SCOPUS 정보 검색 플랫폼

Materials Science and Engineering R: Reports

Volumn 19, Issue 3-4, 1997, Pages 87-151

Multilevel interconnections for ULSI and GSI era

(1) Murarka, Shyam P a

a RENSSELAER POLYTECHNIC INSTITUTE (United States)

Author keywords

Interconnection network; Multilevel interconnection; Semiconductor devices; ULSI GSI era

Indexed keywords

ALUMINUM; COPPER; MICROPROCESSOR CHIPS; ULSI CIRCUITS;

MULTILEVEL INTERCONNECTION (MLI);

INTERCONNECTION NETWORKS;

EID: 0031142982 PISSN: 0927796X EISSN: None Source Type: Journal
DOI: 10.1016/S0927-796X(97)00002-8 Document Type: Article

Times cited : (368)

References (197)

1
- 0019710892
- H. Huff, R. Kriegler, Y. Takeishi (Eds.), Electrochemical Soc., Princeton, NJ
- P.B. Ghate, C.R. Fuller, in: H. Huff, R. Kriegler, Y. Takeishi (Eds.), Semiconductor Silicon - 1981, Electrochemical Soc., Princeton, NJ, 1981, p. 680.
- (1981) Semiconductor Silicon - 1981 , pp. 680
- Ghate, P.B.¹ Fuller, C.R.²

2
- 0020116936
- A.K. Sinha, J.A. Cooper, Jr., H.J. Levinstein, Electron Device Lett. EDL-3 (1982) 90.
- (1982) Electron Device Lett. , vol.EDL-3 , pp. 90
- Sinha, A.K.¹ Cooper J.A., Jr.² Levinstein, H.J.³

3
- 0020114559
- K. Saraswat, F. Mohammadi, IEEE Trans. Electron Devices ED-29 (1982) 4.
- (1982) IEEE Trans. Electron Devices , vol.ED-29 , pp. 4
- Saraswat, K.¹ Mohammadi, F.²

4
- 23544434943
- IEEE, New York
- S.P. Murarka, in: IEEE-IEDM 1979, Tech. Digest, IEEE, New York, 1979, p. 454.
- (1979) IEEE-IEDM 1979, Tech. Digest , pp. 454
- Murarka, S.P.¹

5
- 0003926828
- Academic Press, New York
- S.P. Murarka, Silicides for VLSI Applications, Academic Press, New York, 1983.
- (1983) Silicides for VLSI Applications
- Murarka, S.P.¹

6
- 0029333140
- J.G. Ryan, R.M. Geffken, N.R. Poulin, J.R. Paraszczak, IBM J. Res. Dev. 39 (1995) 371.
- (1995) IBM J. Res. Dev. , vol.39 , pp. 371
- Ryan, J.G.¹ Geffken, R.M.² Poulin, N.R.³ Paraszczak, J.R.⁴

7
- 0346744812
- National Technology Roadmap for Semiconductors (NTRS), SIA, 1994
- National Technology Roadmap for Semiconductors (NTRS), SIA, 1994.

8
- 0028578937
- M.E. Thomas, Mater. Res. Soc. Symp. Proc. 337 (1994) 13.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.337 , pp. 13
- Thomas, M.E.¹

9
- 0028563606
- S.P. Jeng, R.H. Havemann, M.-C. Chang, Mater. Res. Soc. Symp. Proc. 337 (1994) 25.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.337 , pp. 25
- Jeng, S.P.¹ Havemann, R.H.² Chang, M.-C.³

10
- 0020276069
- C.P. Yuan, T.N. Trick, IEEE Electron Device Lett. EDL-3 (1982) 391.
- (1982) IEEE Electron Device Lett. , vol.EDL-3 , pp. 391
- Yuan, C.P.¹ Trick, T.N.²

11
- 0020704286
- T. Sakurai, K. Tamaru, IEEE Trans. Electron Devices ED-30 (1983) 183.
- (1983) IEEE Trans. Electron Devices , vol.ED-30 , pp. 183
- Sakurai, T.¹ Tamaru, K.²

12
- 0020797359
- T. Sakurai, IEEE J. Solid State Circuits, SC-18 (1983) 418.
- (1983) IEEE J. Solid State Circuits , vol.SC-18 , pp. 418
- Sakurai, T.¹

13
- 0020797359
- T. Sakurai, A.R. Newton, IEEE J. Solid State Circuits SC-18 (1983) 418.
- (1983) IEEE J. Solid State Circuits , vol.SC-18 , pp. 418
- Sakurai, T.¹ Newton, A.R.²

14
- 0003479594
- Addison-Wesley, Reading, MA
- H.B. Bakoglu, Circuits, Interconnections and Packaging for VLSI, Addison-Wesley, Reading, MA, 1985.
- (1985) Circuits, Interconnections and Packaging for VLSI
- Bakoglu, H.B.¹

15
- 0025252022
- D.S. Gao, A.T. Yang, S. Kang, IEEE Trans. Circuit and Systems, SC-37 (1) (1990) 1.
- (1990) IEEE Trans. Circuit and Systems , vol.SC-37 , Issue.1 , pp. 1
- Gao, D.S.¹ Yang, A.T.² Kang, S.³

16
- 0346744811
- IEEE, New York
- S. Sai-Halasz, IEEE ICCD, IEEE, New York, 1992, p. 230.
- (1992) IEEE ICCD , pp. 230
- Sai-Halasz, S.¹

17
- 0029209053
- S. Oh, K. Chang, IEEE Circuits and Devices, 11 (1995) 16.
- (1995) IEEE Circuits and Devices , vol.11 , pp. 16
- Oh, S.¹ Chang, K.²

18
- 0348005529
- Austin, TX, 25-26 October
- B. Geuskens, K. Rose, paper presented at Microelectronic Manufacturing Conference '95, Austin, TX, 25-26 October 1995.
- (1995) Microelectronic Manufacturing Conference '95
- Geuskens, B.¹ Rose, K.²

19
- 0003013682
- IEEE, Piscataway, NJ
- M.T. Bohr, IEEE IEDM, 1995, Tech. Digest., IEEE, Piscataway, NJ, 1995, p. 241.
- (1995) IEEE IEDM, 1995, Tech. Digest. , pp. 241
- Bohr, M.T.¹

20
- 0029544642
- IEEE, Piscataway, NJ
- K. Rahmat, O.S. Nakagawa, S.-Y. Oh, J. Moll, W.T. Lynch, IEEE IEDM, 1995, Tech. Digest., IEEE, Piscataway, NJ, 1995, p. 245.
- (1995) IEEE IEDM, 1995, Tech. Digest. , pp. 245
- Rahmat, K.¹ Nakagawa, O.S.² Oh, S.-Y.³ Moll, J.⁴ Lynch, W.T.⁵

21
- 23544436992
- IEEE, Parisipanny, NJ
- M.E. Thomas, I.A. Sadat, S. Sekigahama, IEEE IEDM 1990, Techn. Digest, IEEE, Parisipanny, NJ, 1990, p. 3.5.1.
- (1990) IEEE IEDM 1990, Techn. Digest , pp. 351
- Thomas, M.E.¹ Sadat, I.A.² Sekigahama, S.³

22
- 0347375189
- personal communication
- K. Rose, RPI, personal communication.
- RPI
- Rose, K.¹

23
- 0002902038
- Prentice-Hall, Englewood Cliffs, NJ
- R.K. Poon, Computer Circuits Electrical Design, Prentice-Hall, Englewood Cliffs, NJ.
- Computer Circuits Electrical Design
- Poon, R.K.¹

24
- 0003818926
- McGraw-Hill, New York
- G.-K. Rao, Multilevel Interconnect Technology, McGraw-Hill, New York, 1993.
- (1993) Multilevel Interconnect Technology
- Rao, G.-K.¹

25
- 0002157434
- S.P. Murarka, Solid State Technol. 39 (1996) 83.
- (1996) Solid State Technol. , vol.39 , pp. 83
- Murarka, S.P.¹

26
- 0029212173
- S.P. Murarka, S.W. Hymes, Crit. Rev. Solid State Mater. Sci. 20 (1995) 87.
- (1995) Crit. Rev. Solid State Mater. Sci. , vol.20 , pp. 87
- Murarka, S.P.¹ Hymes, S.W.²

27
- 0003634478
- Butterworth-Heinemann, Boston
- S.P. Murarka, Metallization Theory and Practice for VLSI and ULSI, Butterworth-Heinemann, Boston, 1993, p. 184.
- (1993) Metallization Theory and Practice for VLSI and ULSI , pp. 184
- Murarka, S.P.¹

