Robust adaptive control of coupled parallel piezo-flexural nanopositioning stages

IEEE/ASME Transactions on Mechatronics

Volumn 14, Issue 1, 2009, Pages 11-20

  Bashash, Saeid ^a   Jalili, Nader ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

Adaptive control; Parallel kinematics and machines; Piezo flexural stages; Piezoelectric devices; Robustness

Indexed keywords

ADAPTIVE CONTROL SYSTEMS; CONTROLLERS; COUPLINGS; HYSTERESIS; KINEMATICS; NAVIGATION; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; ROBUSTNESS (CONTROL SYSTEMS); SCANNING PROBE MICROSCOPY; TELECOMMUNICATION NETWORKS; UNCERTAIN SYSTEMS; VARIABLE STRUCTURE CONTROL;

ADAPTIVE CONTROL; CLOSED-LOOP SYSTEMS; CONTROLLER VALIDATIONS; CROSS-COUPLED; HIGH FREQUENCIES; HYSTERESIS NONLINEARITIES; LYAPUNOV CRITERIONS; LYAPUNOV-BASED CONTROLS; NANOPOSITIONING STAGES; NON LINEARITIES; PARALLEL KINEMATICS AND MACHINES; PARAMETRIC UNCERTAINTIES; PHASE TRAJECTORIES; PIEZO-FLEXURAL STAGES; PRACTICAL IMPLEMENTATIONS; PRECISION CONTROLS; PROPORTIONAL-INTEGRAL CONTROLLERS; ROBUST ADAPTIVE CONTROLLERS; ROBUST-ADAPTIVE CONTROLS; ROBUSTNESS; SCANNING PROBES; SYSTEM ANALYSIS; THEORETICAL DEVELOPMENT; TRACKING CONTROLS; VARIABLE STRUCTURE CONTROL METHODS;

CONTROL NONLINEARITIES;

EID: 61549133477     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2008.2006501     Document Type: Article

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