Substrate effects on the electron-beam-induced deposition of platinum from a liquid precursor

Nanoscale

Volumn 3, Issue 7, 2011, Pages 2709-2717

  Donev, Eugenii U ^a   Schardein, Gregory ^a   Wright, John C ^a   Hastings, J Todd ^a  

^a UNIVERSITY OF KENTUCKY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS PRECURSOR; BULK LIQUID; EASE OF USE; ELECTRON BEAM-INDUCED DEPOSITION; ELECTRON DOSE; GASEOUS PRECURSORS; HIGH FIDELITY; LIQUID PRECURSORS; LITHOGRAPHIC MASK; LOW COSTS; METAL CONTENT; METAL-COATED; NANOFABRICATION TECHNIQUES; POLYIMIDE MEMBRANES; SIZE DEPENDENCE; SUBSTRATE EFFECTS; VARIOUS SUBSTRATES;

DEPOSITS; NANOSTRUCTURES; NITRIDES; PHOTOMASKS; PLATINUM; POLYIMIDES;

LIQUIDS;

NANOMATERIAL; PLATINUM; POLYIMIDE RESIN; RESIN; SILICON DERIVATIVE; SILICON NITRIDE;

ARTICLE; CHEMISTRY; ELECTRON; ULTRASTRUCTURE;

ELECTRONS; NANOSTRUCTURES; PLATINUM; RESINS, SYNTHETIC; SILICON COMPOUNDS;

EID: 79960177578     PISSN: 20403364     EISSN: 20403372     Source Type: Journal    
DOI: 10.1039/c1nr10026b     Document Type: Article

References (28)

1. R. W. Christy J. Appl. Phys. 1960 31 1680 1683
2. A. G. Baker W. C. Morris Rev. Sci. Instrum. 1961 32 458 458
3. S. J. Randolph J. D. Fowlkes P. D. Rack Crit. Rev. Solid State Mat. Sci. 2006 31 55 89
4. M. H. Song K. Furuya Sci. Technol. Adv. Mater. 2008 9 023002
5. I. Utke P. Hoffmann J. Melngailis J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.-Process., Meas., Phenom. 2008 26 1197 1276
6. K. Furuya Sci. Technol. Adv. Mater. 2008 9 014110
7. W. F. van Dorp C. W. Hagen J. Appl. Phys. 2008 104 081301
8. A. Botman J. J. L. Mulders C. W. Hagen Nanotechnology 2009 20 372001
9. N. Silvis-Cividjian and C. W. Hagen, Electron-Beam-Induced Nanometer-Scale Deposition, Academic Press, San Diego, 2006
10. A. Botman J. J. L. Mulders R. Weemaes S. Mentink Nanotechnology 2006 17 3779 3785
11. E. U. Donev J. T. Hastings Nano Lett. 2009 9 2715 2718
12. E. U. Donev J. T. Hastings Nanotechnology 2009 20 505302
13. N. Kolmakova A. Kolmakov J. Phys. Chem. C 2010 114 17233 17237
14. G. Schardein E. U. Donev J. T. Hastings Nanotechnology 2011 22 015301
15. S. Thiberge O. Zik E. Moses Rev. Sci. Instrum. 2004 75 2280 2289
16. D. R. Ciarlo Biomed. Microdevices 2002 4 63 68
17. N. W. M. Ritchie, DTSA-II, Deneb edn., 2010
18. N. W. M. Ritchie Microsc. Microanal. 2009 15 454 468
19. N. W. M. Ritchie Microsc. Microanal. 2010 16 248 258
20. P. Roy R. Lynch P. Schmuki Electrochem. Commun. 2009 11 1567 1570
21. M. J. Williamson R. M. Tromp P. M. Vereecken R. Hull F. M. Ross Nature Mater. 2003 2 532 536
22. A. Radisic P. M. Vereecken J. B. Hannon P. C. Searson F. M. Ross Nano Lett. 2006 6 238 242
23. G. Q. Xie M. H. Song K. Mitsuishi K. Furuya J. Mater. Sci. 2006 41 2567 2571
24. J. Basu C. B. Carter R. Divakar V. B. Shenoy N. Ravishankar Appl. Phys. Lett. 2008 93 133104
25. C. W. Hagen W. F. van Dorp P. A. Crozier J. Phys.: Conf. Ser. 2008 126 012025
26. C. W. Hagen W. F. van Dorp P. A. Crozier P. Kruit Surf. Sci. 2008 602 3212 3219
27. M. Amman J. W. Sleight D. R. Lombardi R. E. Welser M. R. Deshpande M. A. Reed L. J. Guido J. Vac. Sci. Technol., B 1996 14 54 62
28. D. L. Goldfarb J. J. de Pablo P. F. Nealey J. P. Simons W. M. Moreau M. Angelopoulos J. Vac. Sci. Technol., B 2000 18 3313 3317