28
- 84989448138
- IEEE, Piscataway, NJ
- R.R. Uttecht, R.M. Geffken, Proc. IEEE VMIC 1991, IEEE, Piscataway, NJ, 1990, p. 20.
- (1990) Proc. IEEE VMIC 1991 , pp. 20
- Uttecht, R.R.¹ Geffken, R.M.²

29
- 0026260129
- F.B. Kaufmann, D.B. Thompson, R.E. Broadie, M.A. Jaso, W.L. Guthrie, D.J. Pearsons, M.B. Small, J. Electrochem. Soc. 138 (1991) 3460.
- (1991) J. Electrochem. Soc. , vol.138 , pp. 3460
- Kaufmann, F.B.¹ Thompson, D.B.² Broadie, R.E.³ Jaso, M.A.⁴ Guthrie, W.L.⁵ Pearsons, D.J.⁶ Small, M.B.⁷

30
- 0004090609
- Noyes, Park Ridge, NJ
- a) J.E.J. Schmitz, Chemical vapourdeposition of tungsten and tungsten silicides for VLSI/VLSI Applications, Noyes, Park Ridge, NJ, 1992.
- (1992) Chemical Vapourdeposition of Tungsten and Tungsten Silicides for VLSI/VLSI Applications
- Schmitz, J.E.J.¹

31
- 0027983268
- b) E. Kirchner, S.P. Murarka, E. Eisenbraun, A. Kaloyeros, Mater. Res. Soc. Symp. Proc. 318 (1994) 319.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.318 , pp. 319
- Kirchner, E.¹ Murarka, S.P.² Eisenbraun, E.³ Kaloyeros, A.⁴

32
- 84908154425
- Santa Clara, CA, personal communication
- F. Chen, Applied Materials, Santa Clara, CA, personal communication, 1996.
- (1996) Applied Materials
- Chen, F.¹

33
- 0029194835
- S.M. Rossnagel, J. Vac. Sci. Technol. B13 (1995) 125.
- (1995) J. Vac. Sci. Technol. , vol.B13 , pp. 125
- Rossnagel, S.M.¹

34
- 0028195290
- N. Takeyasu, Y. Kawano, E. Kondoh, T. Katagiri, H. Yamamoto, H. Shinriki, T. Ohta, Jpn. J. Appl. Phys. 33 (1994) 424.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 424
- Takeyasu, N.¹ Kawano, Y.² Kondoh, E.³ Katagiri, T.⁴ Yamamoto, H.⁵ Shinriki, H.⁶ Ohta, T.⁷

35
- 0037598195
- J.D. McBrayer, R.M. Swanson, T.W. Sigmon, J. Electrochem. Soc. 133 (1986) 1243.
- (1986) J. Electrochem. Soc. , vol.133 , pp. 1243
- McBrayer, J.D.¹ Swanson, R.M.² Sigmon, T.W.³

36
- 0003591225
- Wiley, New York
- G.D. Parkes (Ed.), Mellor's Modern Inorganic Chemistry, revised, Wiley, New York, 1967, p. 650.
- (1967) Mellor's Modern Inorganic Chemistry, Revised , pp. 650
- Parkes, G.D.¹

37
- 84953504589
- North-Holland, New York
- A.T. Fromhold, Jr., Theory of Metal Oxidation, vol. 1 - Fundamentals, North-Holland, New York, 1975, p. 28.
- (1975) Theory of Metal Oxidation, Vol. 1 - Fundamentals , vol.1 , pp. 28
- Fromhold A.T., Jr.¹

38
- 0003709572
- Wiley, New York
- F.A. Kroger, Chemistry of Perfect Crystals, Wiley, New York, 1964, p. 577.
- (1964) Chemistry of Perfect Crystals , pp. 577
- Kroger, F.A.¹

39
- 0028712449
- J.M. Steigerwald, S.P. Murarka, R.J. Gutmann, D.J. Duquette, J. Electrochem. Soc. 141 (1994) 3512.
- (1994) J. Electrochem. Soc. , vol.141 , pp. 3512
- Steigerwald, J.M.¹ Murarka, S.P.² Gutmann, R.J.³ Duquette, D.J.⁴

40
- 0348005522
- SRC Publication #C91868, SRC, Research Triangle Park, NC
- J. Li, T.-C. Lee, J.W. Mayer, SRC Publication #C91868, SRC, Research Triangle Park, NC, 1991.
- (1991)
- Li, J.¹ Lee, T.-C.² Mayer, J.W.³

41
- 84878314341
- A.F. Burnett, J.M. Cech, J. Vac. Sci. Technol. A11 (1993) 2970.
- (1993) J. Vac. Sci. Technol. , vol.A11 , pp. 2970
- Burnett, A.F.¹ Cech, J.M.²

42
- 0027607255
- D.P. Tracy, D.B. Knorr, J. Electron Mater. 22 (1993) 611.
- (1993) J. Electron Mater. , vol.22 , pp. 611
- Tracy, D.P.¹ Knorr, D.B.²

43
- 0346744796
- Sendai, Japan, March 3-5 1994, Tohuku Univ., Sendai, Japan
- T. Takewaki, H. Yamada, T. Ohmi, T. Shibata, T. Nitta, Proc. Int. Conf. Adv. Microelectronic Devices and Processing, Sendai, Japan, March 3-5 1994, Tohuku Univ., Sendai, Japan, 1994, p. 489.
- (1994) Proc. Int. Conf. Adv. Microelectronic Devices and Processing , pp. 489
- Takewaki, T.¹ Yamada, H.² Ohmi, T.³ Shibata, T.⁴ Nitta, T.⁵

44
- 25944438622
- A.F. Mayades, M. Schatzkes, Phys. Rev. B1 (1970) 1382.
- (1970) Phys. Rev. , vol.B1 , pp. 1382
- Mayades, A.F.¹ Schatzkes, M.²

45
- 42149197350
- N. Artunc, Z.Z. Ozturk, J. Phys.: Condens. Matter 5 (1993) 559.
- (1993) J. Phys.: Condens. Matter , vol.5 , pp. 559
- Artunc, N.¹ Ozturk, Z.Z.²

46
- 0003798925
- Wiley, New York
- A.G. Milnes, Deep Impurities in Semiconductors, Wiley, New York, 1973.
- (1973) Deep Impurities in Semiconductors
- Milnes, A.G.¹

47
- 77957671580
- J.I. Pankove, N.M. Johnson (Eds.), Academic Press, Boston
- S.J. Pearton, in: J.I. Pankove, N.M. Johnson (Eds.), Hydrogen in Semiconductors, Academic Press, Boston, 1991, p. 65.
- (1991) Hydrogen in Semiconductors , pp. 65
- Pearton, S.J.¹

48
- 0027889402
- IEEE, Piscataway, NJ
- J.S.H. Cho, H.-K. Kang, C. Ryu, S.S. Wong, IEEE-IEDM, 1993, Techn. Digest, IEEE, Piscataway, NJ, 1993, p. 265.
- (1993) IEEE-IEDM, 1993, Techn. Digest , pp. 265
- Cho, J.S.H.¹ Kang, H.-K.² Ryu, C.³ Wong, S.S.⁴

49
- 0000179930
- D. Gupta, K. Vieregge, K.V. Srikrishnan, Appl. Phys. Lett. 61 (1992) 2178.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 2178
- Gupta, D.¹ Vieregge, K.² Srikrishnan, K.V.³

50
- 36549092830
- H. Wendt, H. Cerva, V. Lehmann, W. Palmer, J. Appl. Phys. 65 (1989) 2402.
- (1989) J. Appl. Phys. , vol.65 , pp. 2402
- Wendt, H.¹ Cerva, H.² Lehmann, V.³ Palmer, W.⁴

51
- 0027641480
- Y. Shacham-Diamond, A. Dedhia, D. Hoffstetter nad W.G. Oldham, J. Electrochem. Soc., 140 (1993) 2427.
- (1993) J. Electrochem. Soc. , vol.140 , pp. 2427
- Shacham-Diamond, Y.¹ Dedhia, A.² Hoffstetter, D.³ Oldham, W.G.⁴

52
- 0038522376
- IEEE, Piscataway, NJ
- Y. Shacham-Diamond, A. Dedhia, D. Hoffstetter, W.G. Oldham, Proc. 1991 VMIC, IEEE, Piscataway, NJ, 1991, p. 109.
- (1991) Proc. 1991 VMIC , pp. 109
- Shacham-Diamond, Y.¹ Dedhia, A.² Hoffstetter, D.³ Oldham, W.G.⁴

