Integration issues of a photonic layer on top of a CMOS circuit

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6125, Issue , 2006, Pages

  Fedeli, J M ^a   Orobtchouk, R ^b   Seassal, C ^c   Vivien, L ^d  

^a CEA LETI   (France)

^b INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^c ECOLE CENTRALE DE LYON   (France)

^d UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; INTEGRATED OPTICS; MICROELECTRONICS; NETWORKS (CIRCUITS); OPTICAL WAVEGUIDES; OPTOELECTRONIC DEVICES; PHOTODETECTORS;

MINIATURISED TRANSCEIVER; OPTICAL CLOCK DISTRIBUTION; PHOTONIC CIRCUIT; SILICON WAVEGUIDE;

CMOS INTEGRATED CIRCUITS;

EID: 33646751859     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.642672     Document Type: Conference Paper

References (31)

1. nd International Conference on GroupIV Photonics
2. nd International Conference on GroupIV Photonics
3. Y.A Vlasov, S.J. McNab, Optics Express, Vol 12, No8 (2004)
4. E. Cassan, S. Laval, S. Lardenois, A. Koster, IEEE Journal of Selected Topics in Quantum Electronics, vol. 9, pp. 460-464, 2003.
5. S.Lardenois, D.Pascal, L.Vivien, E.Cassan, S.Laval, R.Orobtchouck, M.Heitzmann, N.Bouzaida, L.Mollard, "Low-loss sub-micrometer SOI rib waveguides and corner mirrors" Optics Letters, 28 (13), 1150-1152 (2003).
6. A.Koster, E.Cassan, S.Laval, L.Vivien, D.Pascal, "A Compact beam splitter using low-loss submicrometer silicon-on-insulator rib waveguides" Journal of the Optical Society of America A, 21 (11), 2180-2185 (2004).
7. L. Vivien, S. Lardenois, D. Pascal, S. Laval, E.Cassan, J.L. Cercus, X. Le Roux, A. Koster, J.M. Fedeli, M. Heitzmann, "Experimental demonstration of low loss SOI H-tree optical distribution", Applied Physics Letters 85 (2004) 701-703.
8. nd International Conference on GroupIV Photonics
9. D. Marris, L. Vivien, D. Pascal, M. Rouvière, E. Cassan, A. Lupu, S. Laval, "Ultra low loss 1 to 1024 on-chip light distribution at 1.31 μm using silicon-on-insulator optical microwaveguides" Applied Physics Letters
10. L. Vivien, D. Pascal, S. Lardenois, E. Cassan, F. Grillot, S. Laval, J. M. Fédéli, L. El Melhaoui, "Light injection in SOI microwaveguides using high efficiency grating couplers" submitted to Journal of Lightwave Technology.
11. D. Marris, A. Cordat, D. Pascal, A. Koster, E. Cassan, L. Vivien, S. Laval, "Design of a SiGe-Si quantum well optical modulator", IEEE Journal of selected topics in quantum electronics, vol 9, no3, 2003.
12. Delphine Marris, Eric Cassan, and Laurent Vivien,Response time analysis of SiGe/Si modulation-doped multiple-quantum-well structures for optical modulation, J. Applied Physics 96, 6109-6112 (2004).
13. Lupu A., D. Marris, D. Pascal, J.-L. Cercus, A. Cordat, V. Le Thanh and S. Laval "Experimental evidence for index modulation by carrier depletion in SiGe/Si multiple quantum well structures" Applied Physics Letters 85 (6) (2004) 887-889
14. nd International Conference on GroupIV Photonics.
15. M. Rouvière, L. Vivien, X. Le Roux, J. Mangeney, P. Crozat, C. Hoarau, D. Marris, E. Cassan, D. Pascal, S. Laval, J-M. Fédéli, J-F. Damlencourt, J.M. Hartmann, S. Kolev, "Ultra-high speed germanium-on-Silicon-On-Insulator photodetectors for 1.31 μm and 1.55 μm operation", Applied Physics Letters 87, 231109-231111 (2005).
16. E. Cassan and al "Comparison between electrical and optical global distributions for CMOS integrated circuits" Optical Engineering 44 (10), 105402 October 2005
17. A. Lupu and al "Experimental demonstration of the superprim effect in the SOI photonic technology" Optics 5690 Vol 12 no23 15 November 2004
18. Zhang et al. Material Letters, 12 (1991) 63-66
19. S. Gaugiran and al "Optical manipulation of cells on silicon nitride waveguides" Optics Express Vol. 13, No. 18 September 05, 2005 Pages: 6956-6963
20. L.Liao "Low loss Polysilicon Waveguides for silicon Optics" MIT report(1995)
21. th European Conference On Integrated Optics ECIO, pp. 221-24, 2005.
22. F. Ladouceur, P. Labeye, "", Journ. Of Lightwave Technology, Vol. 13, pp. 481-92, 1995.
23. Q.-Y. Tong, U. Gösele, Semiconductor Wafer Bonding, The Electrochemical Society Series, INC, Pennington, New Jersey, 1999
24. U. Göseleand al "Wafer Bonding for Microsystems Technologies", Sensor and Actuators 74, 161-168, 1999
25. R. Stengl, and al "A Model for the Silicon Wafer Bonding Process", Jpn J. Appl. Phys. 28, 1735, 1989
26. U. Gösele, and al "Fundamental Issues In Wafer Bonding", J. Vac. Sci; Technol. A17 (4), Jul/Aug 1999
27. M. Kostrzewa and al "High Quality Epitaxial Growth on New InP/Si Substrate" IPRM 2003, Santa Barbara, USA
28. M. Kostrzewa, L. Di Cioccio, J. M. Fedeli, M. Zussy, P. Regreny, J. C. Roussin, N. Kernevez, Die-to-Wafer molecular bonding for optical interconnects and packaging, EMPC 2005, June 12-15, Brugge, Belgium 2005
29. H.Hattori et al., "Heterogeneous Integration of Microdisk Lasers on Silicon Strip Waveguides for Optical Interconnects", to appear in Photonics Technology Letters
30. J. Van Campenhout et al. "An electrically driven membrane microdisk laser for the integration of photonic and electronic ICs" postdeadline paper, LEOS annual meeting, Sydney, 2005
31. B.Benbakir et al, "Surface emitting microlaser combining two-dimensional photonic crystal membrane and vertical Bragg mirror", to appear in Applied Physics Letters