Analysis of circular cluster tools: Transient behavior and semiconductor equipment models

2010 IEEE International Conference on Automation Science and Engineering, CASE 2010

Volumn , Issue , 2010, Pages 39-44

  Ahn, Younghun ^a   Morrison, James R ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CLUSTER TOOL; CYCLE TIME; LOT SIZE; MODELING AND OPTIMIZATION; PRODUCT CHANGEOVERS; PRODUCT CUSTOMIZATION; RIGOROUS ANALYSIS; ROBOT MOVEMENTS; SEMI-CONDUCTOR WAFER; SEMICONDUCTOR EQUIPMENT; STEADY STATE; TOOL MODELS; TRANSIENT BEHAVIOR; TRANSIENT MODEL; TRANSIENT MODELING; WAFER DIAMETER; WAFER PROCESSING; WAFER TRANSPORT;

COMPUTATIONAL COMPLEXITY; COMPUTER SIMULATION; ROBOTS; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

SILICON WAFERS;

EID: 78149435135     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2010.5584530     Document Type: Conference Paper

References (9)

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