53
- 0346744795
- MRS, Pittsburgh, PA
- Y.T. Shy, S.P. Murarka, K. Singh, H.G. Bhimnathwala, J.M. Borrego, C. Shepard, W.A. Lanford, Conf. Proc. ULSI-VII, MRS, Pittsburgh, PA, 1992, p. 433.
- (1992) Conf. Proc. ULSI-VII , pp. 433
- Shy, Y.T.¹ Murarka, S.P.² Singh, K.³ Bhimnathwala, H.G.⁴ Borrego, J.M.⁵ Shepard, C.⁶ Lanford, W.A.⁷

54
- 0004101221
- Artech House, Boston
- J.A. King (Ed.), Materials Handbook for Hybrid Microelectronics, Artech House, Boston, 1988, p. 39.
- (1988) Materials Handbook for Hybrid Microelectronics , pp. 39
- King, J.A.¹

55
- 36449006855
- J.J. Toomey, S. Hymes, S.P. Murarka, Appl. Phys. Lett. 66 (1995) 2074.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2074
- Toomey, J.J.¹ Hymes, S.² Murarka, S.P.³

56
- 0026186937
- P.A. Flinn, J. Mater. Res. 6 (1991) 1498.
- (1991) J. Mater. Res. , vol.6 , pp. 1498
- Flinn, P.A.¹

57
- 0008366744
- A.S. Argon (ed.), MIT Press, Cambridge, MA
- M.F. Ashby, H.J. Frost, in: A.S. Argon (ed.), Constitutive Equations in Plasticity, MIT Press, Cambridge, MA, 1975, p. 117.
- (1975) Constitutive Equations in Plasticity , pp. 117
- Ashby, M.F.¹ Frost, H.J.²

58
- 0003753387
- Pergamon, New York
- H.J. Frost, M.F. Ashby, Deformation-Mechanism Maps: The Plasticity and Creep of Metals and Ceramics, Pergamon, New York, 1982, p. 6.
- (1982) Deformation-Mechanism Maps: The Plasticity and Creep of Metals and Ceramics , pp. 6
- Frost, H.J.¹ Ashby, M.F.²

59
- 0346114218
- C.A. Apblett, P.J. Ficalora, Mater. Res. Soc. Symp. Proc. 239 (1992) 99.
- (1992) Mater. Res. Soc. Symp. Proc. , vol.239 , pp. 99
- Apblett, C.A.¹ Ficalora, P.J.²

60
- 0028022271
- A. Berti, S.P. Murarka, L.E. Brooke, Mater. Res. Soc. Symp. Proc. 307 (1994) 451.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.307 , pp. 451
- Berti, A.¹ Murarka, S.P.² Brooke, L.E.³

61
- 0027869158
- R.P. Vinci, T.N. Marieb, J.C. Braveman, Mater. Res. Soc. Symp. Proc. 308 (1993) 297.
- (1993) Mater. Res. Soc. Symp. Proc. , vol.308 , pp. 297
- Vinci, R.P.¹ Marieb, T.N.² Braveman, J.C.³

62
- 0011403112
- R. Nandan, S.P. Murarka, A. Pant, C. Shepard, W.A. Lanford, Mater. Res. Soc. Symp. Proc. 260 (1992) 929.
- (1992) Mater. Res. Soc. Symp. Proc. , vol.260 , pp. 929
- Nandan, R.¹ Murarka, S.P.² Pant, A.³ Shepard, C.⁴ Lanford, W.A.⁵

63
- 0346114217
- unpublished results
- S.P. Murarka, unpublished results.
- Murarka, S.P.¹

64
- 0028699045
- R.P. Vinci, E.M. Zielinski, J.C. Bravman, Mater. Res. Soc. Proc. 338 (1994) 289.
- (1994) Mater. Res. Soc. Proc. , vol.338 , pp. 289
- Vinci, R.P.¹ Zielinski, E.M.² Bravman, J.C.³

65
- 0002227180
- P.A. Flinn, G.A. Waychunas, J. Vac. Sci. Technol. B6 (1988) 1749.
- (1988) J. Vac. Sci. Technol. , vol.B6 , pp. 1749
- Flinn, P.A.¹ Waychunas, G.A.²

66
- 0346744785
- Ph.D. Thesis, Rensselaer Polytechnic Institute, Troy, NY
- C.S. Lee, Ph.D. Thesis, Rensselaer Polytechnic Institute, Troy, NY, 1995.
- (1995)
- Lee, C.S.¹

67
- 0346114207
- K.L. Mittal (Ed.), Plenum, New York
- W.J. van Ooijin, in: K.L. Mittal (Ed.), Physico-Chemical Aspects of Polymer Surfaces, Plenum, New York, 1983, p. 1035.
- (1983) Physico-Chemical Aspects of Polymer Surfaces , pp. 1035
- Van Ooijin, W.J.¹

68
- 0026136197
- T. Ohmi, T. Saito, M. Otsuki, T. Shibata, T. Nitta, J. Electrochem. Soc., 138 (1991) 1089.
- (1991) J. Electrochem. Soc. , vol.138 , pp. 1089
- Ohmi, T.¹ Saito, T.² Otsuki, M.³ Shibata, T.⁴ Nitta, T.⁵

69
- 36549096467
- T. Ohmi, T. Saito, M. Otsuki, T. Shibata, T. Nitta, Appl. Phys. Lett., 52 (1988) 2236.
- (1988) Appl. Phys. Lett. , vol.52 , pp. 2236
- Ohmi, T.¹ Saito, T.² Otsuki, M.³ Shibata, T.⁴ Nitta, T.⁵

70
- 0346744783
- Tokyo, 1989
- T. Saito, T. Ohmi, T. Shibata, M. Otsuki, T. Nitta, Extended Abstracts 21st Conf. on Solid State Devices and Materials, Tokyo, 1989, 1989, p. 25.
- (1989) Extended Abstracts 21st Conf. on Solid State Devices and Materials , pp. 25
- Saito, T.¹ Ohmi, T.² Shibata, T.³ Otsuki, M.⁴ Nitta, T.⁵

71
- 36549103954
- P. Bai, G.R. Yang, T.M. Lu, Appl. Phys. Lett., 56 (1990) 198.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 198
- Bai, P.¹ Yang, G.R.² Lu, T.M.³

72
- 0021310917
- T. Takagi, Mater. Res. Soc. Symp. Proc. 27 (1984) 501.
- (1984) Mater. Res. Soc. Symp. Proc. , vol.27 , pp. 501
- Takagi, T.¹

73
- 0029354520
- D. Gupta., Mater. Chem. Phys. 41 (1995) 199.
- (1995) Mater. Chem. Phys. , vol.41 , pp. 199
- Gupta, D.¹

74
- 0004019060
- McGraw Hill, New York
- D.P. Seraphim, R. Lasky, C.-Y. Li (Eds.), Principles of Electronic Packaging, McGraw Hill, New York, 1989.
- (1989) Principles of Electronic Packaging
- Seraphim, D.P.¹ Lasky, R.² Li, C.-Y.³

75
- 0003860827
- Van Nostrand Reinhold, New York
- R.R. Tummala, E.J. Rymaszewski (Eds.), Microelectronics Packaging Handbook, Van Nostrand Reinhold, New York, 1989.
- (1989) Microelectronics Packaging Handbook
- Tummala, R.R.¹ Rymaszewski, E.J.²

76
- 0018000998
- M.A. Nicolet, Thin Solid Films, 52 (1978) 415.
- (1978) Thin Solid Films , vol.52 , pp. 415
- Nicolet, M.A.¹

77
- 84971922594
- S.-Q. Wang, MRS Bull. 19 (1994) 30.
- (1994) MRS Bull. , vol.19 , pp. 30
- Wang, S.-Q.¹

78
- 10844256155
- J. Li, Y. Shacham-Diamond, J.W. Mayer, Mater. Sci. Rep. 9 (1992) 1.
- (1992) Mater. Sci. Rep. , vol.9 , pp. 1
- Li, J.¹ Shacham-Diamond, Y.² Mayer, J.W.³

79
- 0028022271
- A. Berti, S.P. Murarka, Mater. Res. Soc. Proc. 318 (1994) 451.
- (1994) Mater. Res. Soc. Proc. , vol.318 , pp. 451
- Berti, A.¹ Murarka, S.P.²

80
- 0003013682
- IEEE, Piscataway, NJ
- M.T. Bohr, IEEE-IEDM, 1995, Tech. Digest, IEEE, Piscataway, NJ, 1995, p. 241.
- (1995) IEEE-IEDM, 1995, Tech. Digest , pp. 241
- Bohr, M.T.¹

