Adaptive sliding mode control with perturbation estimation and PID sliding surface for motion tracking of a piezo-driven micromanipulator

IEEE Transactions on Control Systems Technology

Volumn 18, Issue 4, 2010, Pages 798-810

  Li, Yangmin ^a   Xu, Qingsong ^a  

^a UNIVERSITY OF MACAU   (Macao)

Author keywords

Flexure mechanism; Hysteresis; Micromanipu lator; Nonlinear system; Piezoelectric actuation; Robust control

Indexed keywords

CONTROLLERS; HYSTERESIS; MECHANISMS; MICROMANIPULATORS; MOTION ANALYSIS; NAVIGATION; NONLINEAR SYSTEMS; PARTICLE SWARM OPTIMIZATION (PSO); PIEZOELECTRICITY; ROBUST CONTROL; SLIDING MODE CONTROL;

ADAPTIVE SLIDING MODE CONTROL; FLEXURE MECHANISM; LYAPUNOV STABILITY ANALYSIS; MICROMANIPULATOR SYSTEMS; MOTION TRACKING CONTROL; PERTURBATION ESTIMATION; PID-SLIDING SURFACES; PIEZOELECTRIC ACTUATION;

ADAPTIVE CONTROL SYSTEMS;

EID: 77954145728     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2009.2028878     Document Type: Article

References (40)

