Amorphous silicon optical waveguides and Bragg mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6996, Issue , 2008, Pages

  Khanna, A ^a   Mulot, M ^a   Arpiainen, S ^b   Saynatjoki A ^a   Ahopelto, J ^b   Honkanen, S ^a   Lipsanen, H ^a  

^a AALTO UNIVERSITY   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Amorphous silicon; Bragg mirror; Propagation loss; Strip waveguide

Indexed keywords

COMPUTER NETWORKS; ELECTRON BEAM LITHOGRAPHY; INTEGRATED CIRCUITS; INTEGRATED OPTOELECTRONICS; LIGHT REFRACTION; MICROELECTRONICS; MIRRORS; NONMETALS; OPTICAL PROPERTIES; OPTICAL WAVEGUIDES; PHOTONIC DEVICES; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTIVE ION ETCHING; REFRACTIVE INDEX; REFRACTOMETERS; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON; SILICON COMPOUNDS; SILICON WAFERS; WAVEGUIDES;

BRAGG MIRROR; PHOTONIC INTEGRATED CIRCUITS; PROPAGATION LOSS; SILICON PHOTONICS; STRIP WAVEGUIDE;

AMORPHOUS SILICON;

EID: 50349100804     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.781237     Document Type: Conference Paper

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