81
- 0003906631
- Academic Press, Boston, Chapter 11
- R.J. Borg, G.J. Dienes, The Physical Chemistry of Solids, Academic Press, Boston, 1992, Chapter 11.
- (1992) The Physical Chemistry of Solids
- Borg, R.J.¹ Dienes, G.J.²

82
- 0004261478
- ASM International, Metals Park, OH
- W.C. Johnson, J.M. Blakely (Eds.), Interfacial Segregation, ASM International, Metals Park, OH, 1979.
- (1979) Interfacial Segregation
- Johnson, W.C.¹ Blakely, J.M.²

83
- 0002295993
- W.C. Johnson, J.M. Blakely (Eds.), ASM International, Metals Park, OH
- R.W. Balluffi, in: W.C. Johnson, J.M. Blakely (Eds.), Interfacial Segregation, ASM International, Metals Park, OH, 1979, p. 193.
- (1979) Interfacial Segregation , pp. 193
- Balluffi, R.W.¹

84
- 0004261478
- W.C. Johnson, J.M. Blakely (Eds.), ASM International, Metals Park, OH
- D.F. Stein, L.A. Heldt, in: W.C. Johnson, J.M. Blakely (Eds.), Interfacial Segregation, ASM International, Metals Park, OH, 1979, p. 239.
- (1979) Interfacial Segregation , pp. 239
- Stein, D.F.¹ Heldt, L.A.²

85
- 0343232907
- J.L. Walter, M.R. Jackson, C.T. Sims (Eds.), ASM International, Metals Park, OH
- H.W. Paxton, in: J.L. Walter, M.R. Jackson, C.T. Sims (Eds.), Alloying, ASM International, Metals Park, OH, 1988, p. 199.
- (1988) Alloying , pp. 199
- Paxton, H.W.¹

86
- 0017538849
- D. Gupta, Metall. Trans. 8A (1977) 1431.
- (1977) Metall. Trans. , vol.8 A , pp. 1431
- Gupta, D.¹

87
- 0004862964
- G.G. Smith, R. Blumenthal (Eds.), MRS, Pittsburgh
- S.P. Murarka, in: G.G. Smith, R. Blumenthal (Eds.), Tungsten and Other Advanced Metals for ULSI Applications 1990, MRS, Pittsburgh, 1991, p. 179.
- (1991) Tungsten and Other Advanced Metals for ULSI Applications 1990 , pp. 179
- Murarka, S.P.¹

88
- 84954104950
- Cat. No. 91CH3075-9, IEEE, Piscataway, NJ
- S. Ogawa, H. Nishimura, IEEE-IEDM, 1991, Tech. Digest, Cat. No. 91CH3075-9, IEEE, Piscataway, NJ, 1991, p. 277.
- (1991) IEEE-IEDM, 1991, Tech. Digest , pp. 277
- Ogawa, S.¹ Nishimura, H.²

89
- 23544477992
- See also IEEE-IEDM, 1993, Tech. Digest Cat. No. 93CH3361-3, p. 281.
- IEEE-IEDM, 1993, Tech. Digest Cat. No. 93CH3361-3 , pp. 281

90
- 0347375168
- P.J. Ding, W.A. Langford, S. Hymes and S.P. Muranla, Appl. Phys. Lett. 75 (1994) 3627.
- (1994) Appl. Phys. Lett. , vol.75 , pp. 3627
- Ding, P.J.¹ Langford, W.A.² Hymes, S.³ Muranla, S.P.⁴

91
- 0000507068
- P.J. Ding, W.A. Lanford, S. Hymes, S.P. Murarka, Appl. Phys. Lett. 64 (1994) 2897.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2897
- Ding, P.J.¹ Lanford, W.A.² Hymes, S.³ Murarka, S.P.⁴

92
- 0029519226
- IEEE, Piscataway, NJ
- T. Takewaki, R. Kaihara, T. Ohmi, T. Nitta, IEEE-IEDM, 1995, Tech. Digest Cat No. 95-CH35810, IEEE, Piscataway, NJ, 1995, p. 253.
- (1995) IEEE-IEDM, 1995, Tech. Digest Cat No. 95-CH35810 , pp. 253
- Takewaki, T.¹ Kaihara, R.² Ohmi, T.³ Nitta, T.⁴

93
- 0030415406
- S.W. Hymes, K.S. Kumar, S.P. Murarka, W. Wang, W.A. Lanford, Mat. Res. Soc. Symp. Proc. 427 (1996) 193.
- (1996) Mat. Res. Soc. Symp. Proc. , vol.427 , pp. 193
- Hymes, S.W.¹ Kumar, K.S.² Murarka, S.P.³ Wang, W.⁴ Lanford, W.A.⁵

94
- 0003689862
- ASM International, Materials Park, OH
- T.B. Massalski (Ed.), Binary Alloy Phase Diagrams, 2nd ed., ASM International, Materials Park, OH, 1990, p. 1433.
- (1990) Binary Alloy Phase Diagrams, 2nd Ed. , pp. 1433
- Massalski, T.B.¹

95
- 0011403112
- R. Nandan, S.P. Murarka, C. Shepard, W.A. Lanford, Mater. Res. Soc. 260 (1992) 929.
- (1992) Mater. Res. Soc. , vol.260 , pp. 929
- Nandan, R.¹ Murarka, S.P.² Shepard, C.³ Lanford, W.A.⁴

96
- 0027983268
- E. Kirchner, S.P. Murarka, E. Eisenbraun, A.E. Kaloyeros, Mater. Res. Soc. Proc. 318 (1994) 319.
- (1994) Mater. Res. Soc. Proc. , vol.318 , pp. 319
- Kirchner, E.¹ Murarka, S.P.² Eisenbraun, E.³ Kaloyeros, A.E.⁴

97
- 84953488258
- SRC, Research Triangle Park, NC
- S.P. Murarka, E. Kirchner, R. Nandan, E. Eisenbraun, A.E. Kaloyeros, Proc. Techcon '93, SRC, Research Triangle Park, NC, 1993, p. 381.
- (1993) Proc. Techcon '93 , pp. 381
- Murarka, S.P.¹ Kirchner, E.² Nandan, R.³ Eisenbraun, E.⁴ Kaloyeros, A.E.⁵

98
- 0002968377
- B. Arcot, S.P. Murarka, L.A. Clevenger, Q.Z. Hong, W. Ziegler, J.M.E. Harper, J. Appl. Phys. 76 (1994) 5161.
- (1994) J. Appl. Phys. , vol.76 , pp. 5161
- Arcot, B.¹ Murarka, S.P.² Clevenger, L.A.³ Hong, Q.Z.⁴ Ziegler, W.⁵ Harper, J.M.E.⁶

99
- 0347375161
- Publ. P94003, SRC, Research Triangle Park, NC
- SRC Topical Research Conference, Publ. P94003, SRC, Research Triangle Park, NC, 1994.
- (1994) SRC Topical Research Conference

100
- 84975376938
- T. Homma, R. Yamaguchi, Y. Murao, J. Electrochem. Soc. 140 (1993) 687 and 3599.
- (1993) J. Electrochem. Soc. , vol.140 , pp. 687
- Homma, T.¹ Yamaguchi, R.² Murao, Y.³

101
- 0029182073
- L.W. Hrubesh, Mater. Res. Soc. Symp. Proc. 381 (1995) 267.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.381 , pp. 267
- Hrubesh, L.W.¹

102
- 0026971128
- J.W. Labadie, J.L. Hedrick, V. Wakharkar, D.S. Hofer, T.P. Russell, IEEE Trans. Compon. Hybrids Manuf. Technol. 15 (1992) 925.
- (1992) IEEE Trans. Compon. Hybrids Manuf. Technol. , vol.15 , pp. 925
- Labadie, J.W.¹ Hedrick, J.L.² Wakharkar, V.³ Hofer, D.S.⁴ Russell, T.P.⁵

103
- 0002311717
- R.K. Laxman, Semicond. Internation, 18 (1995) 71.
- (1995) Semicond. Internation , vol.18 , pp. 71
- Laxman, R.K.¹

104
- 0003931768
- Noyes, Park Ridge, NJ
- J.J. Licari, L.A. Hughes, Handbook of Polymer Coatings for Electronics Chemistry, Technology, and Applications, Noyes, Park Ridge, NJ, 1990.
- (1990) Handbook of Polymer Coatings for Electronics Chemistry, Technology, and Applications
- Licari, J.J.¹ Hughes, L.A.²

105
- 0029192805
- C.H. Ting, T.E. Seidel, Mater. Res. Soc. Symp. Proc. 381 (1995) 3.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.381 , pp. 3
- Ting, C.H.¹ Seidel, T.E.²

