A review of scheduling theory and methods for semiconductor manufacturing cluster tools

Proceedings - Winter Simulation Conference

Volumn , Issue , 2008, Pages 2127-2135

  Lee, Tae Eog ^a  

^a Dept of Industrial and Systems Engineering ^*  (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED ENVIRONMENTS; CLUSTER TOOLS; OPERATIONAL ISSUES; RECENT PROGRESS; SCHEDULING THEORIES; SCIENCE AND ENGINEERINGS; SEMICONDUCTOR MANUFACTURING; SINGLE-WAFER PROCESSING; WAFER FABRICATIONS; WAFER-HANDLING ROBOTS;

SCHEDULING;

EID: 60749114750     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2008.4736310     Document Type: Conference Paper

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