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Volumn 17, Issue 1, 2004, Pages 42-54

Deadlock-Free Scheduling of Photolithography Equipment in Semiconductor Fabrication

Author keywords

Deadlock avoidance; Deadlock free scheduling; Photolithography; Semiconductor fabrication

Indexed keywords

ALGORITHMS; AUTOMATION; COMPUTATIONAL COMPLEXITY; COMPUTER SYSTEM RECOVERY; POLYNOMIALS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 1342287000     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.822730     Document Type: Article
Times cited : (39)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.