106
- 0029194194
- K.R. Carter, H.J. Cha, R.A. DiPietro, C.J. Hawker, J.L. Hedrick, J.W. Labadie, J.E. McGrath, T.P. Russell, M.I. Sanchez, S.A. Swanson, W. Volksen, D.Y. Yoon, Mater. Res. Soc. Symp. Proc. 381 (1995) 79.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.381 , pp. 79
- Carter, K.R.¹ Cha, H.J.² Dipietro, R.A.³ Hawker, C.J.⁴ Hedrick, J.L.⁵ Labadie, J.W.⁶ McGrath, J.E.⁷ Russell, T.P.⁸ Sanchez, M.I.⁹ Swanson, S.A.¹⁰ Volksen, W.¹¹ Yoon, D.Y.¹²

107
- 0029205735
- D.M. Smith, J. Anderson, C.C. Cho, G.P. Johnston, S.P. Jeng, Mater. Res. Soc. Symp. Proc. 381 (1995) 261.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.381 , pp. 261
- Smith, D.M.¹ Anderson, J.² Cho, C.C.³ Johnston, G.P.⁴ Jeng, S.P.⁵

108
- 0346744764
- R.E. Alfred, R.J. Martinez, K.B. Wichmann (Eds.), SAMPE, Covina, CA
- S.P. Sun, S.P. Murarka, C.-J. Lee, in: R.E. Alfred, R.J. Martinez, K.B. Wichmann (Eds.), Proc. 4th Int. SAMPE Electronics Conf., SAMPE, Covina, CA, vol. 4, 1990, p. 530.
- (1990) Proc. 4th Int. SAMPE Electronics Conf. , vol.4 , pp. 530
- Sun, S.P.¹ Murarka, S.P.² Lee, C.-J.³

109
- 0346114181
- R.E. Alfred, R.J. Martinez, K.B. Wichmann (Eds.), SAMPE, Covina, CA
- S.P. Sun, S.P. Murarka, C.-J. Lee, in: R.E. Alfred, R.J. Martinez, K.B. Wichmann (Eds.), Proc. 4th Int. SAMPE Electronics Conf., SAMPE, Covina, CA, vol. 4, 1990, p. 519.
- (1990) Proc. 4th Int. SAMPE Electronics Conf. , vol.4 , pp. 519
- Sun, S.P.¹ Murarka, S.P.² Lee, C.-J.³

110
- 0347375148
- San Diego, CA
- R. Gutmann, unpublished paper presented at the 1996 Spring Electrochem. Soc. Meet., San Diego, CA.
- 1996 Spring Electrochem. Soc. Meet.
- Gutmann, R.¹

111
- 0346114185
- Cost of Ownership Model
- Cost of Ownership Model, SEMATECH Rep. 91020473B-GEN (1992).
- (1992) SEMATECH Rep. 91020473B-GEN

112
- 0003634478
- Butterworth-Heinemann, Boston, Chapters 7 and 8
- For example, see S.P. Murarka, Metallization Theory and Practice for VLSI and ULSI, Butterworth-Heinemann, Boston, 1993, Chapters 7 and 8.
- (1993) Metallization Theory and Practice for VLSI and ULSI
- Murarka, S.P.¹

113
- 0017971421
- C.Y. Ting, V.J. Vivalda, H.G. Schaefer, J. Vac. Sci. Technol. 15 (1978) 1105.
- (1978) J. Vac. Sci. Technol. , vol.15 , pp. 1105
- Ting, C.Y.¹ Vivalda, V.J.² Schaefer, H.G.³

114
- 0003680984
- McGraw Hill, New York
- L.I. Maissel, R. Glang (Eds.), Handbook of Thin Film Technology, McGraw Hill, New York, 1970.
- (1970) Handbook of Thin Film Technology
- Maissel, L.I.¹ Glang, R.²

115
- 0346114171
- Sendai, Japan, 3-5 March 1994, Tohuku Univ., Sendai
- T. Ohmi, Proc. Int. Conf. on Adv. Microelectronic Devices and Processing, Sendai, Japan, 3-5 March 1994, Tohuku Univ., Sendai, 1994, p. 3.
- (1994) Proc. Int. Conf. on Adv. Microelectronic Devices and Processing , pp. 3
- Ohmi, T.¹

116
- 0002154315
- S.M. Rossnagel, Semicond. Int. 19 (1996) 99.
- (1996) Semicond. Int. , vol.19 , pp. 99
- Rossnagel, S.M.¹

117
- 0348005465
- P. Singer, Semicond. Int. 19 (1996) 89.
- (1996) Semicond. Int. , vol.19 , pp. 89
- Singer, P.¹

118
- 0005333337
- P.J. Holverson, C.D. Dobson, P. Rich, D.C. Butler, G.R. Green, M.G.M. Harris, A. McGeown, G.A. Dixit, S. Poarch, K. Hamamoto, B. Bohannon, W.Y. Hsu and R.H. Havemann, Proc. VMIC. 95ISMIC-104 (1995) 537.
- (1995) Proc. VMIC. 95ISMIC-104 , pp. 537
- Holverson, P.J.¹ Dobson, C.D.² Rich, P.³ Butler, D.C.⁴ Green, G.R.⁵ Harris, M.G.M.⁶ McGeown, A.⁷ Dixit, G.A.⁸ Poarch, S.⁹ Hamamoto, K.¹⁰ Bohannon, B.¹¹ Hsu, W.Y.¹² Havemann, R.H.¹³

119
- 23544432961
- IEEE, Piscataway, NJ
- R.V. Joshi, M. Tejwani, Proc. 1995 IEEE-IEDM, 95CH35810, IEEE, Piscataway, NJ, 1995, p. 257.
- (1995) Proc. 1995 IEEE-IEDM, 95CH35810 , pp. 257
- Joshi, R.V.¹ Tejwani, M.²

120
- 0039159230
- S.-N. Mei, T.-M. Lu, J. Vac. Sci. Technol. 6 (1988) 9.
- (1988) J. Vac. Sci. Technol. , vol.6 , pp. 9
- Mei, S.-N.¹ Lu, T.-M.²

121
- 0021310917
- T. Takagi, Mater. Res. Soc. Symp. Proc. 27 (1984) 501.
- (1984) Mater. Res. Soc. Symp. Proc. , vol.27 , pp. 501
- Takagi, T.¹

122
- 0030387941
- S. Shingubara, A. Sano, H. Sakaue, T. Takahagi, Z.J. Radzimski, W.M. Posadowski, Mater. Res. Soc. Proc. 427 (1996) 185.
- (1996) Mater. Res. Soc. Proc. , vol.427 , pp. 185
- Shingubara, S.¹ Sano, A.² Sakaue, H.³ Takahagi, T.⁴ Radzimski, Z.J.⁵ Posadowski, W.M.⁶

123
- 3943097076
- A.E. Kaloyeros, M.A. Fury, MRS Bull. 18 (1993) 22.
- (1993) MRS Bull. , vol.18 , pp. 22
- Kaloyeros, A.E.¹ Fury, M.A.²

124
- 0006816043
- P. Doppelt, T.H. Baum, MRS Bull. 19 (1994) 41.
- (1994) MRS Bull. , vol.19 , pp. 41
- Doppelt, P.¹ Baum, T.H.²

125
- 0001759207
- M.J. Hampden-Smith, T.T. Kodas, M. Paffett, J.D. Farr, H.K. Shin, Chem. Mater. 2 (1990) 636.
- (1990) Chem. Mater. , vol.2 , pp. 636
- Hampden-Smith, M.J.¹ Kodas, T.T.² Paffett, M.³ Farr, J.D.⁴ Shin, H.K.⁵

126
- 0000823567
- D.B. Beach, F.K. LeGoues, C.K. Hu, Chem. Mater. 2 (1990) 216.
- (1990) Chem. Mater. , vol.2 , pp. 216
- Beach, D.B.¹ Legoues, F.K.² Hu, C.K.³

127
- 0346744724
- IEEE, Piscataway, NJ
- A.T. Norman, A. Hochberg, C.A. Roberts, P.N. Dyer, B.A. Muratore, Proc. 1991-VMIC, IEEE, Piscataway, NJ, 1991, p. 123.
- (1991) Proc. 1991-VMIC , pp. 123
- Norman, A.T.¹ Hochberg, A.² Roberts, C.A.³ Dyer, P.N.⁴ Muratore, B.A.⁵

