Photonic devices in low-temperature laser-crystallized deposited silicon

Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010

Volumn , Issue , 2010, Pages

  Preston, Kyle ^a   Poitras, Carl B ^a   Thompson, Michael O ^a   Lipson, Michal ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS WAFERS; ELECTRO-OPTIC SWITCHING; INTEGRATED OPTICAL DEVICES; LOW TEMPERATURES; PHOTONIC INTEGRATIONS; ROOM TEMPERATURE;

OPTICAL INSTRUMENTS; SILICON WAFERS;

PHOTONIC DEVICES;

EID: 77957588350     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. A. Shacham, K. Bergman, and L. P. Carloni, "Photonic Networks-on-Chip for Future Generations of Chip Multiprocessors," IEEE Trans. Comput. 57, 1246-1260 (2008).
2. S. Manipatruni, Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "High Speed Carrier Injection 18 Gb/s Silicon Micro-ring Electro-optic Modulator," in LEOS 2007 (IEEE, 2007), pp. 537-538.
3. M. R. Watts, D. C. Trotter, R. W. Young, and A. L. Lentine, "Ultralow power silicon microdisk, modulators and switches," in Group IV Photonics (IEEE, 2008) pp. 4-6.
4. K. Preston, B. Schmidt, and M. Lipson, "Polysilicon photonic resonators for large-scale 3D integration of optical networks," Opt. Express 15, 17283-17290 (2007).
5. K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, and M. Lipson, "Deposited silicon high-speed integrated electro-optic modulator," Opt. Express 17, 5118-5124 (2009).
6. M. Beals et al., "Process flow innovations for photonic device integration in CMOS," Proc. SPIE 6898, 689804 (2008).
7. I. Young et al., "Optical I/O Technology for Tera-Scale Computing," in Proceedings of the ISSCC (IEEE, 2009), pp. 468-469.
8. C. W. Holzwarth et al., "Localized Substrate Removal Technique Enabling Strong-Confinement Microphotonics in Bulk Si CMOS Processes," presented at CLEO 2008, paper CThKK5.
9. A. T. Voutsas, "Laser Crystallization of Thin Films for Flat Panel Display Applications," in Recent Advances in Laser Processing of Materials, J. Perriere, E. Milion, and E. Fogarassy, eds. (Elsevier, New York, 2006), pp. 317-373.