Electrooptical modulating device based on a CMOS-compatible α-Si:H/α-SiCN multistack waveguide

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 16, Issue 1, 2010, Pages 173-178

  Rao, Sandro ^a   Della Corte, Francesco G ^a   Summonte, Caterina ^b   Suriano, Francesco ^a  

^a UNIVERSITY MEDITERRANEA OF REGGIO CALABRIA   (Italy)

^b CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

Amorphous materials; CMOS ICs; Electrooptic modulation; Waveguides

Indexed keywords

CMOS COMPATIBLE; CMOS IC; CMOS ICS; ELECTRO-OPTIC MODULATION; FIELD-EFFECT; HIGH-INDEX CONTRAST WAVEGUIDES; HYDROGENATED AMORPHOUS SILICON; MONOLITHIC INTEGRATION; OPTICAL ABSORPTION; THIN DIELECTRIC FILM;

AMORPHOUS FILMS; CARBON NITRIDE; DIELECTRIC FILMS; MODULATION; MONOLITHIC INTEGRATED CIRCUITS; SEMICONDUCTING SILICON COMPOUNDS; WAVEGUIDES;

AMORPHOUS SILICON;

EID: 76949108178     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2009.2025604     Document Type: Article

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