128
- 21544455505
- A.V. Gelatos, R. Marsh, M. Kottke, C.J. Mogab, Appl. Phys. Lett. 63 (1993) 2842.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2842
- Gelatos, A.V.¹ Marsh, R.² Kottke, M.³ Mogab, C.J.⁴

129
- 0041694317
- Paris
- J.A.T. Norman, B.A. Mutamore, P.N. Dyer, D.A. Roberts, A.K. Hochberg, J. Phys. (Paris) IV (1991) C2-271.
- (1991) J. Phys. , vol.4
- Norman, J.A.T.¹ Mutamore, B.A.² Dyer, P.N.³ Roberts, D.A.⁴ Hochberg, A.K.⁵

130
- 36449004586
- A. Jain, J. Farkas, T.T. Kodas, K.M. Chi, M.J. Hampden-Smith, Appl. Phys. Lett. 61 (1992) 2662.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 2662
- Jain, A.¹ Farkas, J.² Kodas, T.T.³ Chi, K.M.⁴ Hampden-Smith, M.J.⁵

131
- 0028374225
- T.H. Stumm, H. van der Bergh, Mater. Sci. Eng. B23 (1994) 48.
- (1994) Mater. Sci. Eng. , vol.B23 , pp. 48
- Stumm, T.H.¹ Van Der Bergh, H.²

132
- 84972102772
- A.V. Gelatos, A. Jain, R. Marsh, C.J. Mogab, MRS Bull. 19 (1994) 49.
- (1994) MRS Bull. , vol.19 , pp. 49
- Gelatos, A.V.¹ Jain, A.² Marsh, R.³ Mogab, C.J.⁴

133
- 36448998860
- B. Zheng, E. Eisenbraun, J. Liu, A.E. Kaloyeros, Appl. Phys. Lett. 61 (1992) 2175.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 2175
- Zheng, B.¹ Eisenbraun, E.² Liu, J.³ Kaloyeros, A.E.⁴

134
- 0029545401
- IEEE, Parasphanny, NJ
- G. Dixit, A. Paranjape, Q.-Z. Hong, L.M. Ting, J.D. Luttmer, R.H. Havemann, D. Paul, A. Morrison, K. Littau, M. Eizenberg, A.K. Sinha, Proc. IEEE-IEDM 1995 Tech. Digest 95CH3581, IEEE, Parasphanny, NJ, 1995, p. 1001.
- (1995) Proc. IEEE-IEDM 1995 Tech. Digest 95CH3581 , pp. 1001
- Dixit, G.¹ Paranjape, A.² Hong, Q.-Z.³ Ting, L.M.⁴ Luttmer, J.D.⁵ Havemann, R.H.⁶ Paul, D.⁷ Morrison, A.⁸ Littau, K.⁹ Eizenberg, M.¹⁰ Sinha, A.K.¹¹

135
- 23544448282
- IEEE, Piscataway, NJ
- E. Kondah, Y. Kawano, N. Takeyasu, T. Katagiri, H. Yamamoto, T. Ohta, IEEE-IEDM 1993, Tech. Digest, IEEE, Piscataway, NJ, 1993, p. 277.
- (1993) IEEE-IEDM 1993, Tech. Digest , pp. 277
- Kondah, E.¹ Kawano, Y.² Takeyasu, N.³ Katagiri, T.⁴ Yamamoto, H.⁵ Ohta, T.⁶

136
- 0347375108
- K. Spear, G. Cullen (Eds.), Pennington, NJ
- A. Sherman, I.J. Raaijmakers, in: K. Spear, G. Cullen (Eds.), Proc. 11th Int. Conf. on CVD, Electrochem. Soc., Pennington, NJ, 1990, p. 374.
- (1990) Proc. 11th Int. Conf. on CVD, Electrochem. Soc. , pp. 374
- Sherman, A.¹ Raaijmakers, I.J.²

137
- 0024304061
- N.J. Ianno, A.V. Ahmed, D.E. Englebert, J. Electrochem. Soc. 136 (1989) 276.
- (1989) J. Electrochem. Soc. , vol.136 , pp. 276
- Ianno, N.J.¹ Ahmed, A.V.² Englebert, D.E.³

138
- 0346114136
- I.J. Raaijmakers, R.V. Virtis, G.S. Sandhu, J. Yang, E.K. Broadbent, D.A. Roberts and A. Lagendijk, Proc. VMIC92ISMIC-101 (1992) 260.
- (1992) Proc. VMIC92ISMIC-101 , pp. 260
- Raaijmakers, I.J.¹ Virtis, R.V.² Sandhu, G.S.³ Yang, J.⁴ Broadbent, E.K.⁵ Roberts, D.A.⁶ Lagendijk, A.⁷

139
- 0346114129
- D.F. Favreau, Y. Shacham-Diamond, Y. Horiike, MRS, Pittsburgh, PA
- A. Weber, V. Bringmann, R. Nikulski, R. Pockelmann, C.P. Klages, M.E. Gross, W.L. Brown, R.M. Charatan, E. Dons, D.J. Eaglesham, in: D.F. Favreau, Y. Shacham-Diamond, Y. Horiike, Advanced Metallization for ULSI Applications in 1993, MRS, Pittsburgh, PA, 1994, p. 125.
- (1994) Advanced Metallization for ULSI Applications in 1993 , pp. 125
- Weber, A.¹ Bringmann, V.² Nikulski, R.³ Pockelmann, R.⁴ Klages, C.P.⁵ Gross, M.E.⁶ Brown, W.L.⁷ Charatan, R.M.⁸ Dons, E.⁹ Eaglesham, D.J.¹⁰

140
- 0348005450
- personal communication
- A. Kaloyeros, personal communication, 1993.
- (1993)
- Kaloyeros, A.¹

141
- 0346114144
- M.S. Thesis, RPI, Troy, NY
- S. Kumar, M.S. Thesis, RPI, Troy, NY (1995); also S. Kumar, M. Eizenberg, A.K. Sinha, S.P. Murarka, to be published.
- (1995)
- Kumar, S.¹

142
- 0348005449
- to be published
- S. Kumar, M.S. Thesis, RPI, Troy, NY (1995); also S. Kumar, M. Eizenberg, A.K. Sinha, S.P. Murarka, to be published.
- Kumar, S.¹ Eizenberg, M.² Sinha, A.K.³ Murarka, S.P.⁴

143
- 0029403504
- M. Eizenberg, MRS Bull. XX (11) (1995) 38.
- (1995) MRS Bull. , vol.20 , Issue.11 , pp. 38
- Eizenberg, M.¹

144
- 0003570873
- Butterworth, Boston, MA
- E.A. Brandes, G.B. Brook (Eds.), Smithels Metal Reference Book, 7th ed., Butterworth, Boston, MA, 1992.
- (1992) Smithels Metal Reference Book, 7th Ed.
- Brandes, E.A.¹ Brook, G.B.²

145
- 84971193997
- J.S.H. Cho, H.K. Kang, S.S. Wong, Y. Shacham-Diamond, MRS Bull. 18 (1993) 31.
- (1993) MRS Bull. , vol.18 , pp. 31
- Cho, J.S.H.¹ Kang, H.K.² Wong, S.S.³ Shacham-Diamond, Y.⁴

146
- 33750861317
- C.Y. Mak, MRS Bull. 19 (1994) 55.
- (1994) MRS Bull. , vol.19 , pp. 55
- Mak, C.Y.¹

147
- 0026120332
- Y. Shacham-Diamond, J. Micromech. Microeng, 1 (1991) 66.
- (1991) J. Micromech. Microeng , vol.1 , pp. 66
- Shacham-Diamond, Y.¹

148
- 0346744719
- Publ. P94003, SRC, Research Triangle Park, NC
- J.M. Crivello, SRC Topical Research Conference, Publ. P94003, SRC, Research Triangle Park, NC, 1994, p. 45.
- (1994) SRC Topical Research Conference , pp. 45
- Crivello, J.M.¹

149
- 0029194195
- C.-I. Lang, G.-R. Yang, J.A. Moore, T.-M. Lu, Mater. Res. Soc. Symp. Proc. 381 (1995) 45.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.381 , pp. 45
- Lang, C.-I.¹ Yang, G.-R.² Moore, J.A.³ Lu, T.-M.⁴

150
- 0029180169
- K. Endo, T. Tatsumi, Mater. Res. Soc. Symp. Proc. 381 (1995) 249.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.381 , pp. 249
- Endo, K.¹ Tatsumi, T.²

151
- 0029202049
- H. Kudo, R. Shinohara, M. Yamada, Mater. Res. Soc. Symp. Proc. 381 (1995) 105.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.381 , pp. 105
- Kudo, H.¹ Shinohara, R.² Yamada, M.³

