Low-voltage, high-extinction-ratio, Mach-Zehnder silicon optical modulator for CMOS-compatible integration

Optics Express

Volumn 20, Issue 3, 2012, Pages 3209-3218

  Ding, Jianfeng ^a   Chen, Hongtao ^a   Yang, Lin ^a   Zhang, Lei ^a   Ji, Ruiqiang ^a   Tian, Yonghui ^a   Zhu, Weiwei ^a   Lu, Yangyang ^a   Zhou, Ping ^a   Min, Rui ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COPLANAR WAVEGUIDES; LIGHT MODULATION;

CMOS COMPATIBLE; CMOS FABRICATION; COPLANAR WAVEGUIDE ELECTRODES; DRIVING VOLTAGES; ELECTRICAL SIGNAL; EXTINCTION RATIOS; FABRICATED DEVICE; LOW DRIVING VOLTAGE; LOW-VOLTAGE; MACH-ZEHNDER; REVERSE BIAS VOLTAGE; SWING AMPLITUDE;

LIGHT MODULATORS;

SILICON;

ARTICLE; CHEMISTRY; ELECTRODE; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; INTERFEROMETRY; OPTICAL INSTRUMENTATION; SEMICONDUCTOR; SYSTEM ANALYSIS; TELECOMMUNICATION;

ELECTRODES; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; INTERFEROMETRY; OPTICAL DEVICES; SEMICONDUCTORS; SILICON; SYSTEMS INTEGRATION; TELECOMMUNICATIONS;

EID: 84863011467     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.003209     Document Type: Article

References (21)

1. H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433(7027), 725-728(2005). (Pubitemid 40292977)
2. A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14(20), 9203-9210(2006). (Pubitemid 44507184)
3. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427(6975), 615-618(2004). (Pubitemid 38248476)
4. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435(7040), 325-327(2005). (Pubitemid 40745539)
5. M. M. Geng, L. X. Jia, L. Zhang, L. Yang, P. Chen, T. Wang, and Y. L. Liu, "Four-channel reconfigurable optical add-drop multiplexer based on photonic wire waveguide," Opt. Express 17(7), 5502-5516(2009).
6. M. S. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kärtner, H. I. Smith, and E. P. Ippen, "Reconfigurable multichannel second-order silicon microring-resonator filterbanks for on-chip WDM systems," Opt. Express 19(1), 306-316(2011).
7. R. Q. Ji, L. Yang, L. Zhang, Y. H. Tian, J. F. Ding, H. T. Chen, Y. Y. Lu, P. Zhou, and W. W. Zhu, "Five-port optical router for photonic networks-on-chip," Opt. Express 19(21), 20258-20268(2011).
8. N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, "Optical 4x4 hitless slicon router for optical networks-on-chip (NoC)," Opt. Express 16(20), 15915-15922(2008).
9. D. Ahn, C. Y. Hong, J. Liu, W. Giziewicz, M. Beals, L. C. Kimerling, J. Michel, J. Chen, and F. X. Kärtner, "High performance, waveguide integrated Ge photodetectors," Opt. Express 15(7), 3916-3921(2007). (Pubitemid 46557553)
10. Y. Kang, H. Liu, M. Morse, M. J. Paniccia, M. Zadka, S. Litski, G. Sarid, A. Pauchard, Y. Kuo, H. Chen, W. S. Zaoui, J. E. Bowers, A. Beling, D. C. McIntosh, X. Zheng, and J. C. Campbell, "Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain-bandwidth product," Nat. Photonics 3(1), 59-63(2008).
11. S. Assefa, F. N. Xia, and Y. A. Vlasov, "Reinventing germanium avalanche photodetector for nanophotonic onchip optical interconnects," Nature 464(7285), 80-84(2010).
12. G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, "Silicon optical modulators," Nat. Photonics 4(8), 518-526(2010).
13. W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, "Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator," Opt. Express 15(25), 17106-17113(2007). (Pubitemid 350260570)
14. R. Soref and B. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron. 23(1), 123-129(1987).
15. A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Express 15(2), 660-668(2007). (Pubitemid 46168516)
16. N. N. Feng, S. Liao, D. Z. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, "High speed carrier-depletion modulators with 1.4V-cm V (π) L integrated on 0.25microm silicon-on-insulator waveguides," Opt. Express 18(8), 7994-7999(2010).
17. X. G. Tu, T. Y. Liow, J. F. Song, M. B. Yu, and G. Q. Lo, "Fabrication of low loss and high speed silicon optical modulator using doping compensation method," Opt. Express 19(19), 18029-18035(2011).
18. F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, "40 Gb/s silicon photonics modulator for TE and TM polarisations," Opt. Express 19(12), 11804-11814(2011).
19. nd, ed. (John Wiley & Sons, 1998), chap. 2.
20. S. J. Spector, M. W. Geis, G. R. Zhou, M. E. Grein, F. Gan, M. A. Popovic, J. U. Yoon, D. M. Lennon, E. P. Ippen, F. Z. Kärtner, and T. M. Lyszczarz, "CMOS-compatible dual-output silicon modulator for analog signal processing," Opt. Express 16(15), 11027-11031(2008).
21. D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J. M. Fedeli, and G. T. Reed, "High contrast 40Gbit/s optical modulation in silicon," Opt. Express 19(12), 11507-11516(2011).