Use of amorphous silicon for active photonic devices

IEEE Transactions on Electron Devices

Volumn 60, Issue 5, 2013, Pages 1495-1505

  Della Corte, Francesco Giuseppe ^a   Rao, Sandro ^a  

^a UNIVERSITY MEDITERRANEA OF REGGIO CALABRIA   (Italy)

Author keywords

Amorphous silicon; CMOS photonics; Optical modulation; Photonic integrated circuits (PICs); Silicon photonics

Indexed keywords

ACTIVE PHOTONIC DEVICES; CMOS PHOTONICS; DISRUPTIVE TECHNOLOGY; HYDROGENATED AMORPHOUS SILICON (A-SI:H); PHOTONIC INTEGRATED CIRCUITS; SILICON PHOTONICS; SILICON-BASED MATERIALS; TECHNOLOGICAL COMPLEXITY;

AMORPHOUS SILICON; LIGHT MODULATION; MICROELECTRONICS; OPTICAL COMMUNICATION; OPTICAL WAVEGUIDES; PHOTONIC DEVICES; PHOTONICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

SILICON;

EID: 84887080513     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2013.2249069     Document Type: Article

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