Nanofabrication, nanoinstrumentation and nanoassembly by nanorobotic manipulation

International Journal of Robotics Research

Volumn 28, Issue 4, 2009, Pages 537-547

  Fukuda, Toshio ^a   Nakajima, Masahiro ^a   Liu, Pou ^a   Elshimy, Haitham ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Carbon nanotubes.; Electron microscopes; Nanoassembly; Nanofabrication; Nanoinstrumentation; Nanomanipulation

Indexed keywords

ELECTRON MICROSCOPES; ELECTRONS; MICROMANIPULATORS; NANOROBOTICS; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL; TRANSMISSION ELECTRON MICROSCOPY;

BIOAPPLICATIONS; DEVICES AND SYSTEMS; FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITIONS; INDUCED DEPOSITIONS; NANO MANIPULATORS; NANO-ACTUATORS; NANO-DEVICES; NANO-ROBOTIC MANIPULATIONS; NANOASSEMBLY; NANOFABRICATION; NANOINSTRUMENTATION; NANOMANIPULATION; NANOROBOTIC MANIPULATION SYSTEMS; SCANNING ELECTRON MICROSCOPES; THREE-DIMENSIONAL STRUCTURES; TRANSMISSION ELECTRON MICROSCOPES; WORKING SPACES;

CARBON NANOTUBES;

EID: 62849104595     PISSN: 02783649     EISSN: 17413176     Source Type: Journal    
DOI: 10.1177/0278364908097212     Document Type: Article

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