1. J. J. Abbott, Z. Nagy, F. Beyeler, and B. J. Nelson, "Robotics in the small, part I: Microrobotics," IEEE Robot. Autom. Mag., vol.14, no.2, pp. 92-103, Jun. 2007.
2. S. Devasia, E. Eleftheriou, and S. O. R. Moheimani, "A survey of control issues in nanopositioning," IEEE Trans. Control Syst. Technol., vol.15, no.5, pp. 802-823, Sep. 2007.
3. Y.-C. Huang and D.-Y. Lin, "Ultra-fine tracking control on piezoelectric actuated motion stage using piezoelectric hysteretic model," Asian J. Contr., vol.6, no.2, pp. 208-216, 2004.
4. G. Song, J. Zhao, X. Zhou, and J. De Abreu-Garcia, "Tracking control of a piezoceramic actuator with hysteresis compensation using inverse Preisach model," IEEE/ASME Trans. Mechatronics, vol.10, no.2, pp. 198-209, Apr. 2005.
5. C.-J. Lin and S.-R. Yang, "Precise positioning of piezo-actuated stages using hysteresis-observer based control," Mechatronics, vol.16, no.7, pp. 417-426, Sep. 2006.
6. H. G. Xu, T. Ono, and M. Esashi, "Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors," J. Micromech. Microeng., vol.16, no.12, pp. 2747-2754, Dec. 2006.
7. A. Sebastian and S. M. Salapaka, "Design methodologies for robust nano-positioning," IEEE Trans. Control Syst. Technol., vol.13, no.6, pp. 868-876, Nov. 2005.
8. ∞ loop shaping bilateral controller for a two-fingered tele-micromanipulation system," IEEE Trans. Control Syst. Technol., vol.15, no.5, pp. 891-905, Sep. 2007.
9. J. Dong, S. M. Salapaka, and P. M. Ferreira, "Robust control of a parallel- kinematic nanopositioner," J. Dyn. Sys., Meas., Control, vol.130, no.4, pp. 041007-1-041007-15, 2008.
10. T. W. Seo, H. S. Kim, D. S. Kang, and J. Kim, "Gain-scheduled robust control of a novel 3-DOF micro parallel positioning platform via a dual stage servo system," Mechatronics, vol.18, no.9, pp. 495-505, Nov. 2008.
11. S. S. Aphale, S. Devasia, and S. O. R. Moheimani, "High-bandwidth control of a piezoelectric nanopositioning stage in the presence of plant uncertainties," Nanotechnology, vol.19, no.12, pp. 125503-1-125503-9, Mar. 2008.
12. Y. Wu and Q. Zou, "Iterative control approach to compensate for both the hysteresis and the dynamics effects of piezo actuators," IEEE Trans. Control Syst. Technol., vol.15, no.5, pp. 936-944, Sep. 2007.
13. K. Santa and S. Fatikow, "Control system for motion control of a piezoelectric micromanipulation robot," Adv. Robot., vol.13, no.6, pp. 577-589, 2000.
14. F.-J. Lin, R.-J. Wai, K.-K. Shyu, and T.-M. Liu, "Recurrent fuzzy neural network control for piezoelectric ceramic linear ultrasonic motor drive," IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol.48, no.4, pp. 900-913, Jul. 2001.
15. H. C. Liaw, B. Shirinzadeh, and J. Smith, "Sliding-mode enhanced adaptive motion tracking control of piezoelectric actuation systems for micro/nano manipulation," IEEE Trans. Control Syst. Technol., vol.16, no.4, pp. 826-833, Jul. 2008.
16. J.-C. Shen, W.-Y. Jywe, C.-H. Liu, Y.-T. Jian, and J. Yang, "Slidingmode control of a three-degrees-of-freedom nanopositioner," Asian J. Contr., vol.10, no.3, pp. 267-276, May 2008.
17. T.-C. Kuo, Y.-J. Huang, and S.-H. Chang, "Sliding mode control with self-tuning law for uncertain nonlinear systems," ISA Trans., vol.47, no.2, pp. 171-178, Apr. 2008.
18. H. Elmali and N. Olgac, "Sliding mode control with perturbation estimation (SMCPE): A new approach," Int. J. Control, vol.56, pp. 923-941, 1992.
19. H. Elmali and N. Olgac, "Implementation of sliding mode control with perturbation estimation (SMCPE)," IEEE Trans. Control Syst. Technol., vol.4, no.1, pp. 79-85, Jan. 1996. (Pubitemid 126776783)
20. N.-I. Kim, C.-W. Lee, and P.-H. Chang, "Sliding mode control with perturbation estimation: Application to motion control of parallel manipulator," Control Eng. Practice, vol.6, no.11, pp. 1321-1330, Nov. 1998
21. S. Bashash and N. Jalili, "Robust multiple frequency trajectory tracking control of piezoelectrically driven micro/nanopositioning systems," IEEE Trans. Control Syst. Technol., vol.15, no.5, pp. 867-878, Sep. 2007.
22. J. J. E. Slotine and M. W. Spong, "Robust robot control with bounded input torques," J. Robot. Syst., vol.2, no.5, pp. 329-352, 1985.
23. Y. Stepanenko, Y. Cao, and C.-Y. Su, "Variable structure control of robotic manipulator with PID sliding surfaces," Int. J. Robust Nonlinear Control, vol.8, pp. 79-90, 1998.
24. V. Parra-Vega, S. Arimoto, Y.-H. Liu, G. Hirzinger, and P. Akella, "Dynamic sliding PID control for tracking of robot manipulators: Theory and experiments," IEEE Trans. Robot. Automat., vol.19, no.6, pp. 967-976, Dec. 2003.
25. I. Eker, "Sliding mode control with PID sliding surface and experimental application to an electromechanical plant," ISA Trans., vol.45, no.1, pp. 109-118, Jan. 2006.
26. N. Sadati and R. Ghadami, "Adaptive multi-model sliding mode control of robotic manipulators using soft computing," Neurocomputing, vol.71, no.13-15, pp. 2702-2710, Aug. 2008.
27. A. S. Putra, S. Huang, K. K. Tan, S. K. Panda, and T. H. Lee, "Design, modeling, and control of piezoelectric actuators for intracytoplasmic sperm injection," IEEE Trans. Control Syst. Technol., vol.15, no.5, pp. 879-890, Sep. 2007.
28. H.-J. Shieh and C.-H. Hsu, "An integrator-backstepping-based dynamic surface control method for a two-axis piezoelectric micropositioning stage," IEEE Trans. Control Syst. Technol., vol.15, no.5, pp. 916-926, Sep. 2007.
29. L. Lu, Z. Chen, B. Yao, and Q.Wang, "Desired compensation adaptive robust control of a linear-motor-driven precision industrial gantry with improved cogging force compensation," IEEE/ASME Trans. Mechatron., vol.13, no.6, pp. 617-624, Dec. 2008.
30. Y. Li and Q. Xu, "Design and analysis of a totally decoupled flexurebased XY parallel micromanipulator," IEEE Trans. Robot., vol.25, no.3, pp. 645-657, Jun. 2009.
31. T. S. Low and W. Guo, "Modeling of a three-layer piezoelectric bimorph beam with hysteresis," J. MEMS, vol.4, no.4, pp. 230-237, 1995.
32. M. Clerc and J. Kennedy, "The particle swarm: Explosion, stability, and convergence in a multi-dimensional complex space," IEEE Trans. Evol. Comput., vol.6, no.1, pp. 58-73, Feb. 2002.
33. Q. Xu and Y. Li, "Error analysis and optimal design of a class of translational parallel kinematic machine using particle swarm optimization," Robotica, vol.27, no.1, pp. 67-78, Jan. 2009.
34. J.-L. Ha, Y.-S. Kung, R.-F. Fung, and S.-C. Hsien, "A comparison of fitness functions for the identification of a piezoelectric hysteretic actuator based on the real-coded genetic algorithm," Sens. Actuator A-Phys., vol.132, no.2, pp. 643-650, Nov. 2006.
35. B. Birge, "PSOt-A particle swarm optimization toolbox for use with Matlab," in Proc. 2003 IEEE SIS, Indianapolis, IN, 2003, pp. 182-186.
36. S.-M. Yang and S.-J. Ke, "Performance evaluation of a velocity observer for accurate velocity estimation of servo motor drives," IEEE Trans. Ind. Appl., vol.36, no.1, pp. 98-104, Jan./Feb. 2000.
37. J. J. Gorman, N. G. Dagalakis, and B. G. Boone, "Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering," in Proc. SPIE-Free-Space Laser Communication and Active Laser Illumination III, D. G. Voelz and J. C. Ricklin, Eds., 2004, vol.5160, pp. 170-181.
38. H. K. Khalil, Nonlinear Systems, 3rd ed. Upper Saddle River, NJ: Prentice-Hall, 2002.
39. Y. Cao and Y. Stepanenko, "A novel variable structure control scheme for an industrial robot: Theory and experiments," in Proc. 2nd IEEE Conf. Control Appl., Vancouver, BC, Canada, 1993, pp. 723-727.
40. Y. Koren, "Cross-coupled biaxial computer controls for manufacturing systems," ASME J. Dyn. Syst., Meas., Contr., vol.102, no.4, pp. 265-272, 1980.