Automated four-point probe measurement of nanowires inside a scanning electron microscope

IEEE Transactions on Nanotechnology

Volumn 10, Issue 4, 2011, Pages 674-681

  Ru, Changhai ^a,b   Zhang, Yong ^c   Sun, Yu ^c   Zhong, Yu ^d   Sun, Xueliang ^d   Hoyle, David ^d   Cotton, Ian ^d  

^a SOOCHOW UNIVERSITY   (China)

^b UNIVERSITY OF TORONTO   (Canada)

^c UNIVERSITY OF WESTERN ONTARIO   (Canada)

^d Hitachi High Technologies Canada Inc   (Canada)

Author keywords

Automated nanomanipulation; contact detection; four point probe; visual servo control

Indexed keywords

AUTOMATED NANOMANIPULATION; CONTACT DETECTION; FEED-FORWARD CONTROLLERS; FOUR-POINT PROBE; FOUR-POINT PROBE MEASUREMENTS; NANOMANIPULATIONS; NANOMANIPULATORS; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPES; VISION BASED; VISION SENSORS; VISUAL FEEDBACK; VISUAL SERVO CONTROL;

ELECTRON MICROSCOPES; MICROMANIPULATORS; NANOTECHNOLOGY; NANOWIRES; PNEUMATIC CONTROL EQUIPMENT; PROBES; SCANNING ELECTRON MICROSCOPY; VISUAL COMMUNICATION;

AUTOMATION;

EID: 79960265713     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2010.2065236     Document Type: Article

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