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Applied Surface Science

Volumn 258, Issue 7, 2012, Pages 3019-3026

Chemical and electrical passivation of Si(1 1 1) surfaces

(4) Tian, Fangyuan a Yang, Dan a Opila, Robert L a Teplyakov, Andrew V a

a UNIVERSITY OF DELAWARE (United States)

Author keywords

Charge carrier lifetime; Silicon single crystal; Surface preparation

Indexed keywords

CARRIER LIFETIME; CHARGE CARRIERS; CHEMICAL CLEANING; CHEMICAL MODIFICATION; CHLORINE COMPOUNDS; ELECTRONIC PROPERTIES; INFRARED SPECTROSCOPY; PHOSPHORUS COMPOUNDS; SILICON WAFERS; SINGLE CRYSTALS; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMICALLY ROUGH SURFACES; CHEMICAL FUNCTIONALIZATION; CHEMICAL PREPARATION; ELECTRICAL PASSIVATION; PHYSICAL AND CHEMICAL PROPERTIES; SILICON SINGLE CRYSTALS; SINGLE CRYSTALLINE SURFACES; SURFACE PREPARATION;

PASSIVATION;

EID: 84855530248 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.11.030 Document Type: Article

Times cited : (38)

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