A load-lock-compatible nanomanipulation system for scanning electron microscope

IEEE/ASME Transactions on Mechatronics

Volumn 18, Issue 1, 2013, Pages 230-237

  Zhang, Yan Liang ^a   Zhang, Yong ^a   Ru, Changhai ^b   Chen, Brandon K ^a   Sun, Yu ^a  

^a UNIVERSITY OF TORONTO   (Canada)

^b SOOCHOW UNIVERSITY   (China)

Author keywords

Contact detection; nanomanipulation system; scanning electron microscope (SEM); system characterization; visual servoing

Indexed keywords

CARTESIANS; CLOSED-LOOP CONTROL; CONTACT DETECTION; HIGH RESOLUTION; HIGH VACUUM; HIGH-VACUUM CHAMBERS; NANO MANIPULATION SYSTEMS; NANO-POSITIONING; NANOMANIPULATORS; OPTICAL ENCODER; PIEZO MOTORS; PIEZO-ACTUATORS; POSITION FEEDBACK; SCANNING ELECTRON MICROSCOPE; SYSTEM CHARACTERIZATION;

NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; VISUAL SERVOING;

MICROMANIPULATORS;

EID: 84866490793     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2011.2166162     Document Type: Article

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