Chemistry of Cu(acac)2 on Ni(110) and Cu(110) surfaces: Implications for atomic layer deposition processes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 1, 2013, Pages

  Ma, Qiang ^a   Zaera, Francisco ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLACETONATES; ACETYLACETONE; ADSORPTION GEOMETRIES; ATOMIC LAYER; CHEMICAL TRANSFORMATIONS; COPPER ATOMS; COPPER SURFACE; CU(1 1 0); GASPHASE; HIGH TEMPERATURE; METALLIC COPPER; ORGANIC LIGANDS; SURFACE SPECIES; TEMPERATURE RANGE; THERMAL CHEMISTRY;

ACETONE; ADSORPTION; ATOMIC LAYER DEPOSITION; CARBON; COPPER; LIGANDS; PHOTOELECTRONS; SINGLE CRYSTAL SURFACES; SURFACE REACTIONS; TEMPERATURE PROGRAMMED DESORPTION; X RAY PHOTOELECTRON SPECTROSCOPY;

NICKEL;

EID: 84871891579     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4763358     Document Type: Article

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