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Volumn 9, Issue 7, 2009, Pages 2715-2718

Electron-beam-induced deposition of platinum from a liquid precursor

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS SOLUTIONS; CHLORINE CONTAMINATION; CHLOROPLATINIC ACID; ELECTRON BEAM-INDUCED DEPOSITION; FOCUSED ELECTRON BEAMS; GASEOUS PRECURSORS; HIGH-PURITY; HIGH-VOLUME PRODUCTION; LIQUID PHASE; LIQUID PRECURSORS; LOW-VOLUME PRODUCTION; MULTI-STEP; MULTIPLE MATERIALS; NANOMETER-SCALE STRUCTURES; NANOSCALE DEVICE; NANOSCALE MASKS; PLATINUM IONS; PROTOTYPING; SUB-50 NM;

EID: 67650385749     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl9012216     Document Type: Article
Times cited : (83)

References (20)
  • 19
    • 84869373361 scopus 로고
    • dtsa2 accessed June 1
    • Ritchie, N. W. M. DTSA-II, 1795. http://www.cstl.nist.gov/div837/837.02/ epq/dtsa2 (accessed June 1, 2009).
    • (1795)
    • Ritchie, N.W.1    DTSA-II, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.