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Volumn 46, Issue 1, 2003, Pages

ALD special report: Where's the metal?

(2)  Vogler, Debra a   Doe, Paula a  

a NONE

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; COPPER; LOW TEMPERATURE EFFECTS; MONOLAYERS; OPTIMIZATION; PROCESS ENGINEERING; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE TREATMENT; TANTALUM;

EID: 0037255097     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article
Times cited : (27)

References (0)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.