Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 16, Issue 1, 2010, Pages 316-324

  Selvaraja, Shankar Kumar ^a   Bogaerts, Wim ^a   Dumon, Pieter ^a   Van Thourhout, Dries ^a   Baets, Roel ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Arrayed waveguide grating (AWG); Optical lithography; Photonic wire; Ring resonator; Silicon photonics; Silicon on insulator (SOI); Uniformity

Indexed keywords

OPTICAL LITHOGRAPHY; PHOTONIC WIRES; RING RESONATOR; SILICON PHOTONICS; SILICON-ON-INSULATORS;

ARRAYED WAVEGUIDE GRATINGS; FABRICATION; LINEWIDTH; MICROSENSORS; NANOPHOTONICS; OPTICAL RESONATORS; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; PHOTONIC DEVICES; PHOTONICS; PLASMA ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; WAVE FILTERS; WAVEFORM ANALYSIS; WAVEGUIDES; WIRE;

SILICON ON INSULATOR TECHNOLOGY;

EID: 76949105776     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2009.2026550     Document Type: Article

References (16)

1. J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, "Low loss etchless silicon photonic waveguides," Opt. Exp., vol.17, no.6, pp. 4752-4757, 2009.
2. M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, "Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist," Electron. Lett., vol.44, no.2, pp. 115-116, 2008.
3. Y.A.Vlasov and S. J.McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Exp., vol.12, no.8, pp. 1622-1631, 2004.
4. B. Schmidt,Q. F.Xu, J. Shakya, S.Manipatruni, and M. Lipson, "Compact electro-optic modulator on silicon-on-insulator substrates using cavities with ultra-small modal volumes," Opt. Exp., vol.15, no.6, pp. 3140-3148, 2007. (Pubitemid 46457177)
5. L. J. Zhou and A. W. Poon, "Silicon electro-optic modulators using p-i-n diodes embedded 10-micron-diameter microdisk resonators," Opt. Exp., vol.14, no.15, pp. 6851-6857, 2006.
6. D. W. Kim, A. Barkai, R. Jones, N. Elek, H. Nguyen, and A. S. Liu, "Silicon-on-insulator eight-channel optical multiplexer based on a cascade of asymmetric Mach-Zehnder interferometers," Opt. Lett., vol.33, no.5, pp. 530-532, 2008.
7. T. Barwicz, M. A. Popovic, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, "Fabrication of add-drop filters based on frequency-matched microring resonators," J. Lightw. Technol., vol.24, no.5, pp. 2207-2218, May 2006.
8. A. Samarelli, D. S. Macintyre, M. J. Strain, R. M. De La Rue, M. Sorel, and S. Thoms, "Optical characterization of a hydrogen silsesquioxane lithography process," J. Vac. Sci. Technol. B, vol.26, no.6, pp. 2290-2294, 2008.
9. F. N. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nature Photon., vol.1, no.1, pp. 65-71, 2007.
10. D. Pieter, "Ultra-compact integrated optical filters in silicon-on-insulator by means of wafer-scale technology,", Ph.D. dissertation, Dept. Inf. Tech., Ghent Univ., Ghent, Belgium, 2007.
11. S. K. Selvaraja, P. Jaenen,W. Bogaerts, D. Van Thourhout, P. Dumon, and R. Baets, "Fabrication of photonic wire and crystal circuits in silicon-oninsulator using 193-nm optical lithography," J. Lightw. Technol., vol.27, no.18, pp. 4076-4083, 2009.
12. B. Aspar, M. Bruel, H. Moriceau, C. Maleville, T. Poumeyrol, A. M. Papon, A. Claverie, G. Benassayag, A. J. AubertonHerve, and T. Barge, "Basic mechanisms involved in the Smart-Cut(R) process," Microelectron. Eng., vol.36, no.1-4, pp. 233-240, 1997.
13. D. L. Flamm, V. M. Donnelly, and D. E. Ibbotson, "Basic chemistry and mechanisms of plasma etching," J. Vac. Sci. Technol. B, vol.1, no.1, pp. 23-30, 1983.
14. G. Priem, P. Dumon, W. Bogaerts, D. Van Thourhout, G. Morthier, and R. Baets, "Optical bistability and pulsating behaviour in silicon-oninsulator ring resonator structures," Opt. Exp., vol.13, no.23, pp. 9623-9628, 2005.
15. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, andR.Baets, "Grating couplers for coupling between optical fibers and nanophotonic waveguides," Jpn. J. Appl. Phys., 1, vol. 45, no. 8A, pp. 6071-6077, 2006.
16. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, "Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology," J. Lightw. Technol., vol.23, no.1, pp. 401-412, Jan. 2005. (Pubitemid 40181733)