Low-loss multilayer compatible a-si:h optical thin films for photonic applications

Journal of the European Optical Society

Volumn 7, Issue , 2012, Pages

  Lipka, T ^a   Horn, O ^a   Amthor, J ^a   Muller J ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Amorphous silicon; Dielectric thin films; Integrated optics; Photonics; Resonators

Indexed keywords

AMORPHOUS SILICON; COST EFFECTIVENESS; ETCHING; FILM PREPARATION; INTEGRATED OPTICS; MACH-ZEHNDER INTERFEROMETERS; MULTILAYER FILMS; NOTCH FILTERS; OPTICAL MULTILAYERS; OPTICAL RESONATORS; PHOTONICS; Q FACTOR MEASUREMENT; RESONATORS; THIN FILMS; WIRE;

BASIC WAVEGUIDES; DIELECTRIC THIN FILMS; EXTINCTION RATIOS; INTERFERENCE FRINGE; OPTICAL THIN FILMS; PHOTONIC APPLICATION; PHOTONIC INTEGRATED CIRCUITS; PHOTONIC WIRE WAVEGUIDES;

OPTICAL WAVEGUIDES;

EID: 84872955813     PISSN: None     EISSN: 19902573     Source Type: Journal    
DOI: 10.2971/jeos.2012.12033     Document Type: Article

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