|
Volumn 46, Issue 1, 2003, Pages
|
ALD special report: Where's the metal?
a a
a
NONE
|
Author keywords
[No Author keywords available]
|
Indexed keywords
COATING TECHNIQUES;
COPPER;
LOW TEMPERATURE EFFECTS;
MONOLAYERS;
OPTIMIZATION;
PROCESS ENGINEERING;
SEMICONDUCTING FILMS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SURFACE TREATMENT;
TANTALUM;
ATOMIC LAYER DEPOSITION;
CLEAN PROCESS TECHNOLOGY;
PROCESS TECHNOLOGY;
SEMICONDUCTOR DEVICE MODELS;
|
EID: 0037255097
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (27)
|
References (0)
|