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Applied Surface Science

Volumn 258, Issue 1, 2011, Pages 225-229

Energy barriers for trimethylaluminum reaction with varying surface hydroxyl density

(3) Kim, Dae Hee a Baek, Seung Bin a Kim, Yeong Cheol a

a Korea University of Technology and Education (South Korea)

Author keywords

Atomic layer deposition; Density functional theory; Surface hydroxyl density; Trimethylaluminum

Indexed keywords

ATOMIC LAYER DEPOSITION; ENERGY BARRIERS; HYDROGEN BONDS; SILICA; SURFACE REACTIONS;

ATTRACTIVE INTERACTIONS; SI(0 0 1) SURFACE; SURFACE HYDROXYL; TRIMETHYLALUMINUM;

DENSITY FUNCTIONAL THEORY;

EID: 80054743171 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.08.035 Document Type: Article

Times cited : (29)

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