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Volumn 16, Issue 4, 2013, Pages 117-122
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Direct writing via electron-driven reactions
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPLEX PATTERN;
DIRECT WRITING;
DIRECT-WRITE TECHNIQUE;
ELECTRON-DRIVEN;
FUTURE PROSPECTS;
RESOLUTION CAPABILITY;
SCANNING ELECTRON BEAM;
SEMICONDUCTING MATERIALS;
CONDENSED MATTER PHYSICS;
MATERIALS SCIENCE;
SCANNING PROBE MICROSCOPY;
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EID: 84878693008
PISSN: 13697021
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mattod.2013.04.007 Document Type: Review |
Times cited : (17)
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References (70)
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