Deadlock-Free Scheduling of Photolithography Equipment in Semiconductor Fabrication

IEEE Transactions on Semiconductor Manufacturing

Volumn 17, Issue 1, 2004, Pages 42-54

  Yoon, Hyun Joong ^a   Lee, Doo Yong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Deadlock avoidance; Deadlock free scheduling; Photolithography; Semiconductor fabrication

Indexed keywords

ALGORITHMS; AUTOMATION; COMPUTATIONAL COMPLEXITY; COMPUTER SYSTEM RECOVERY; POLYNOMIALS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

DEADLOCK AVOIDANCE; DEADLOCK FREE SCHEDULING; POLYNOMIAL COMPLEXITY;

PHOTOLITHOGRAPHY;

EID: 1342287000     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.822730     Document Type: Article

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