A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor

Nature

Volumn 427, Issue 6975, 2004, Pages 615-618

  Liu, Ansheng ^a   Jones, Richard ^a   Liao, Ling ^a   Samara Rubio, Dean ^a   Rubin, Doron ^b   Cohen, Oded ^b   Nicolaescu, Remus ^a   Paniccia, Mario ^a  

^a INTEL CORPORATION   (United States)

^b INTEL CORPORATION   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ELECTRONIC EQUIPMENT; ELECTROOPTICAL DEVICES; FABRICATION; MOS CAPACITORS; PHASE MODULATION; SEMICONDUCTING SILICON; SUBSTRATES; WAVEGUIDES;

OPTICAL PHASE MODULATION; PHOTONICS;

LIGHT MODULATORS;

LITHIUM; METAL; NIOBIUM; OXIDE; SILICON;

SILICON;

ARTICLE; CAPACITOR; ELECTRONICS; FREQUENCY MODULATION; OPTICAL INSTRUMENTATION; OPTICAL MODULATOR; OPTICS; PHOTONICS; PRIORITY JOURNAL; SEMICONDUCTOR;

EID: 1342346714     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/nature02310     Document Type: Article

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