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Volumn 406, Issue 6799, 2000, Pages 1023-1026
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The drive to miniaturization
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC CONSTANT;
ELECTRONICS;
INTEGRATED CIRCUIT;
MICROELECTRODE;
PRIORITY JOURNAL;
REVIEW;
SEMICONDUCTOR;
TECHNOLOGY;
THICKNESS;
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EID: 0034738980
PISSN: 00280836
EISSN: None
Source Type: Journal
DOI: 10.1038/35023223 Document Type: Review |
Times cited : (398)
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References (4)
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