152
- 0020798739
- G.C. Schwartz, P.M. Schaible, J. Electrochem. Soc. 130 (1983) 1777.
- (1983) J. Electrochem. Soc. , vol.130 , pp. 1777
- Schwartz, G.C.¹ Schaible, P.M.²

153
- 0001002205
- B.J. Howard, C. Steinbruchel, Appl. Phys. Lett. 59 (1991) 914.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 914
- Howard, B.J.¹ Steinbruchel, C.²

154
- 84919220013
- B.J. Howard, S.K. Wolterman, C. Steinbruchel, Mater. Res. Soc. Symp. Proc. 201 (1991) 129.
- (1991) Mater. Res. Soc. Symp. Proc. , vol.201 , pp. 129
- Howard, B.J.¹ Wolterman, S.K.² Steinbruchel, C.³

155
- 0348005441
- T.S. Cale, F.S. Pintchovski (Eds.), MRS, Pittsburgh, PA
- B.J. Howard, C. Steinbruchel, in: T.S. Cale, F.S. Pintchovski (Eds.), 1992 Conf. Proc. ULSI-VII, MRS, Pittsburgh, PA, 1993, p. 391.
- (1993) 1992 Conf. Proc. ULSI-VII , pp. 391
- Howard, B.J.¹ Steinbruchel, C.²

156
- 0347375099
- V.V.S. Rana, R.V. Joshi, I. Ohdomari (Eds.), MRS, Pittsburgh, PA
- J. Farkas, K.M. Chi, T.T. Kodas, M.J. Hampden-Smith, in: V.V.S. Rana, R.V. Joshi, I. Ohdomari (Eds.), Advanced Metallization for ULSI Applications, MRS, Pittsburgh, PA, 1992, p. 445.
- (1992) Advanced Metallization for ULSI Applications , pp. 445
- Farkas, J.¹ Chi, K.M.² Kodas, T.T.³ Hampden-Smith, M.J.⁴

157
- 0027612248
- M. Sato, Y. Arita, Jpn. J. Appl. Phys. 32 (1992) 3013.
- (1992) Jpn. J. Appl. Phys. , vol.32 , pp. 3013
- Sato, M.¹ Arita, Y.²

158
- 26144439180
- Y. Arita, N. Awaya, K. Ohno, M. Sato, MRS Bull. 19 (1994) 68.
- (1994) MRS Bull. , vol.19 , pp. 68
- Arita, Y.¹ Awaya, N.² Ohno, K.³ Sato, M.⁴

159
- 84971173801
- See references regarding the use of lasers in this reference: M.J. Hampden-Smith, T.T. Kodas, MRS Bull. 18 (1993) 39.
- (1993) MRS Bull. , vol.18 , pp. 39
- Hampden-Smith, M.J.¹ Kodas, T.T.²

160
- 0008814114
- S.P. Murarka, J. Steigerwald, R.J. Gutmann, MRS Bull. 18 (1993) 46.
- (1993) MRS Bull. , vol.18 , pp. 46
- Murarka, S.P.¹ Steigerwald, J.² Gutmann, R.J.³

161
- 0346744701
- F.B. Kaufman, D.B. Thompson, R.E. Broadie, M.A. Jaso, W.L. Guthrie, D.J. Pearson, M.B. Small, J. Electrochem. Soc. 138 (1991) 460.
- (1991) J. Electrochem. Soc. , vol.138 , pp. 460
- Kaufman, F.B.¹ Thompson, D.B.² Broadie, R.E.³ Jaso, M.A.⁴ Guthrie, W.L.⁵ Pearson, D.J.⁶ Small, M.B.⁷

162
- 0348005437
- L. Cook, J. Non-Cryst. Solids 120 (1990) 460.
- (1990) J. Non-Cryst. Solids , vol.120 , pp. 460
- Cook, L.¹

163
- 0348005439
- U.S. Patent 4,954,142
- J.W. Carr, U.S. Patent 4,954,142 (1990).
- (1990)
- Carr, J.W.¹

164
- 0028516105
- J.M. Steigerwald, R. Zirpoli, S.P. Murarka, D. Price, R.J. Gutmann, J. Electrochem. Soc. 141 (1994) 2842.
- (1994) J. Electrochem. Soc. , vol.141 , pp. 2842
- Steigerwald, J.M.¹ Zirpoli, R.² Murarka, S.P.³ Price, D.⁴ Gutmann, R.J.⁵

165
- 0346744702
- Ph.D. Thesis, Rensselaer Polytechnic Institute, Troy, NY, January
- J.M. Steigerwald, Ph.D. Thesis, Rensselaer Polytechnic Institute, Troy, NY, January 1995.
- (1995)
- Steigerwald, J.M.¹

166
- 0001519648
- J.M. Steigerwald, S.P. Murarka, R.J. Gutmann, D.J. Duquette, Mater. Chem. Phys. 41 (1995) 217.
- (1995) Mater. Chem. Phys. , vol.41 , pp. 217
- Steigerwald, J.M.¹ Murarka, S.P.² Gutmann, R.J.³ Duquette, D.J.⁴

167
- 84953476151
- SRC, Research Triangle Park, NC
- S. Lakshminarayanan, T.P. Chow, J.M. Steigerwald, D. Price, J. Trogolo, M. Bourgeois, S.P. Murarka, R.J. Gutmann, Proc. Techcon '93, SRC, Research Triangle Park, NC, 1993, pp. 390-392.
- (1993) Proc. Techcon '93 , pp. 390-392
- Lakshminarayanan, S.¹ Chow, T.P.² Steigerwald, J.M.³ Price, D.⁴ Trogolo, J.⁵ Bourgeois, M.⁶ Murarka, S.P.⁷ Gutmann, R.J.⁸

168
- 0141784402
- Univ. of South Florida, Tampa, FL
- B. Luther, J.F. White, C. Uzoh, T. Cacouris, J. Hummel, C. Uzoh, W. Guthrie, N. Lustig, S. Greco, N. Greco, E. Colgan, S. Mathad, L. Saraf, E.J. Weitzman, C.K. Hu, F. Kaufman, M. Jaso, P. Buchwalter, S. Reynolds, C. Smart, D. Edelstein, E. Baran, S. Cohen, T. Knoedler, J. Harper, D.J. Pearson, M. Small, Proc. 1993 VMIC, Univ. of South Florida, Tampa, FL, 1993, p. 15.
- (1993) Proc. 1993 VMIC , pp. 15
- Luther, B.¹ White, J.F.² Uzoh, C.³ Cacouris, T.⁴ Hummel, J.⁵ Uzoh, C.⁶ Guthrie, W.⁷ Lustig, N.⁸ Greco, S.⁹ Greco, N.¹⁰ Colgan, E.¹¹ Mathad, S.¹² Saraf, L.¹³ Weitzman, E.J.¹⁴ Hu, C.K.¹⁵ Kaufman, F.¹⁶ Jaso, M.¹⁷ Buchwalter, P.¹⁸ Reynolds, S.¹⁹ Smart, C.²⁰ more..

169
- 0027848479
- IEEE, Piscataway, NJ
- J. Paraszczak, D. Edelstein, S. Cohen, E. Babich, J. Hummel, IEEE-IEDM, 1993, Tech. Digest, IEEE, Piscataway, NJ, 1993, p. 261.
- (1993) IEEE-IEDM, 1993, Tech. Digest , pp. 261
- Paraszczak, J.¹ Edelstein, D.² Cohen, S.³ Babich, E.⁴ Hummel, J.⁵

170
- 0027889402
- IEEE, Piscataway, NJ
- J.-S. Cho, H.-K. Kang, C. Ryu, S.S. Wong, IEEE-IEDM, 1993, Tech. Digest, IEEE, Piscataway, NJ, 1993, p. 265.
- (1993) IEEE-IEDM, 1993, Tech. Digest , pp. 265
- Cho, J.-S.¹ Kang, H.-K.² Ryu, C.³ Wong, S.S.⁴

171
- 0027889403
- IEEE, Piscataway, NJ
- H.M. Dalal R.V. Joshi, H.S. Rathore, R. Fillipi, IEEE-IEDM, 1993, Tech. Digest, IEEE, Piscataway, NJ, 1993, p. 273.
- (1993) IEEE-IEDM, 1993, Tech. Digest , pp. 273
- Dalal, H.M.¹ Joshi, R.V.² Rathore, H.S.³ Fillipi, R.⁴

