Longo RC, Peng WN, Schmidt WG, Cho KJ, Chabal YJ (2012) J Am Chem Soc 134(21):8869-8874
- (2012) J Am Chem Soc , vol.134 , Issue.21 , pp. 8869-8874
- Thissen, P.¹ Peixoto, T.² Longo, R.C.³ Peng, W.N.⁴ Schmidt, W.G.⁵ Cho, K.J.⁶ Chabal, Y.J.⁷

65
- 84855530248
- Tian FY, Yang D, Opila RL, Teplyakov AV (2012) Appl Surf Sci 258(7):3019-3026
- (2012) Appl Surf Sci , vol.258 , Issue.7 , pp. 3019-3026
- Tian, F.Y.¹ Yang, D.² Opila, R.L.³ Teplyakov, A.V.⁴

66
- 70349306255
- Dai M, Wang Y, Kwon J, Halls MD, Chabal YJ (2009) Nat Mater 8(10):825-830
- (2009) Nat Mater , vol.8 , Issue.10 , pp. 825-830
- Dai, M.¹ Wang, Y.² Kwon, J.³ Halls, M.D.⁴ Chabal, Y.J.⁵

67
- 36749084058
- Wang XL, Xu X (2007) J Phys Chem C 111(45):16974-16981
- (2007) J Phys Chem C , vol.111 , Issue.45 , pp. 16974-16981
- Wang, X.L.¹ Xu, X.²

68
- 3242809690
- Yuan SL, Zhang Y, Li Y, Xu GY (2004) Colloids Surf A 242(1-3):129-135
- (2004) Colloids Surf A , vol.242 , Issue.1-3 , pp. 129-135
- Yuan, S.L.¹ Zhang, Y.² Li, Y.³ Xu, G.Y.⁴

69
- 20844441429
- Xu Y, Musgrave CB (2005) Appl Phys Lett 86(19):192110
- (2005) Appl Phys Lett , vol.86 , Issue.19 , pp. 192110
- Xu, Y.¹ Musgrave, C.B.²

70
- 84872110861
- Tian FY, Teplyakov AV (2013) Langmuir 29(1):13-28
- (2013) Langmuir , vol.29 , Issue.1 , pp. 13-28
- Tian, F.Y.¹ Teplyakov, A.V.²

71
- 55149106801
- Rodríguez-Reyes JCF, Teplyakov AV (2008) Phys Rev B 78:165-314
- (2008) Phys Rev B , vol.78 , pp. 165-314
- Rodríguez-Reyes, J.C.F.¹ Teplyakov, A.V.²

72
- 72049092282
- Owen JHG (2009) J Phys: Condens Matter 21(44):443001
- (2009) J Phys: Condens Matter , vol.21 , Issue.44 , pp. 443001
- Owen, J.H.G.¹

73
- 0242334172
- Kim JW, Yeom HW (2003) Surf Sci 546(2-3):L820-L828
- (2003) Surf Sci , vol.546 , Issue.2-3
- Kim, J.W.¹ Yeom, H.W.²

74
- 0030937244
- Dunitz JD, Taylor R (1997) Chem-Eur J 3(1):89-98
- (1997) Chem-Eur J , vol.3 , Issue.1 , pp. 89-98
- Dunitz, J.D.¹ Taylor, R.²

75
- 11644287321
- Warren ID, Wilson EB (1972) J Chem Phys 56(5):2137-2141
- (1972) J Chem Phys , vol.56 , Issue.5 , pp. 2137-2141
- Warren, I.D.¹ Wilson, E.B.²

76
- 0000716596
- Buckton KS, Azrak RG (1970) J Chem Phys 52(11):5652-5655
- (1970) J Chem Phys , vol.52 , Issue.11 , pp. 5652-5655
- Buckton, K.S.¹ Azrak, R.G.²

77
- 25144457034
- Kukli K, Pilvi T, Ritala M, Sajavaara T, Lu J, Leskela M (2005) Thin Solid Films 491(1-2):328-338
- (2005) Thin Solid Films , vol.491 , Issue.1-2 , pp. 328-338
- Kukli, K.¹ Pilvi, T.² Ritala, M.³ Sajavaara, T.⁴ Lu, J.⁵ Leskela, M.⁶

78
- 0036799255
- Hausmann DM, Kim E, Becker J, Gordon RG (2002) Chem Mater 14(10):4350-4358
- (2002) Chem Mater , vol.14 , Issue.10 , pp. 4350-4358
- Hausmann, D.M.¹ Kim, E.² Becker, J.³ Gordon, R.G.⁴

79
- 0141610893
- Gordon RG, Hausmann D, Kim E, Shepard J (2003) Chem Vap Deposition 9(2):73-78
- (2003) Chem Vap Deposition , vol.9 , Issue.2 , pp. 73-78
- Gordon, R.G.¹ Hausmann, D.² Kim, E.³ Shepard, J.⁴

80
- 52649143264
- Liu XY, Madix RJ, Friend CM (2008) Chem Soc Rev 37(10): 2243-2261
- (2008) Chem Soc Rev , vol.37 , Issue.10 , pp. 2243-2261
- Liu, X.Y.¹ Madix, R.J.² Friend, C.M.³

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