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Applied Physics Letters

Volumn 97, Issue 7, 2010, Pages

Thermal trimming and tuning of hydrogenated amorphous silicon nanophotonic devices

(4) Selvaraja, Shankar Kumar a Bogaerts, Wim a Vanthourhout, Dries a Schaekers, Marc b

a GHENT UNIVERSITY (Belgium)

b IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY CHANGE; FABRICATION IMPERFECTIONS; HYDROGEN CONTENTS; HYDROGENATED AMORPHOUS SILICON; MATERIAL DENSITY; NANOPHOTONIC DEVICES; PHOTONIC INTEGRATED CIRCUITS; THERMAL TREATMENT; THERMAL TRIMMING; THERMOOPTIC EFFECTS; WAVELENGTH-TUNING RANGE;

FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; HYDROGENATION; NANOPHOTONICS; PHOTONIC DEVICES; TRIMMING; TUNING;

AMORPHOUS SILICON;

EID: 77956047698 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3479918 Document Type: Article

Times cited : (15)

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