172
- 0346114128
- B.R. Livesay, M.D. Nagarkar (Eds.), ASM International, Metals Park, OH
- N. Kumar, B.J. Nelson, in: B.R. Livesay, M.D. Nagarkar (Eds.), New Technologies in Electronic Packaging, ASM International, Metals Park, OH, 1990, p. 99.
- (1990) New Technologies in Electronic Packaging , pp. 99
- Kumar, N.¹ Nelson, B.J.²

173
- 5344251093
- IEEE, Piscataway, NJ
- F. Pintchovski, IEEE-IEDM, 1994, Tech. Digest, IEEE, Piscataway, NJ, 1994, p. 97.
- (1994) IEEE-IEDM, 1994, Tech. Digest , pp. 97
- Pintchovski, F.¹

174
- 0001470634
- A.S. Nowick, J.J. Burton (Eds.), Academic Press, New York
- H.B. Huntington, in: A.S. Nowick, J.J. Burton (Eds.), Diffusion in Solids - Recent Developments, Academic Press, New York, 1975, p. 303.
- (1975) Diffusion in Solids - Recent Developments , pp. 303
- Huntington, H.B.¹

175
- 0004039424
- A.S. Nowick, J.J. Burton (Eds.), Academic Press, New York
- N.L. Peterson, in: A.S. Nowick, J.J. Burton (Eds.), Diffusion in Solids-Recent Developments, Academic Press, New York, 1975, p. 116.
- (1975) Diffusion in Solids-Recent Developments , pp. 116
- Peterson, N.L.¹

176
- 0027589941
- J. Tao, N.W. Cheung, C. Hu, IEEE Electron Device Lett. 14 (1993) 249.
- (1993) IEEE Electron Device Lett. , vol.14 , pp. 249
- Tao, J.¹ Cheung, N.W.² Hu, C.³

177
- 0027577979
- T. Nitta, T. Ohmi, T. Hoshi, S. Sakai, K. Sakaibara, S. Imai, T. Shibata, J. Electrochem. Soc. 140 (1993) 1131.
- (1993) J. Electrochem. Soc. , vol.140 , pp. 1131
- Nitta, T.¹ Ohmi, T.² Hoshi, T.³ Sakai, S.⁴ Sakaibara, K.⁵ Imai, S.⁶ Shibata, T.⁷

178
- 23544434129
- IEEE, Piscataway, NJ
- T. Ohmi, T. Hoshi, T. Yoshie, T. Takewaki, M. Otsuki, T. Shibata, T. Nitta, Proc. IEEE IEDM, 1994, Tech. Digest, IEEE, Piscataway, NJ, 1994, p. 285.
- (1994) Proc. IEEE IEDM, 1994, Tech. Digest , pp. 285
- Ohmi, T.¹ Hoshi, T.² Yoshie, T.³ Takewaki, T.⁴ Otsuki, M.⁵ Shibata, T.⁶ Nitta, T.⁷

179
- 0348005436
- Univ. of South Florida, Tampa, FL
- H.K. Kang, J.S.H. Cho, I. Asano, S.S. Wong, Proc. 1992-VMIC, Univ. of South Florida, Tampa, FL, 1992, p. 337.
- (1992) Proc. 1992-VMIC , pp. 337
- Kang, H.K.¹ Cho, J.S.H.² Asano, I.³ Wong, S.S.⁴

180
- 0002969049
- IEEE, Piscataway, NJ
- H. Yamada, T. Hoshi, T. Takewaki, T. Shibata, T. Ohmi, T. Nitta, Proc. 1993 IEEE-IEDM, IEEE, Piscataway, NJ, 1993, p. 269.
- (1993) Proc. 1993 IEEE-IEDM , pp. 269
- Yamada, H.¹ Hoshi, T.² Takewaki, T.³ Shibata, T.⁴ Ohmi, T.⁵ Nitta, T.⁶

181
- 0011773383
- M.H. Kiang, J. Tao, W. Namgoong, C. Hu, M. Lieberman, N.W. Cheung, H.-K. Kang, S.S. Wong, Mater. Res. Soc. Symp. Proc. 265 (1992) 187.
- (1992) Mater. Res. Soc. Symp. Proc. , vol.265 , pp. 187
- Kiang, M.H.¹ Tao, J.² Namgoong, W.³ Hu, C.⁴ Lieberman, M.⁵ Cheung, N.W.⁶ Kang, H.-K.⁷ Wong, S.S.⁸

182
- 0029519226
- No. 95CH-35810, IEEE, Piscataway, NJ
- T. Takewaki R. Kaihara, T. Ohmi, T. Nitta, IEEE-IEDM 1995, Tech. Digest, No. 95CH-35810, IEEE, Piscataway, NJ, 1995, p. 253.
- (1995) IEEE-IEDM 1995, Tech. Digest , pp. 253
- Takewaki, T.¹ Kaihara, R.² Ohmi, T.³ Nitta, T.⁴

183
- 0348005434
- Troy, NY, 23-24 July 1996, vol. S96013, SRC, Durham, NC
- T. Nogami, C.H. Ting, in Proc. SRC Topical Res. Conf., Troy, NY, 23-24 July 1996, vol. S96013, SRC, Durham, NC, 1996.
- (1996) Proc. SRC Topical Res. Conf.
- Nogami, T.¹ Ting, C.H.²

184
- 36449008541
- K.L. Lee, C.K. Hu, K.N. Tu, J. Appl. Phys. 78 (1995) 4428.
- (1995) J. Appl. Phys. , vol.78 , pp. 4428
- Lee, K.L.¹ Hu, C.K.² Tu, K.N.³

185
- 0027576799
- C.W. Park, R.W. Vook, Thin Solid Films 226 (1993) 238.
- (1993) Thin Solid Films , vol.226 , pp. 238
- Park, C.W.¹ Vook, R.W.²

186
- 0346114125
- Y. Igarashi, Proc. VLSI Symp., 1996, p. 76.
- (1996) Proc. VLSI Symp. , pp. 76
- Igarashi, Y.¹

187
- 0347375168
- P.J. Ding, W.A. Lanford, S. Hymes, S.P. Murarka, J. Appl. Phys. 75 (1994) 3627. Also see Appl. Phys. Lett. 65 (1994) 1778.
- (1994) J. Appl. Phys. , vol.75 , pp. 3627
- Ding, P.J.¹ Lanford, W.A.² Hymes, S.³ Murarka, S.P.⁴

188
- 0001651460
- P.J. Ding, W.A. Lanford, S. Hymes, S.P. Murarka, J. Appl. Phys. 75 (1994) 3627. Also see Appl. Phys. Lett. 65 (1994) 1778.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1778

189
- 0026868335
- A.E. Sauter, W.D. Nix, J. Mater. Res. 7 (1992) 1133.
- (1992) J. Mater. Res. , vol.7 , pp. 1133
- Sauter, A.E.¹ Nix, W.D.²

190
- 0346114124
- SUNY, Albany, NY, 10 November
- S.S. Wong, work presented at the 1994 SRC review, SUNY, Albany, NY, 10 November 1994.
- (1994) 1994 SRC Review
- Wong, S.S.¹

191
- 0348005433
- Troy, NY, personal communication
- E. Rymaszewski, L.J. Schowalter, RPI, Troy, NY, personal communication, 1995.
- (1995) RPI
- Rymaszewski, E.¹ Schowalter, L.J.²

192
- 0024719639
- H. Kroger, C. Hilbert, D.A. Gibson, U. Ghoshal, L.N. Smith, Proc. IEEE 77 (1989) 1287.
- (1989) Proc. IEEE , vol.77 , pp. 1287
- Kroger, H.¹ Hilbert, C.² Gibson, D.A.³ Ghoshal, U.⁴ Smith, L.N.⁵

193
- 0029182073
- L.W. Hrubesh, Mater. Res. Soc. Symp. Proc. 381 (1995) 267.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.381 , pp. 267
- Hrubesh, L.W.¹

194
- 0346744697
- unpublished work
- S.P. Murarka, T.M. Lu, D. Millard, W. Jennings, unpublished work, 1995.
- (1995)
- Murarka, S.P.¹ Lu, T.M.² Millard, D.³ Jennings, W.⁴

195
- 0346744696
- personal communication
- S. Sze, personal communication, 1982.
- (1982)
- Sze, S.¹

196
- 0003938188
- Pergamon, New York
- O. Kubaschewski, E. Evans, C. Alcock, Metallurgical Thermochemistry, 4th ed., Pergamon, New York, 1967.
- (1967) Metallurgical Thermochemistry, 4th Ed.
- Kubaschewski, O.¹ Evans, E.² Alcock, C.³

197
- 0346114126
- personal communication
- Harper, personal communication, 1989.
- (1989)
- Harper¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.