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Volumn 602, Issue 13, 2008, Pages 2222-2231
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Molecular level investigation of 2,2,6,6-tetramethyl-3,5-heptanedione on Si(1 0 0)-2 × 1: Spectroscopic and computational studies
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Author keywords
Density functional calculations; Infrared spectroscopy; Silicon; Thermal desorption spectroscopy
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Indexed keywords
ADSORPTION;
BUTENES;
DENSITY FUNCTIONAL THEORY;
DESORPTION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
FOURIER TRANSFORMS;
GAS DYNAMICS;
GASES;
HYDROGEN;
INFRARED SPECTROSCOPY;
ION BEAM ASSISTED DEPOSITION;
LEAKAGE (FLUID);
METALLIZING;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MICROFLUIDICS;
MOLECULES;
ORGANIC CHEMICALS;
ORGANIC COMPOUNDS;
PROBABILITY DENSITY FUNCTION;
SILICON;
SPECTROSCOPIC ANALYSIS;
SPECTRUM ANALYSIS;
SURFACE PROPERTIES;
SURFACES;
TELLURIUM COMPOUNDS;
TEMPERATURE PROGRAMMED DESORPTION;
VAPOR DEPOSITION;
(1 1 0) SURFACE;
(I ,J) CONDITIONS;
AUGER ELECTRON SPECTROSCOPY (AES);
CHEMICAL PRECURSORS;
COMPUTATIONAL STUDIES;
CRYOGENIC TEMPERATURES;
DENSITY-FUNCTIONAL THEORY (DFT);
DEPROTONATED FORM;
DIKE TONES;
ELSEVIER (CO);
EVOLUTION (CO);
FOURIER;
GAS PHASE;
METAL-ORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD);
MOLECULAR LEVELS;
MONITOR (CO);
MULTIPLE INTERNAL REFLECTION (MIR);
REACTION PATHWAYS;
ROOM-TEMPERATURE (RT);
SI(1 0 0 );
SURFACE SPECIES;
TEMPERATURE PROGRAMMED DESORPTION (TPD);
TETRA METHYL;
TRANSFORM INFRA RED SPECTROSCOPY;
AUGER ELECTRON SPECTROSCOPY;
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EID: 45849113996
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/j.susc.2008.04.041 Document Type: Article |
Times cited : (5)
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References (48)
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