Low loss amorphous silicon channel waveguides for integrated photonics

IEEE International Conference on Group IV Photonics GFP

Volumn , Issue , 2006, Pages 255-257

  Sparacin, D K ^a   Sun, R ^a   Agarwal, A M ^a   Beals, M A ^a   Michel, J ^a   Kimerling, L C ^a   Conway, T J ^b   Pomerene, A T ^b   Carothers, D N ^b   Grove, M J ^b   Gill, D M ^c   Rasras, M S ^c   Patel, S S ^c   White, A E ^c  

^a Massachusetts Institute of Technology   (United States)

^b BAE SYSTEMS   (United States)

^c LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC LOSSES; OPTICAL WAVEGUIDES; PHOTONICS; PLASMA FILLED WAVEGUIDES;

AMORPHOUS SILICON (A-SI); CHANNEL WAVEGUIDE; DEPOSITION CONDITIONS; INTEGRATED PHOTONICS; SILICON CHANNEL; SINGLE MODE; TM MODES; TRANSMISSION LOSS;

AMORPHOUS SILICON;

EID: 78649730377     PISSN: 19492081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/group4.2006.1708231     Document Type: Conference Paper

References (5)

1. A. Harke, M. Krause, J. Mueller, "Low-loss singlemode amorphous silicon waveguides" Electronic Letters, 41 (25), (2005)
2. T. Barwicz and H.A. Haus "Three-Dimensional Analysis of Scattering Losses Due to Sidewall Roughness in Microphotonic Waveguides", IEEE Journal of Lightwave Technology, 23 (9), p.2719-2732 (2005)
3. F. Ay, A. Aydinli "Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides" Optical Materials, 26 p.33-46 (2004)
4. Daniel K. Sparacin "Process and Design Techniques for Low Loss Integrated Silicon Photonics" Ph.D. Thesis, Massachusetts Institute of Technology (2006)
5. A.M. Agarwal, L. Liao, J.S. Foresi, M. Black, X. Duan, L.C. Kimerling "Low-loss polycrystalline waveguides for silicon photonics" Journal of Applied Physics 80 (11), p. 6120-6123 (1996)